EP0075709A3 - A secondary electron spectrometer for making measurements of the potential on a sample with an electron probe - Google Patents

A secondary electron spectrometer for making measurements of the potential on a sample with an electron probe Download PDF

Info

Publication number
EP0075709A3
EP0075709A3 EP82107490A EP82107490A EP0075709A3 EP 0075709 A3 EP0075709 A3 EP 0075709A3 EP 82107490 A EP82107490 A EP 82107490A EP 82107490 A EP82107490 A EP 82107490A EP 0075709 A3 EP0075709 A3 EP 0075709A3
Authority
EP
European Patent Office
Prior art keywords
potential
sample
electron
making measurements
spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP82107490A
Other languages
German (de)
Other versions
EP0075709B1 (en
EP0075709A2 (en
Inventor
Hans-Peter Dipl.-Phys. Feuerbaum
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP0075709A2 publication Critical patent/EP0075709A2/en
Publication of EP0075709A3 publication Critical patent/EP0075709A3/en
Application granted granted Critical
Publication of EP0075709B1 publication Critical patent/EP0075709B1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/08—Electron sources, e.g. for generating photo-electrons, secondary electrons or Auger electrons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Tubes For Measurement (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
EP82107490A 1981-09-30 1982-08-17 Spectrometer for detecting secondary electrons produced by an electron probe from a target Expired EP0075709B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19813138929 DE3138929A1 (en) 1981-09-30 1981-09-30 IMPROVED SECONDARY ELECTRON SPECTROMETER FOR POTENTIAL MEASUREMENT ON A SAMPLE WITH AN ELECTRON PROBE
DE3138929 1981-09-30

Publications (3)

Publication Number Publication Date
EP0075709A2 EP0075709A2 (en) 1983-04-06
EP0075709A3 true EP0075709A3 (en) 1983-06-29
EP0075709B1 EP0075709B1 (en) 1987-04-08

Family

ID=6143065

Family Applications (1)

Application Number Title Priority Date Filing Date
EP82107490A Expired EP0075709B1 (en) 1981-09-30 1982-08-17 Spectrometer for detecting secondary electrons produced by an electron probe from a target

Country Status (4)

Country Link
US (1) US4514682A (en)
EP (1) EP0075709B1 (en)
JP (1) JPS5871542A (en)
DE (2) DE3138929A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59211953A (en) * 1983-05-17 1984-11-30 Univ Osaka Secondary electron spectral device
GB8327737D0 (en) * 1983-10-17 1983-11-16 Texas Instruments Ltd Electron detector
DE3638682A1 (en) * 1986-11-13 1988-05-19 Siemens Ag SPECTROMETER LENS FOR CARPUSULAR BEAM MEASUREMENT TECHNOLOGY
JPS63126148A (en) * 1986-11-14 1988-05-30 Hiroshi Daimon Charged particle analyzer
JP2696216B2 (en) * 1988-01-11 1998-01-14 セイコーインスツルメンツ株式会社 Ion beam processing equipment
JPH03101041A (en) * 1989-09-14 1991-04-25 Hitachi Ltd Voltage measuring device by use of electron beam
US6359451B1 (en) 2000-02-11 2002-03-19 Image Graphics Incorporated System for contactless testing of printed circuit boards
WO2001058558A2 (en) 2000-02-14 2001-08-16 Eco 3 Max Inc. Process for removing volatile organic compounds from an air stream and apparatus therefor
JP6440128B2 (en) * 2014-09-24 2018-12-19 国立研究開発法人物質・材料研究機構 Energy discriminating electron detector and scanning electron microscope using the same
US10319578B2 (en) * 2016-01-21 2019-06-11 Japan Synchrotron Radiation Research Institute Retarding potential type energy analyzer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3764898A (en) * 1971-07-28 1973-10-09 Ibm Methods of testing the continuity of an electrical conductor by use of an electron beam
US4169244A (en) * 1978-02-03 1979-09-25 Plows Graham S Electron probe testing, analysis and fault diagnosis in electronic circuits

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2946002A (en) * 1958-02-17 1960-07-19 Kingston Electronic Corp Signal-pickup test probe
US3445708A (en) * 1967-02-06 1969-05-20 Gen Electric Electron diffraction unit
US3531716A (en) * 1967-06-16 1970-09-29 Agency Ind Science Techn Method of testing an electronic device by use of an electron beam
US3448377A (en) * 1967-10-12 1969-06-03 Atomic Energy Commission Method utilizing an electron beam for nondestructively measuring the dielectric properties of a sample
US3549999A (en) * 1968-06-05 1970-12-22 Gen Electric Method and apparatus for testing circuits by measuring secondary emission electrons generated by electron beam bombardment of the pulsed circuit
DE1946931A1 (en) * 1969-09-17 1971-03-18 Gen Electric Method for testing circuits and devices for carrying out the method
DE2151167C3 (en) * 1971-10-14 1974-05-09 Siemens Ag, 1000 Berlin Und 8000 Muenchen Electron beam micro analyzer with Auger electron detection
US3796947A (en) * 1973-02-27 1974-03-12 Bell Telephone Labor Inc Electron beam testing of film integrated circuits
DE2814049A1 (en) * 1978-03-31 1979-10-18 Siemens Ag METHOD FOR CONTACTLESS MEASUREMENT OF THE POTENTIAL DEVELOPMENT IN AN ELECTRONIC COMPONENT AND ARRANGEMENT FOR PERFORMING THE METHOD
DE2823642A1 (en) * 1978-05-30 1980-01-03 Siemens Ag METHOD FOR CONTACTLESS POTENTIAL MEASUREMENT ON AN ELECTRONIC COMPONENT
US4179604A (en) * 1978-09-29 1979-12-18 The United States Of America As Represented By The Secretary Of The Navy Electron collector for forming low-loss electron images
JPS55156867A (en) * 1979-05-28 1980-12-06 Hitachi Ltd Potential measuring device
US4417203A (en) * 1981-05-26 1983-11-22 International Business Machines Corporation System for contactless electrical property testing of multi-layer ceramics

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3764898A (en) * 1971-07-28 1973-10-09 Ibm Methods of testing the continuity of an electrical conductor by use of an electron beam
US4169244A (en) * 1978-02-03 1979-09-25 Plows Graham S Electron probe testing, analysis and fault diagnosis in electronic circuits

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
"TECHNISCHES MESSEN TM", 48 Jahrgang 1981, Heft 1, R. Oldenbourg Verlag GmbH, München. P. FAZEKAS: "Elektronenstrahl pruft elektrische Potentiale in integrierten Schaltungen", Seiten 29-35 *

Also Published As

Publication number Publication date
DE3138929A1 (en) 1983-04-14
EP0075709B1 (en) 1987-04-08
DE3276035D1 (en) 1987-05-14
EP0075709A2 (en) 1983-04-06
US4514682A (en) 1985-04-30
JPS5871542A (en) 1983-04-28
JPS6352428B2 (en) 1988-10-19

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