DK2606490T3 - X-ray irradiation of the target volume - Google Patents
X-ray irradiation of the target volume Download PDFInfo
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- DK2606490T3 DK2606490T3 DK11817864.9T DK11817864T DK2606490T3 DK 2606490 T3 DK2606490 T3 DK 2606490T3 DK 11817864 T DK11817864 T DK 11817864T DK 2606490 T3 DK2606490 T3 DK 2606490T3
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
- G21K1/04—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers
- G21K1/046—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers varying the contour of the field, e.g. multileaf collimators
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
- A61N2005/1085—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy characterised by the type of particles applied to the patient
- A61N2005/1091—Kilovoltage or orthovoltage range photons
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
- A61N2005/1092—Details
- A61N2005/1095—Elements inserted into the radiation path within the system, e.g. filters or wedges
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
- A61N5/1042—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy with spatial modulation of the radiation beam within the treatment head
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
- A61N5/1077—Beam delivery systems
- A61N5/1084—Beam delivery systems for delivering multiple intersecting beams at the same time, e.g. gamma knives
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/062—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements the element being a crystal
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/064—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements having a curved surface
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/067—Construction details
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
- G21K5/04—Irradiation devices with beam-forming means
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation-Therapy Devices (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Life Sciences & Earth Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
Description
DESCRIPTION
TECHNICAL FIELD
[0001] The present invention relates to an X-ray focusing system, and, more specifically, to an X-ray focusing system configured for therapeutic and surgical use.
BACKGROUND
[0002] Translation of X-rays from divergent sources into parallel beams and converging rays is subject to well-known limitations related to Bragg diffraction theory. Focusing optics for X-rays have been based on Johann or Johansson methods applied to curved single crystals. More recently, it has been shown that X-ray diffractors with doubly curved crystals can provide relatively greater throughput. The diffractor may be formed with a few pseudo-spherical curved dispersive elements. Even with these advances, formation of lens systems for X-ray optics has been limited by the size of practical crystal surfaces and the extent to which such surfaces can be configured to a desired curvature.
[0003] Presently, medical applications such as radiotherapy and radiosurgery use collimated X-rays for the destruction of malignant tissue. Radiotherapy is one of the major methods, sometimes the only method, in treating some types of cancer such as brain tumors. Linear accelerator systems generating X-rays have been widely used in radiotherapy in the destruction of such malignancies. Linear accelerator systems employed in radiotherapy, generally, use a multi-leaf collimator to create a shaped beam of X-rays. The shaped X-ray beam intensity has a flux density distribution which is identical along the beam path. The energy range of X-rays generated by such a system usually reaches MeV values to reduce surface or skin damage. To destroy a tumor, the linear accelerator system must be continually directed at, and rotated about the targeted malignant tissue. The high energy (MeV) of linear accelerator systems and their collimated rays expose a large amount of healthy tissue surrounding a tumor to a potentially damaging concentration of X-rays in the MeV range. Focused low-energy X-ray beam provides a high brightness focal spot which is used to treat a target in an accurate controlled fashion, as well as treat the target at an early stage. Lower energy X-rays have quicker fall-off behind the target and therefore reduce tissue damage to some sensitive organs which may be exposed to X-rays.
[0004] A system utilizing the X-ray focusing properties can achieve the same results with reduced damage to collateral tissue with an energy use in the 40 -160 keV range. The advantages of using this focusing system include: reduced exposure and damage of healthy body tissue to X-rays, the X-rays in the 40 to 160 keV range can be focused directly at a malignancy with decreasing radiation intensity surrounding the X-ray focal point/treatment volume, eliminating damage to sensitive organs proximate the target.
[0005] US Patent 6389100 discloses a modular X-ray lens system for use in directing X-rays comprising a radiation source which generates X-rays and a lens system which forms the X-ray beam. The X-ray lens system is configured to focus X-rays to a focal point and vary the intensity of said focal point.
[0006] Eichert D. et al., have made a study entitled "Imaging with spectroscopic micro-analysis using synchrotron radiation" (Anal. Bioanal. Chem., 2007, 389, 1121-1132).
[0007] US patent application published US 2003/0012336 A1 relates to the focusing of X-ray radiation.
SUMMARY
[0008] The present invention relates to an X.ray system in accordance with appended claims 1-9.
BRIEF DESCRIPTION OF THE DRAWINGS
[0009] In order to understand the invention and to see how it may be implemented in practice, a plurality of embodiments is adapted to now be described, by way of non-limiting example only, with reference to the accompanying drawings, in which
Fig. 1 is a schematic partial longitudinal cross sectional view of a crystal element (with schematic reflection planes) of an X-ray lens;
Fig. 2 is a two-dimensional diagram of the Johansson scheme;
Fig. 3 is a three-dimensional diagram of the Johansson scheme;
Fig. 4 is a schematic diagram of the X-ray focusing system provided with the substantially polychromatic X-ray source;
Fig. 5 is a schematic diagram of the X-ray focusing system provided with coaxially arranged lenses having the single focal spot;
Fig. 6 is a schematic diagram of the X-ray focusing system provided with coaxially arranged lenses having the spaced-apart focal spots;
Fig. 7 is a schematic diagram of the X-ray focusing system provided with angularly displaced lens segments;
Fig. 8 is a lateral cross sectional view of the concentrically configured X-ray focusing system with schematic reflection planes;
Fig. 9 is a three-dimensional schematic diagram of the X-ray tiled focusing system provided with slight angular diverging lens tiles arranged in an overall converging geometry establishing partial divergence within convergence; each small tile is machined as shown in Fig. 10;
Fig. 10 is a schematic diagram of a single crystal tile of the tiled focusing system machined in a negative radius to allow for the slight divergence as a partial sub beam;
Fig. 11 is a schematic view of the X-ray focusing system provided with a lens wheel; and
Fig. 12 is a schematic diagram of the exemplary lens system.
DETAILED DESCRIPTION OF THE INVENTION
[0010] The following description is provided, alongside all chapters of the present invention, so as to enable any person skilled in the art to make use of the aforesaid invention, and sets forth the best modes contemplated by the inventor of carrying out this invention. Various modifications, however, are adapted to remain apparent to those skilled in the art, since the generic principles of the present invention have been defined specifically to provide an X-ray system arranged for providing X-ray exposure to a target volume and a method of using the same.
[0011] Referring to the medical use of the X-ray system for tumor ablation, the known therapeutic devices comprising focusing elements are characterized by strong concentration of X-ray radiation in a sharp focal spot. It should be emphasized that uniform X-ray exposure of a target volume is a necessary condition of successful therapy or surgery because the optimal effect is achieved when all target tissue is exposed to a uniform dose. Thus, there is a long-felt and unmet need to provide a therapeutic device for X-ray ablation of tumors adapted for forming substantially uniform X-ray intensity within the target volume.
[0012] Reference is now made to Fig. 1, illustrating a simple Bragg reflector utilizing the principles of Bragg reflection. X-ray radiation 4 of wavelength A is incident on a crystal having lattice planes 2 of plane spacing d. Narrow band or generally monochromatic radiation 6 is then reflected according to Bragg's Law. Bragg structures only reflect radiation when Bragg's equation is satisfied: rd = 2i/sin#5, (1) where n is the reflection order, A is the incident radiation wavelength, d is the lattice plane spacing, and θβ is the Bragg angle.
[0013] Reference is now made to Fig. 2, presenting a 2D longitudinal cut of the Johansson scheme. A Johansson bent and machined crystal 10 is used to reflect and focus X-rays. The Johansson bent and machined crystal 10 reflects X-rays according to Bragg's law. The
Johansson crystal 10 is made by bending a crystal into a barrel shaped surface with a longitudinal bending radius 2R, and then the reflection surface 14 is machined to a cylindrical surface with a longitudinal bending radius R. The angles of incidence of rays 15 generated by the X-ray source S and angles of reflection of rays 17 converging into the point F, are equal.
[0014] The transversal curvature radius of the machined surface at midpoint between the source and the focal point rs is given by:
(2) where L is a half of the distance from the radiation source to the focal point.
[0015] The Rowland radius R is given by the following expression:
(3) [0016] Reference is now made to Fig. 3, showing a 3D presentation of operation of the Johansson small bent crystal tile 10. As seen in Fig. 4, the crystal is bent in two directions. Specifically, an angle a lies in the saggital plane, while an angle β lies in the meridional plane.
[0017] The term "waist" hereinafter refers to a contour in a transversal cross section of the X-ray beam wherein beam intensity within the aforesaid contour does not fall below 50 % of the peak intensity.
[0018] The term "uniform exposure" hereinafter refers to exposure transversal distribution of the X-ray beam within the waist which does not fall below 50 % of the peak exposure.
[0019] The term "extendable aperture" hereinafter refers to an aperture placed in proximity of the X-ray source whose dimension may be varied between 0 and the X-ray emission spot of the X-ray tube.
[0020] The term "substantially polychromatic source" hereinafter refers to an X-ray tube of any anode material with any intensity distribution of emitted photon energies.
[0021] Reference is now made to Fig. 4, presenting an exemplary longitudinal half cross section of a system for X-ray exposure of the target volume. For simplicity, some elements disposed below the symmetry axis 30 are not shown. The system comprises an X-ray source constituting in an unlimited manner an X-ray tube with a tungsten anode and an X-ray reflecting lens. In accordance with Johansson geometry, X-rays 60, 62 and 64 outward from a center of an output aperture 40 of the X-ray source are reflected by a ring-like lens 10 into rays 70, 72 and 74, which are focused at a center of a focal plane 50. For example, the X-ray source emits substantially polychromatic radiation characterized by continuous energy spectrum with three peaks between 59 and 63 keV. An X-ray tube with a tungsten anode emitting spectral lines Ka-\, Ka2 and Κβ, is in the scope of the current invention. The lens 10 is
configured to select the more intensive peak with energy 59.3 keV with a bandpass of approximately 3 keV. Rays 76 and 78 illustrate the influence of crystal mosaicity of the lens 10. The lens elements 10 are made sufficiently thick to stop most of the incident rays. In diffraction at inner crystalline planes, X-ray radiation of slightly different wavelengths is involved. The aforesaid phenomena result in broadening of the focal spot formed by the central ray 72.
[0022] Reference is now made to Fig. 5, presenting an exemplary longitudinal half cross section of a coaxially configured ring-like lens 10a, 10b and 10c having a common focal plane 50. The coaxial configuration allows for more portion of emitted X-ray radiation to be used for exposure of the target volume in the plane 50. As seen in Fig. 5, the lenses 10a and 10b belong to different Rowland circles 20a and 20b. Optionally, a lens 10c can be asymmetrically disposed on the Rowland circle 20b at different distances to the source 40 and the focal plane 50 and the rays 60c and 70c, respectively.
[0023] Reference is now made to Fig. 6, presenting an exemplary half cross section of coaxially configured ring-like lenses 10a and 10d, belonging to the different Rowland circles 20a and 20d, having longitudinally spaced-apart focal planes 50 and 50d, respectively. The aforesaid lenses 10a and 10d can be asymmetrically disposed similarly to lens 10c in Fig. 5. Longitudinal spacing of the focal planes 50 and 50d allows the exposure level over the target volume to be equalized.
[0024] Reference is now made to Fig. 7, showing at least one or more lenses arranged one inside each other 10a and at least two lens segments 10e and 10f belonging to different Rowland circles 20e and 20f having individual symmetry axes 30e and 30f, which are angularly displaced relative to the main lens axis 30. As seen in Fig. 7, the focal spots 50e and 50f created by the lens segments 10e and 10f, respectively, are laterally displaced relative to the main axis 30. The proposed technical solution provides improved lateral uniformity in the X-ray exposure of the target volume. The aforesaid lenses 10a. 10e and 10f can be asymmetrically disposed similarly to lens 10c in Fig. 5.
[0025] Reference is now made to Fig. 8, presenting a lateral cross section of the concentrically configured lens system, which comprises ring-like lenses 101, 102, 103, and 104. The X-ray radiation propagating within the ring-like lens 101 is screened by the beam stop 80.
[0026] Reference is now made to Fig. 9, presenting the ring-like lens 10. An internal reflecting surface is configured into a tiled structure 14a. At least one cell of the structure consists of a small crystal tile 14a exhibiting a convex surface of a predetermined negative radius. The incident X-rays 15 diffract into a converging total X-ray beam 17, consisting of a collection of slightly diverging sub X-ray beams 17a emerging from each tile. The beam 17a is an exemplary divergent beam diffracted on a single tile. The entire collection of slightly divergent beams from all tiles lies on an overall converging cone to a focal location with a finite waist 50.
[0027] Reference is now made to Figs 10, presenting meridional sections of the focusing lens 10 depicted in Fig. 9. Fig. 10 presents a profile of a single tile 10a. The operating surface 14a has curvature of the negative radius - R-\.
[0028] Reference is now made to Fig. 11, presenting an X-ray focusing system comprising an X-ray source with an output aperture 40 and a lens wheel 130. The aforesaid wheel 130 is rotatable around an axis 150. The wheel 130 is provided with a plurality of X-ray lenses 140. The aforesaid lenses 140 are characterized by different focal distances, and longitudinal and lateral dimensions of the focal area 50. A particular lens 140 is selected according to the characteristics of the tumor 160 to be treated. The depth and dimensions of the treatment area can be selected. The lenses 140 are changeable by means of rotation of said wheel 130. An area 145 screens the target volume 160 from the X-ray source 40 in the pauses between treatment sessions.
[0029] Reference is now made to Fig. 12, presenting a schematic diagram of an exemplary lens system comprising a number of reflecting X-ray lenses. Ring radii rs and Bragg angles θβ are shown in Table 1 along with crystal plane distances d and Rowland radii R.
[0030] The formulae used in the calculations presented in Table 1 are Equations (2) and (3) above.
Table 1
Considering mosaicity for the copper single crystal, a beam waist is generated at the focal plane given bv
(4).
For a realistic mosaicity of approximately 0.5°, the waist dimension w = 2.5 mm is calculated for all rings.
REFERENCES CITED IN THE DESCRIPTION
This list of references cited by the applicant is for the reader's convenience only. It does not form part of the European patent document. Even though great care has been taken in compiling the references, errors or omissions cannot be excluded and the EPO disclaims all liability in this regard.
Patent documents cited in the description • US6389100B [0005] • US20030012336A1 [00071
Non-patent literature cited in the description • EICHERT D. et al.Imaging with spectroscopic micro-analysis using synchrotron radiationAnal. Bioanal. Chem., 2007, vol. 389, 1121-1132 [00081
Claims (9)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US37505610P | 2010-08-19 | 2010-08-19 | |
PCT/IL2011/000675 WO2012023141A1 (en) | 2010-08-19 | 2011-08-18 | System for x-ray irradiation of target volume |
Publications (1)
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DK2606490T3 true DK2606490T3 (en) | 2018-10-15 |
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DK11817864.9T DK2606490T3 (en) | 2010-08-19 | 2011-08-18 | X-ray irradiation of the target volume |
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US (1) | US9008271B2 (en) |
EP (1) | EP2606490B1 (en) |
DK (1) | DK2606490T3 (en) |
ES (1) | ES2688542T3 (en) |
IL (1) | IL224725A (en) |
WO (1) | WO2012023141A1 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
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EP2814573B1 (en) | 2012-02-13 | 2018-03-21 | Convergent R.N.R Ltd | Imaging-guided delivery of x-ray radiation |
WO2014045273A1 (en) * | 2012-09-24 | 2014-03-27 | Convergent R.N.R Ltd | X-ray reflective lens arrangement |
WO2015087319A1 (en) * | 2013-12-10 | 2015-06-18 | Convergent R.N.R Ltd | A standard of care protocol for reducing long and short-term adverse effects caused by radiotherapy or radiosurgery treatment |
US12109439B2 (en) | 2013-12-10 | 2024-10-08 | Convergent R.N.R Ltd. | Method of estimating dosimetric characteristics X-ray convergent irradiator to object to be irradiated |
DK3180085T3 (en) * | 2014-08-13 | 2020-10-26 | Convergent R N R Ltd | MEANS AND METHODS FOR TARGETED X-RAY X-THERAPY |
US9711252B1 (en) | 2014-10-28 | 2017-07-18 | Michelle Corning | High energy beam diffraction material treatment system |
US9938026B1 (en) | 2014-10-28 | 2018-04-10 | Michelle Corning | Energy beam propulsion system |
US10629318B1 (en) | 2014-10-28 | 2020-04-21 | Michelle Corning | Neutron beam diffraction material treatment system |
US11250968B2 (en) * | 2014-12-30 | 2022-02-15 | Convergent R.N.R. Ltd. | Constructions of x-ray lenses for converging x-rays |
WO2016108235A1 (en) * | 2014-12-30 | 2016-07-07 | Convergent R.N.R Ltd | New constructions of x-ray lenses for converging x-rays |
JP6069609B2 (en) * | 2015-03-26 | 2017-02-01 | 株式会社リガク | Double-curved X-ray condensing element and its constituent, double-curved X-ray spectroscopic element and method for producing the constituent |
US11972875B2 (en) | 2019-09-24 | 2024-04-30 | Convergent R.N.R. Ltd | X-ray optical arrangement |
IL296869A (en) | 2020-03-31 | 2022-11-01 | Empyrean Medical Systems Inc | Coupled ring anode with scanning electron beam bremsstrahlung photon flux intensifier apparatus |
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US2688094A (en) * | 1952-05-09 | 1954-08-31 | California Inst Res Found | Point-focusing X-ray monochromator for low angle x-ray diffraction |
US4625323A (en) * | 1983-09-19 | 1986-11-25 | Yoshiharu Okaya | Equipment for spectral radiology |
US5004319A (en) * | 1988-12-29 | 1991-04-02 | The United States Of America As Represented By The Department Of Energy | Crystal diffraction lens with variable focal length |
US5332908A (en) * | 1992-03-31 | 1994-07-26 | Siemens Medical Laboratories, Inc. | Method for dynamic beam profile generation |
US6389100B1 (en) | 1999-04-09 | 2002-05-14 | Osmic, Inc. | X-ray lens system |
US6624431B1 (en) | 1999-07-21 | 2003-09-23 | Jmar Research, Inc. | High collection angle short wavelength radiation collimator and focusing optic |
US6421417B1 (en) * | 1999-08-02 | 2002-07-16 | Osmic, Inc. | Multilayer optics with adjustable working wavelength |
US6625250B2 (en) * | 1999-12-20 | 2003-09-23 | Agere Systems Inc. | Optical structures and methods for x-ray applications |
US20030012336A1 (en) * | 2001-06-20 | 2003-01-16 | Cash Webster C. | X-ray concentrator for therapy |
DE602004003347T2 (en) * | 2003-02-28 | 2007-06-21 | Osmic, Inc., Auburn Hills | OPTICAL X-RAY EFFICIENCY WITH ADJUSTABLE CONVERGENCE |
DE102005028904B4 (en) * | 2005-06-22 | 2008-06-26 | Siemens Ag | X-ray generator for an X-ray machine with X-ray lens module |
NL2003678A (en) * | 2008-12-17 | 2010-06-21 | Asml Holding Nv | Euv mask inspection system. |
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2011
- 2011-08-18 EP EP11817864.9A patent/EP2606490B1/en active Active
- 2011-08-18 US US13/817,562 patent/US9008271B2/en active Active
- 2011-08-18 DK DK11817864.9T patent/DK2606490T3/en active
- 2011-08-18 ES ES11817864.9T patent/ES2688542T3/en active Active
- 2011-08-18 WO PCT/IL2011/000675 patent/WO2012023141A1/en active Application Filing
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ES2688542T3 (en) | 2018-11-05 |
US9008271B2 (en) | 2015-04-14 |
EP2606490B1 (en) | 2018-06-27 |
IL224725A (en) | 2016-11-30 |
US20130170625A1 (en) | 2013-07-04 |
WO2012023141A1 (en) | 2012-02-23 |
EP2606490A4 (en) | 2017-01-25 |
EP2606490A1 (en) | 2013-06-26 |
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