DK98304C - Method and apparatus for depositing semiconductor material by thermal decomposition. - Google Patents

Method and apparatus for depositing semiconductor material by thermal decomposition.

Info

Publication number
DK98304C
DK98304C DK372857A DK372857A DK98304C DK 98304 C DK98304 C DK 98304C DK 372857 A DK372857 A DK 372857A DK 372857 A DK372857 A DK 372857A DK 98304 C DK98304 C DK 98304C
Authority
DK
Denmark
Prior art keywords
semiconductor material
thermal decomposition
depositing semiconductor
depositing
decomposition
Prior art date
Application number
DK372857A
Other languages
Danish (da)
Original Assignee
Plessey Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plessey Co Ltd filed Critical Plessey Co Ltd
Application granted granted Critical
Publication of DK98304C publication Critical patent/DK98304C/en

Links

DK372857A 1956-11-05 1957-11-05 Method and apparatus for depositing semiconductor material by thermal decomposition. DK98304C (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB98304X 1956-11-05

Publications (1)

Publication Number Publication Date
DK98304C true DK98304C (en) 1964-03-23

Family

ID=9879597

Family Applications (1)

Application Number Title Priority Date Filing Date
DK372857A DK98304C (en) 1956-11-05 1957-11-05 Method and apparatus for depositing semiconductor material by thermal decomposition.

Country Status (1)

Country Link
DK (1) DK98304C (en)

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