DK2856258T3 - Fremgangsmåde til fremstilling af en nanostruktureret artikel under anvendelse af nanotrykningslitografi, nanostruktureret artikel og anvendelse deraf - Google Patents
Fremgangsmåde til fremstilling af en nanostruktureret artikel under anvendelse af nanotrykningslitografi, nanostruktureret artikel og anvendelse deraf Download PDFInfo
- Publication number
- DK2856258T3 DK2856258T3 DK13726428.9T DK13726428T DK2856258T3 DK 2856258 T3 DK2856258 T3 DK 2856258T3 DK 13726428 T DK13726428 T DK 13726428T DK 2856258 T3 DK2856258 T3 DK 2856258T3
- Authority
- DK
- Denmark
- Prior art keywords
- nanostructured article
- producing
- application
- nanostructured
- article
- Prior art date
Links
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24612—Composite web or sheet
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261651745P | 2012-05-25 | 2012-05-25 | |
PCT/EP2013/001537 WO2013174522A1 (en) | 2012-05-25 | 2013-05-24 | Composition suitable for use as a release-optimized material for nanoimprint processes and uses thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
DK2856258T3 true DK2856258T3 (da) | 2021-04-06 |
Family
ID=48570056
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK13726428.9T DK2856258T3 (da) | 2012-05-25 | 2013-05-24 | Fremgangsmåde til fremstilling af en nanostruktureret artikel under anvendelse af nanotrykningslitografi, nanostruktureret artikel og anvendelse deraf |
Country Status (4)
Country | Link |
---|---|
US (1) | US10126648B2 (da) |
EP (1) | EP2856258B1 (da) |
DK (1) | DK2856258T3 (da) |
WO (1) | WO2013174522A1 (da) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9575226B2 (en) * | 2014-09-22 | 2017-02-21 | The Chinese University Of Hong Kong | Positive microcontact printing |
AT516558B1 (de) | 2014-12-10 | 2018-02-15 | Joanneum Res Forschungsgmbh | Prägelack, Verfahren zum Prägen sowie mit dem Prägelack beschichtete Substratoberfläche |
EP3347410B1 (en) * | 2015-09-08 | 2024-06-19 | Canon Kabushiki Kaisha | Substrate pretreatment and etch uniformity in nanoimprint lithography |
KR20170038988A (ko) | 2015-09-30 | 2017-04-10 | 삼성디스플레이 주식회사 | 실란 커플링제 및 이를 이용한 와이어 그리드 패턴의 제조 방법 |
FR3075800B1 (fr) * | 2017-12-21 | 2020-10-09 | Arkema France | Couches anti adhesives pour les procedes d'impression par transfert |
DE102019107090A1 (de) * | 2019-03-20 | 2020-09-24 | Joanneum Research Forschungsgesellschaft Mbh | Mikrostruktur mit thermoplastischer Prägelackschicht und Herstellungsverfahren |
US11884977B2 (en) | 2021-03-12 | 2024-01-30 | Singular Genomics Systems, Inc. | Nanoarrays and methods of use thereof |
EP4263868A1 (en) | 2021-03-12 | 2023-10-25 | Singular Genomics Systems, Inc. | Nanoarrays and methods of use thereof |
EP4294920A1 (en) | 2021-04-27 | 2023-12-27 | Singular Genomics Systems, Inc. | High density sequencing and multiplexed priming |
WO2023034920A2 (en) | 2021-09-03 | 2023-03-09 | Singular Genomics Systems, Inc. | Amplification oligonucleotides |
US11795505B2 (en) | 2022-03-10 | 2023-10-24 | Singular Genomics Systems, Inc. | Nucleic acid delivery scaffolds |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3242318A1 (en) * | 2003-12-19 | 2017-11-08 | The University of North Carolina at Chapel Hill | Monodisperse micro-structure or nano-structure product |
US20080055581A1 (en) * | 2004-04-27 | 2008-03-06 | Rogers John A | Devices and methods for pattern generation by ink lithography |
US20080000373A1 (en) * | 2006-06-30 | 2008-01-03 | Maria Petrucci-Samija | Printing form precursor and process for preparing a stamp from the precursor |
US7955516B2 (en) * | 2006-11-02 | 2011-06-07 | Applied Materials, Inc. | Etching of nano-imprint templates using an etch reactor |
US8128393B2 (en) * | 2006-12-04 | 2012-03-06 | Liquidia Technologies, Inc. | Methods and materials for fabricating laminate nanomolds and nanoparticles therefrom |
US7604836B2 (en) * | 2006-12-13 | 2009-10-20 | Hitachi Global Storage Technologies Netherlands B.V. | Release layer and resist material for master tool and stamper tool |
US20080315459A1 (en) * | 2007-06-21 | 2008-12-25 | 3M Innovative Properties Company | Articles and methods for replication of microstructures and nanofeatures |
EP2199855B1 (en) * | 2008-12-19 | 2016-07-20 | Obducat | Methods and processes for modifying polymer material surface interactions |
EP2221664A1 (en) | 2009-02-19 | 2010-08-25 | Solvay Solexis S.p.A. | Nanolithography process |
WO2010128969A1 (en) * | 2009-05-08 | 2010-11-11 | Hewlett-Packard Development Company, L.P. | Functionalized perfluoropolyether material as a hydrophobic coating |
CN101923282B (zh) | 2009-06-09 | 2012-01-25 | 清华大学 | 纳米压印抗蚀剂及采用该纳米压印抗蚀剂的纳米压印方法 |
-
2013
- 2013-05-24 WO PCT/EP2013/001537 patent/WO2013174522A1/en active Application Filing
- 2013-05-24 EP EP13726428.9A patent/EP2856258B1/en active Active
- 2013-05-24 US US14/401,466 patent/US10126648B2/en active Active
- 2013-05-24 DK DK13726428.9T patent/DK2856258T3/da active
Also Published As
Publication number | Publication date |
---|---|
EP2856258B1 (en) | 2021-01-06 |
US20150079351A1 (en) | 2015-03-19 |
EP2856258A1 (en) | 2015-04-08 |
WO2013174522A1 (en) | 2013-11-28 |
US10126648B2 (en) | 2018-11-13 |
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