DK2859315T3 - Optical MEMS sensor - Google Patents

Optical MEMS sensor Download PDF

Info

Publication number
DK2859315T3
DK2859315T3 DK13732847.2T DK13732847T DK2859315T3 DK 2859315 T3 DK2859315 T3 DK 2859315T3 DK 13732847 T DK13732847 T DK 13732847T DK 2859315 T3 DK2859315 T3 DK 2859315T3
Authority
DK
Denmark
Prior art keywords
mems sensor
optical mems
optical
sensor
mems
Prior art date
Application number
DK13732847.2T
Other languages
Danish (da)
Inventor
Kasper Reck
Christian Østergaard
Ole Hansen
Erik Vilain Thomsen
Original Assignee
Univ Denmark Tech Dtu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Denmark Tech Dtu filed Critical Univ Denmark Tech Dtu
Priority claimed from PCT/EP2013/061701 external-priority patent/WO2013182643A1/en
Application granted granted Critical
Publication of DK2859315T3 publication Critical patent/DK2859315T3/en

Links

DK13732847.2T 2012-06-06 2013-06-06 Optical MEMS sensor DK2859315T3 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261656051P 2012-06-06 2012-06-06
EP12171002 2012-06-06
PCT/EP2013/061701 WO2013182643A1 (en) 2012-06-06 2013-06-06 Mems optical sensor

Publications (1)

Publication Number Publication Date
DK2859315T3 true DK2859315T3 (en) 2021-10-25

Family

ID=78230866

Family Applications (1)

Application Number Title Priority Date Filing Date
DK13732847.2T DK2859315T3 (en) 2012-06-06 2013-06-06 Optical MEMS sensor

Country Status (1)

Country Link
DK (1) DK2859315T3 (en)

Similar Documents

Publication Publication Date Title
GB2500255B (en) Optical sensor
DE102013212915A8 (en) inertial sensor
DK2867626T3 (en) FIBER OPTICAL DETECTION
DK3336866T3 (en) Optoelectronic device
EP2905817A4 (en) Light sensor
DK4056105T3 (en) Analyte sensor devices
EP2936117A4 (en) Optical blood-coagulation sensor
DK2650413T3 (en) HYDROGELING FIBER MATERIALS
GB2503466B (en) Optical sensor
DK2821824T3 (en) OPTICAL MULTICERN FIBER
DK2894498T3 (en) OPTICAL FIBER
CO7020919A2 (en) Tetrahydroquinazolinone derivatives
EP2894677A4 (en) Optical sensor unit
BR112013033747A2 (en) sensors
EP2940496A4 (en) Optical element
EP2829951A4 (en) Optical sensor
DK2936102T3 (en) PRESSURE SENSOR
BR112014022506A2 (en) cbh1a variants
EP2813806A4 (en) Optical sensor
DK2856108T3 (en) OPTICAL SPECTROMETER
FR2990774B1 (en) OPHTHALMIC LENS
DK2831963T3 (en) FIBER LASER
GB201301186D0 (en) Optical element
DK2901197T3 (en) OPTICAL SIGHTING DEVICE
EP2829958A4 (en) Optical sensor