DK3539165T3 - Piezoelektrisk bøjningsaktuatordrev til anvendelse i fugtige omgivelser - Google Patents

Piezoelektrisk bøjningsaktuatordrev til anvendelse i fugtige omgivelser Download PDF

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Publication number
DK3539165T3
DK3539165T3 DK17803842.8T DK17803842T DK3539165T3 DK 3539165 T3 DK3539165 T3 DK 3539165T3 DK 17803842 T DK17803842 T DK 17803842T DK 3539165 T3 DK3539165 T3 DK 3539165T3
Authority
DK
Denmark
Prior art keywords
actuator drive
bending actuator
humid environments
piezoelectric bending
piezoelectric
Prior art date
Application number
DK17803842.8T
Other languages
English (en)
Inventor
Bernd Broich
Benjamin Dargatz
Kevin Speer
Original Assignee
Pi Ceram Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pi Ceram Gmbh filed Critical Pi Ceram Gmbh
Application granted granted Critical
Publication of DK3539165T3 publication Critical patent/DK3539165T3/da

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
DK17803842.8T 2016-11-10 2017-11-10 Piezoelektrisk bøjningsaktuatordrev til anvendelse i fugtige omgivelser DK3539165T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016121587.2A DE102016121587B4 (de) 2016-11-10 2016-11-10 Piezoelektrischer Antrieb, insbesondere für den Einsatz in feuchter Umgebung
PCT/EP2017/078958 WO2018087333A1 (de) 2016-11-10 2017-11-10 Piezoelektrischer biegeaktorantrieb für einsatz in feuchter umgebung

Publications (1)

Publication Number Publication Date
DK3539165T3 true DK3539165T3 (da) 2021-05-31

Family

ID=60450616

Family Applications (1)

Application Number Title Priority Date Filing Date
DK17803842.8T DK3539165T3 (da) 2016-11-10 2017-11-10 Piezoelektrisk bøjningsaktuatordrev til anvendelse i fugtige omgivelser

Country Status (6)

Country Link
US (1) US20200185589A1 (da)
EP (1) EP3539165B1 (da)
CN (1) CN109964325B (da)
DE (1) DE102016121587B4 (da)
DK (1) DK3539165T3 (da)
WO (1) WO2018087333A1 (da)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111352203B (zh) * 2018-12-20 2024-04-05 新思考电机有限公司 压电式及光学部件驱动装置、照相装置以及电子设备
EP3754733A1 (en) * 2019-06-19 2020-12-23 Albert-Ludwigs-Universität Freiburg Piezoelectric actuator and microfluidic device
CN112343349B (zh) * 2020-11-12 2022-01-28 重庆交通大学 压电导管、预应力筋先张折弯装置及预应力筋先张折弯施工方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3963380A (en) 1975-01-06 1976-06-15 Thomas Jr Lyell J Micro pump powered by piezoelectric disk benders
DE2848812A1 (de) * 1978-11-10 1980-05-22 Daimler Benz Ag Stellglied aus piezoelektrischen elementen
JPS60104762A (ja) 1983-11-10 1985-06-10 Nippon Soken Inc 電歪式アクチュエータ及びそれを用いた燃料噴射弁
US4731076A (en) 1986-12-22 1988-03-15 Baylor College Of Medicine Piezoelectric fluid pumping system for use in the human body
US5205819A (en) 1989-05-11 1993-04-27 Bespak Plc Pump apparatus for biomedical use
US6071087A (en) * 1996-04-03 2000-06-06 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Ferroelectric pump
US6074178A (en) 1997-04-15 2000-06-13 Face International Corp. Piezoelectrically actuated peristaltic pump
EP1029374B1 (en) 1997-11-12 2004-02-25 Deka Products Limited Partnership Piezo-electric actuator operable in an electrolytic fluid
JP2002518620A (ja) 1998-06-08 2002-06-25 オーシャニアリング インターナショナル インコーポレイテッド 圧電電気‐運動装置
ATE284490T1 (de) 2000-05-25 2004-12-15 Festo Ag & Co Ventileinrichtung
FR2828245B1 (fr) * 2001-04-27 2005-11-11 Poudres & Explosifs Ste Nale Microactionneurs pyrotechniques pour microsystemes
US7146067B2 (en) 2001-07-05 2006-12-05 International Business Machines Corporation Microsystem switches
US7259499B2 (en) 2004-12-23 2007-08-21 Askew Andy R Piezoelectric bimorph actuator and method of manufacturing thereof
DE102005043622A1 (de) * 2005-09-13 2007-03-22 Siemens Ag Piezoelektrische Aktoreinheit bzw. piezoelektrische Antriebsvorrichtung
GB2470399B (en) * 2009-05-21 2013-11-27 Ge Infrastructure Sensing Inc A sensor arranged to measure more than one characteristic of a fluid
JP2012106342A (ja) * 2010-11-15 2012-06-07 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置
JP5224617B2 (ja) * 2011-03-30 2013-07-03 富士フイルム株式会社 圧電アクチュエータ、可変容量コンデンサ及び光偏向素子
US8841820B2 (en) * 2011-07-21 2014-09-23 Lockheed Martin Corporation Synthetic jet apparatus
US8712606B2 (en) * 2012-04-27 2014-04-29 The Boeing Company System and method for configuring a direct lift control system of a vehicle
FR2990320B1 (fr) 2012-05-07 2014-06-06 Commissariat Energie Atomique Haut-parleur digital a performance amelioree
DE102014217798A1 (de) 2014-09-05 2016-03-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische piezoelektrische Aktuatoren zur Realisierung hoher Kräfte und Auslenkungen
US10099253B2 (en) * 2014-12-10 2018-10-16 uBeam Inc. Transducer with mesa

Also Published As

Publication number Publication date
US20200185589A1 (en) 2020-06-11
CN109964325B (zh) 2023-12-15
EP3539165A1 (de) 2019-09-18
CN109964325A (zh) 2019-07-02
EP3539165B1 (de) 2021-03-10
WO2018087333A1 (de) 2018-05-17
DE102016121587B4 (de) 2023-06-01
DE102016121587A1 (de) 2018-05-17

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