EP0006945A1 - Method and apparatus for sensing in-plane deformation of a surface - Google Patents
Method and apparatus for sensing in-plane deformation of a surfaceInfo
- Publication number
- EP0006945A1 EP0006945A1 EP78900262A EP78900262A EP0006945A1 EP 0006945 A1 EP0006945 A1 EP 0006945A1 EP 78900262 A EP78900262 A EP 78900262A EP 78900262 A EP78900262 A EP 78900262A EP 0006945 A1 EP0006945 A1 EP 0006945A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- beams
- combined
- plane
- pattern
- combining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims description 17
- 230000000737 periodic effect Effects 0.000 claims abstract description 22
- 230000001427 coherent effect Effects 0.000 claims abstract description 8
- 230000002452 interceptive effect Effects 0.000 claims abstract description 4
- 230000005855 radiation Effects 0.000 claims description 10
- 230000005670 electromagnetic radiation Effects 0.000 claims description 7
- 238000003491 array Methods 0.000 claims description 4
- KKEBXNMGHUCPEZ-UHFFFAOYSA-N 4-phenyl-1-(2-sulfanylethyl)imidazolidin-2-one Chemical compound N1C(=O)N(CCS)CC1C1=CC=CC=C1 KKEBXNMGHUCPEZ-UHFFFAOYSA-N 0.000 claims description 2
- 230000006835 compression Effects 0.000 abstract 1
- 238000007906 compression Methods 0.000 abstract 1
- 238000005286 illumination Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 11
- 238000004458 analytical method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/165—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by means of a grating deformed by the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/30—Grating as beam-splitter
Definitions
- the relief pattern may be periodic in that direction only.
- measurement of strain in a single direction is not always adequate, and the direction of strain is not always predictable.
- Figure 1 shows schematically apparatus for sensing strain in one dimension
- Each combined beam is in a different direction and contains information related to a strain along one in-plane direction so that calculation of the value of strain in each in- plane direction can be made simply and easily from each inter ⁇ ference pattern with no problem of superimposition of information from different, strain directions. Measurements can be made simultaneously in two or more directions. However, there is still the problem that, for an overall picture, the information on the measured strains must be combined if maximum strain and its direction are required * This may involve considerable mathematical computation.
- Each comparator is supplied with a reference voltage from a unit 57A, B, C.
- phase modulator is arranged to apply a continuous phase.- modulation to the beam 18 in a manner such as to change its wavelength.
- the effect may be achieved using an electro- optic device, or a piezoelectric crystal, driven by a sawtooth waveform; or an acousto-optic device; or a moving diffraction grating; the change in wavelength willvthen be con inual rather than strictly continuous.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB4917077 | 1977-11-25 | ||
| GB4917077 | 1977-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP0006945A1 true EP0006945A1 (en) | 1980-01-23 |
Family
ID=10451426
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP78900262A Withdrawn EP0006945A1 (en) | 1977-11-25 | 1979-06-18 | Method and apparatus for sensing in-plane deformation of a surface |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP0006945A1 (enrdf_load_stackoverflow) |
| JP (1) | JPS54500096A (enrdf_load_stackoverflow) |
| CH (1) | CH626992A5 (enrdf_load_stackoverflow) |
| FR (1) | FR2454602A1 (enrdf_load_stackoverflow) |
| GB (1) | GB2008791B (enrdf_load_stackoverflow) |
| WO (1) | WO1979000320A1 (enrdf_load_stackoverflow) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8005258A (nl) * | 1980-09-22 | 1982-04-16 | Philips Nv | Interferometer. |
| US4474466A (en) * | 1981-03-11 | 1984-10-02 | National Research Development Corporation | Measurement of deformation |
| FR2504256A1 (fr) * | 1981-04-16 | 1982-10-22 | Euromask | Procede et dispositif de mesure optique de deplacement et application aux photorepeteurs sur tranche |
| GB2242518B (en) * | 1990-03-12 | 1994-03-30 | Univ Southampton | Strain gauge |
| NL1011035C2 (nl) * | 1999-01-15 | 2000-07-18 | Kema Nv | Werkwijze en inrichting voor het meten van in-vlak verplaatsingen. |
| CN103278268A (zh) * | 2013-05-31 | 2013-09-04 | 哈尔滨工业大学 | 基于散斑干涉原理的应力测试装置及应力集中测试方法 |
| US9459093B2 (en) * | 2014-02-20 | 2016-10-04 | Kabushiki Kaisha Toshiba | Deflection measuring device and deflection measuring method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2127483A1 (de) * | 1971-06-03 | 1972-12-14 | Leitz Ernst Gmbh | Verfahren zur interferentiellen Messung von Langen, Winkeln, Gangunter schieden oder Geschwindigkeiten |
-
1978
- 1978-11-24 JP JP50008578A patent/JPS54500096A/ja active Pending
- 1978-11-24 GB GB7846064A patent/GB2008791B/en not_active Expired
- 1978-11-24 CH CH707379A patent/CH626992A5/fr not_active IP Right Cessation
- 1978-11-24 WO PCT/GB1978/000043 patent/WO1979000320A1/en unknown
-
1979
- 1979-06-18 EP EP78900262A patent/EP0006945A1/en not_active Withdrawn
-
1980
- 1980-06-10 FR FR8013051A patent/FR2454602A1/fr active Granted
Non-Patent Citations (1)
| Title |
|---|
| See references of WO7900320A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO1979000320A1 (en) | 1979-06-14 |
| JPS54500096A (enrdf_load_stackoverflow) | 1979-12-20 |
| FR2454602B1 (enrdf_load_stackoverflow) | 1983-01-28 |
| FR2454602A1 (fr) | 1980-11-14 |
| CH626992A5 (enrdf_load_stackoverflow) | 1981-12-15 |
| GB2008791A (en) | 1979-06-06 |
| GB2008791B (en) | 1982-04-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| AK | Designated contracting states |
Designated state(s): FR |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
| 110E | Request filed for conversion into a national patent application [according to art. 135 epc] | ||
| 18D | Application deemed to be withdrawn | ||
| RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: WALKER, COLIN, ALEXANDER Inventor name: MCKELVIE, JAMES |