EP0006945A1 - Method and apparatus for sensing in-plane deformation of a surface - Google Patents

Method and apparatus for sensing in-plane deformation of a surface

Info

Publication number
EP0006945A1
EP0006945A1 EP78900262A EP78900262A EP0006945A1 EP 0006945 A1 EP0006945 A1 EP 0006945A1 EP 78900262 A EP78900262 A EP 78900262A EP 78900262 A EP78900262 A EP 78900262A EP 0006945 A1 EP0006945 A1 EP 0006945A1
Authority
EP
European Patent Office
Prior art keywords
beams
combined
plane
pattern
combining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP78900262A
Other languages
German (de)
English (en)
French (fr)
Inventor
James Mckelvie
Colin Alexander Walker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Research Development Corp UK
Original Assignee
National Research Development Corp UK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Development Corp UK filed Critical National Research Development Corp UK
Publication of EP0006945A1 publication Critical patent/EP0006945A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/165—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by means of a grating deformed by the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter

Definitions

  • the relief pattern may be periodic in that direction only.
  • measurement of strain in a single direction is not always adequate, and the direction of strain is not always predictable.
  • Figure 1 shows schematically apparatus for sensing strain in one dimension
  • Each combined beam is in a different direction and contains information related to a strain along one in-plane direction so that calculation of the value of strain in each in- plane direction can be made simply and easily from each inter ⁇ ference pattern with no problem of superimposition of information from different, strain directions. Measurements can be made simultaneously in two or more directions. However, there is still the problem that, for an overall picture, the information on the measured strains must be combined if maximum strain and its direction are required * This may involve considerable mathematical computation.
  • Each comparator is supplied with a reference voltage from a unit 57A, B, C.
  • phase modulator is arranged to apply a continuous phase.- modulation to the beam 18 in a manner such as to change its wavelength.
  • the effect may be achieved using an electro- optic device, or a piezoelectric crystal, driven by a sawtooth waveform; or an acousto-optic device; or a moving diffraction grating; the change in wavelength willvthen be con inual rather than strictly continuous.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
EP78900262A 1977-11-25 1979-06-18 Method and apparatus for sensing in-plane deformation of a surface Withdrawn EP0006945A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB4917077 1977-11-25
GB4917077 1977-11-25

Publications (1)

Publication Number Publication Date
EP0006945A1 true EP0006945A1 (en) 1980-01-23

Family

ID=10451426

Family Applications (1)

Application Number Title Priority Date Filing Date
EP78900262A Withdrawn EP0006945A1 (en) 1977-11-25 1979-06-18 Method and apparatus for sensing in-plane deformation of a surface

Country Status (6)

Country Link
EP (1) EP0006945A1 (ja)
JP (1) JPS54500096A (ja)
CH (1) CH626992A5 (ja)
FR (1) FR2454602A1 (ja)
GB (1) GB2008791B (ja)
WO (1) WO1979000320A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8005258A (nl) * 1980-09-22 1982-04-16 Philips Nv Interferometer.
US4474466A (en) * 1981-03-11 1984-10-02 National Research Development Corporation Measurement of deformation
FR2504256A1 (fr) * 1981-04-16 1982-10-22 Euromask Procede et dispositif de mesure optique de deplacement et application aux photorepeteurs sur tranche
GB2242518B (en) * 1990-03-12 1994-03-30 Univ Southampton Strain gauge
NL1011035C2 (nl) * 1999-01-15 2000-07-18 Kema Nv Werkwijze en inrichting voor het meten van in-vlak verplaatsingen.
CN103278268A (zh) * 2013-05-31 2013-09-04 哈尔滨工业大学 基于散斑干涉原理的应力测试装置及应力集中测试方法
US9459093B2 (en) * 2014-02-20 2016-10-04 Kabushiki Kaisha Toshiba Deflection measuring device and deflection measuring method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2127483A1 (de) * 1971-06-03 1972-12-14 Leitz Ernst Gmbh Verfahren zur interferentiellen Messung von Langen, Winkeln, Gangunter schieden oder Geschwindigkeiten

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO7900320A1 *

Also Published As

Publication number Publication date
WO1979000320A1 (en) 1979-06-14
FR2454602A1 (fr) 1980-11-14
JPS54500096A (ja) 1979-12-20
GB2008791A (en) 1979-06-06
FR2454602B1 (ja) 1983-01-28
GB2008791B (en) 1982-04-28
CH626992A5 (ja) 1981-12-15

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Designated state(s): FR

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

110E Request filed for conversion into a national patent application [according to art. 135 epc]
18D Application deemed to be withdrawn
RIN1 Information on inventor provided before grant (corrected)

Inventor name: WALKER, COLIN, ALEXANDER

Inventor name: MCKELVIE, JAMES