DK178446B1

DK178446B1 - Process for producing a temperature sensor

Info

Publication number: DK178446B1
Application number: DK200601366A
Authority: DK
Inventors: Karlheinz Wienand; Gernot Hacker
Original assignee: Heraeus Sensor Technology Gmbh
Priority date: 2005-10-24
Filing date: 2006-10-23
Publication date: 2016-02-29
Also published as: AT502636B1; AT502636A3; AT502636A2; DK200601366A

Abstract

Fremgangsmåden omfatter strukturering af en platin-tyndfilm på en keramisk plade i mindst én strømbane, som er tilspidset i forhold til sine ender; strukturering af en metalbelægning på for- og bagsiden af en plaststrimmel i strømbaner til tilslutning ved en ende af strimlen til et kabel og ved den anden ende til en elektronisk komponent, som har mindst én struktureret platin-tyndfilm på en keramisk plade; hvor me talbelægningen på for- og bagsiden ved kabelsideenden struktureres til strømbaner, som tilspidses i forhold til deres ende ved enden af plast strimlen på kabelsiden, og hvor en metalbelægning eller en strømbane i området ved enden på kornponenten med henblik på kontaktering af komponenten deles i to fra hinanden isolerede felter eller delbaner, og strømbanen på bagsiden forbindes med det tilbageblevne korte felt eller den tilbageblevne delbane; hvor komponenten anbringes over de delte felter eller delbaner efter struktureringen af metalbelægningerne på plaststrimlen; hvor hver kontakt af komponenten forbindes med hver sit felt eller hver sin delbane; hvorefter der ved den i forhold til komponen ten modsatte ende af plaststrimlen tilsluttes et tilslutningskabel ved hver ende af strømbanen på for- og bagsiden.The method comprises structuring a platinum thin film on a ceramic plate in at least one flow path which is tapered relative to its ends; structuring a metal coating on the front and back of a plastic strip in power strips for connection at one end of the strip to a cable and at the other end to an electronic component having at least one structured platinum thin film on a ceramic plate; wherein the metal coating on the front and back at the cable side end is structured into current paths which are tapered relative to their end at the end of the plastic strip on the cable side, and wherein a metal coating or current path in the region at the end of the grain component for contacting the component is divided into two isolated fields or sub-lanes, and the power path at the rear is connected to the remaining short field or the sub-lane remaining; wherein the component is placed over the divided fields or sub-lanes after the structure of the metal coatings on the plastic strip; wherein each contact of the component is connected to each field or sub-field; after which, at the opposite end of the component of the plastic strip, a connecting cable is connected at each end of the current path on the front and back.

Description

Den foreliggende opfindelse angår sensorer med en enkelt strømkreds med en platin-præcisionsmodstand på en keramisk bærer og dennes kontaktering på for- og bagsiden af et substrat med elektrisk isolerende overflade med et tilslutningskabel via en lederbane på substratets for- og bagside.The present invention relates to single-circuit sensors having a platinum precision resistance on a ceramic support and its contact on the front and back of a substrate with electrically insulating surface with a connecting cable via a conductor path on the front and back of the substrate.

DE 39 39 165 C1 viser en temperatursensor, hvor en plastfolie på for- og bagsiden forbindes med et tilslutningskabel, og en komponent placeres på en side af folien og forbindes med tilslutningskablet via en lederbane på for- og bagsiden. Kabelkontakteringen er dog hæmmende for en automatisk fremstilling.DE 39 39 165 C1 shows a temperature sensor in which a plastic foil on the front and back is connected to a connecting cable and a component is placed on one side of the foil and connected to the connection cable via a conductor path on the front and back. However, the cable contact is hampering an automatic manufacture.

G 87 16 103 beskriver en præcisionsmodstands kontaktering på begge sider via en lederplatins lederbaner, hvor der sker en kontaktering via en gennemgående kontaktering til en lederbane på lederplati-nens bagside. Denne indretning kan forbedres med hensyn til en varig, sikker og præcis temperaturmåling samt reproducerbarheden og en robust opbygning.G 87 16 103 describes contacting of a precision resistor on both sides via a conductor plate conductor path, where contacting is made via a through contact to a conductor path on the back of the conductor plate. This device can be improved with regard to a durable, safe and accurate temperature measurement as well as reproducibility and a robust structure.

G 295 04 105 viser en tilslutningsplatin med mæanderformet forløbende strømbane mellem et tilslutningskabel og en funktionel komponent. Der er ingen kontaktering på bagsiden.G 295 04 105 shows a connection plate with mean-shaped running path between a connection cable and a functional component. There is no contact on the back.

DE 31 27 727 angår en indretning til måling af temperaturen, hvor der er placeret modstande på for- og bagsiden af en substratplade, hvilke hver især kontakteres elektrisk på de tilsvarende sider. Der er ikke tilvejebragt nogen yderligere lederplade.DE 31 27 727 relates to a device for measuring the temperature where resistors are located on the front and back of a substrate plate, each of which is electrically contacted on the corresponding sides. No additional conductor plate is provided.

EP 0 809 094 beskriver en fremgangsmåde til fremstilling af en sensorindretning til temperaturmåling med en temperaturfølsom præcisionsmodstand, som på et keramiksubstrat har en tynd metalfilm som modstandslag og kontaktflader, hvor modstandslaget er dækket af et elektrisk isolerende beskyttelseslag, og kontaktfladerne er forbundet elektrisk ledende og direkte mekanisk fast med elektriske lederbaner, der er isoleret fra hinanden, på en højtemperaturbestandig platin. Præcisionsmodstanden kontakteres på en ende af platinen. På den ende af platinen, der vender bort fra præcisionsmodstanden, placeres der kontaktflader til tilslutning af en bærer eller et kabel. På kontaktfladerne til kontakteringen og fastgørelsen af præcisionsmodstanden påføres der umiddelbart inden pålægningen af præcisionsmodstanden også på den højtemperaturbestandige platin en stadig fugtig tykfilmledepasta, på hvilken præcisionsmodstanden påsættes med sine frie kontaktflader og indbrændes på platinen ved temperaturer op til 1000°C og dermed kontakteres og fastgøres. I en udførelsesform er der anbragt en stikkontaktflade på bærerplatinens for- og bagside. Fremgangsmåden er dog kostbar.EP 0 809 094 discloses a method for producing a temperature measuring sensor device with a temperature sensitive precision resistor having on a ceramic substrate a thin metal film as a resistance layer and contact surfaces, the resistance layer being covered by an electrically insulating protective layer and the contact surfaces being connected electrically conductive and direct. mechanically fixed with insulated electrical conductor paths on a high temperature resistant platinum. The precision resistor is contacted at one end of the platinum. On the end of the platinum facing away from the precision resistor, contact surfaces are placed for connecting a carrier or cable. On the contact surfaces for the contacting and fixing of the precision resistor, immediately before the application of the precision resistor is applied, also on the high temperature resistant platinum, a still moist thick film guide paste is applied to which the precision resistor is applied with its free contact surfaces and burned onto the platinum at temperatures up to 1000 ° C and thus contacted. In one embodiment, an outlet surface is provided on the front and back of the carrier plate. However, the process is costly.

DE 197 42 236 beskriver en temperatursensor med en langstrakt lederplade, som har mindst én lederbane på et substrat af temperaturbestandige materialer med elektrisk isolerende overflade, hvor der på overfladen er anbragt to tilslutningskontaktfelter, der er forbundet med lederbanen, til elektrisk forbindelse med ender af et tilslutningskabels tilslutningsledere ved hjælp af en smeltning. Et første tilslutningskontaktfelt er placeret på forsiden, og et andet tilslutningskontaktfelt er placeret på bagsiden af lederplatinen. Lederpladen består af epoxid, triaziner, polyemider eller af polytetrafluorethylen. Lederbanen er set ovenfra udformet mæanderformet forløbende og er udformet som et plan i området af tilslutningskontaktfelterne. Således er der tilvejebragt en sensor til en varig, sikker og præcis temperaturmåling, hvilket giver en simpel, robust opbygning og en høj kvalitet.DE 197 42 236 discloses a temperature sensor having an elongated conductor plate having at least one conductor path on a substrate of temperature-resistant materials with electrically insulating surface, on which are provided two surface contact fields connected to the conductor path for electrical connection to ends of a connecting cable connection conductors by means of a melt. A first connection contact field is located on the front and a second connection contact field is located on the back of the conductor board. The leaderboard consists of epoxide, triazines, polyemides or polytetrafluoroethylene. The conductor path is viewed from above, meander-shaped course and is designed as a plane in the region of the connection contact fields. Thus, a sensor is provided for a durable, safe and accurate temperature measurement, which provides a simple, robust structure and a high quality.

Den foreliggende opfindelse har nu til opgave at tilvejebringe en fremgangsmåde, hvor en sensor med sådanne egenskaber er nem at reproducere og let kan produceres automatisk.It is the object of the present invention to provide a method in which a sensor with such properties is easy to reproduce and can be easily produced automatically.

Løsningen af opgaven sker ved hjælp af de uafhængige krav. Foretrukne udførelsesformer er beskrevet i de afhængige krav.The task is solved using the independent requirements. Preferred embodiments are described in the dependent claims.

Det, der er afgørende for den foreliggende opfindelse, er, at en præcisionsmodstand forbindes med et tilslutningskabel, der er forbundet på en bærer på for- og bagsiden, via strømbaner på bæreren, idet strømbanerne dannes af en flade ved strukturering af fladen, og en af fladerne for det andet deles i to fra hinanden isolerede felter, som der senere dannes bro imellem ved hjælp af præcisionsmodstanden. Til strukturering af de fulde flader findes der mekaniske og kemiske fremgangsmåder. Stansning, skrælning, slibning og ætsning har vist sig at være fordelagtigt. Fremgangsmåden ifølge DE 10 2004 006 457 er fore trukket. Det har vist sig at være fordelagtigt at dele metallaget ved stansning eller skrælning. Også tilspidsningen af en strømbane kan fordelagtigt bevirkes ved stansning eller skrælning. Fortrinsvis stanser man således, at der bliver T-formede ender tilbage. Meget fordelagtigt fjernes metalbelægningen ved plaststrimlens kanter mekanisk med henblik på en automatiseret videreforarbejdning.What is essential to the present invention is that a precision resistor is connected to a connection cable connected to a front and back carrier via power paths of the carrier, the current paths being formed by a surface by structuring the surface, and a Second, the surfaces are divided into two isolated fields, which are later bridged by the precision resistor. Mechanical and chemical methods are available for structuring the full surfaces. Punching, peeling, grinding and etching have proven to be advantageous. The process according to DE 10 2004 006 457 is preferred. It has been found advantageous to split the metal layer by punching or peeling. Advantageously, the taper of a current path may be effected by punching or peeling. Preferably, punches are made so that T-shaped ends remain. Very advantageously, the metal coating at the edges of the plastic strip is mechanically removed for automated further processing.

Således kan fladen struktureres samtidigt eller i trin i strømbaner, hvor en strømbane deles i to delbaner, der er isoleret fra hinanden.Thus, the surface can be structured simultaneously or in stages in current paths, where a current path is divided into two sub-paths which are isolated from one another.

Som metalbelægninger på plasten har det vist sig at være fordelagtigt med kobberlegeringer, navnlig kobber.As metal coatings on the plastic, copper alloys, in particular copper, have been found to be advantageous.

Plasten kan fortrinsvis udholde temperaturer på op til 200°C, især op til 250°C. Gennemprøvede plastmaterialer er epoxider, triaziner, polyemider og fluorpolymerer.Preferably, the plastic can withstand temperatures of up to 200 ° C, especially up to 250 ° C. Proven plastic materials are epoxides, triazines, polyemides and fluoropolymers.

Fortrinsvis lader man delbanerne være brede i det område, hvor de deles.Preferably, the subways are left wide in the area where they are shared.

Præcisionsmodstanden udformes især som SMD-komponent og fastgøres ifølge SMD-teknik som broer over delbanerne.The precision resistor is especially designed as an SMD component and is fixed according to the SMD technique as bridges over the sub-tracks.

Den ifølge opfindelsen beskrevne enhed af en temperatursensor bliver med et tilslutningskabel på for- og bagsiden af strimlen forbundet med enderne af strømbanerne.The unit described by a temperature sensor according to the invention is connected to the ends of the current paths by means of a connection cable on the front and back of the strip.

Fremstillingsmetoden ifølge opfindelsen tilvejebringer en i vid udstrækning automatiseret bearbejdning til fremstilling af varige, sikre og præcise temperatursensorer med simpel robust opbygning og høj kvalitet ved en fremragende reproducerbarhed.The manufacturing method according to the invention provides a largely automated processing for the production of durable, safe and precise temperature sensors with simple robust construction and high quality at excellent reproducibility.

Et plastbånd, der er belagt med kobber på begge sider, bliver først skåret til med hensyn til sine kobberbelægninger og udtyndes til strimler, der har konturer. Navnlig kan strømbanernes kontur bestemmes yderst præcist med et enkelt værktøj. Fordelagtigt behøver man ikke at fjerne hele den overskydende metalfolie for at tilspidse strømbanerne 5, 5’ i forhold til deres ender 6, 6’ og evt. i forhold til felterne 3 og 4, for det er fuldt ud tilstrækkeligt blot at fritlægge konturerne. Fortrinsvis fjernes kobberbelægningen stadig ved strimlens kanter. Dette er en fordel for den senere anvendelse af den strukturerede strimmel.A copper band coated with copper on both sides is first cut for its copper coatings and thinned into strips that have contours. In particular, the contour of the current paths can be determined very precisely with a single tool. Advantageously, one does not need to remove all the excess metal foil to taper the flow paths 5, 5 'to their ends 6, 6' and possibly compared to fields 3 and 4, because it is perfectly sufficient to simply expose the contours. Preferably, the copper coating is still removed at the edges of the strip. This is an advantage for the later application of the structured strip.

Alternativt kan strukturerne også skrælles, slibes, kradses, træ-ses ud osv.Alternatively, the structures can also be peeled, sanded, scratched, cut out, etc.

Det er afgørende for den senere anvendelse, at strømbanerne 5, 5’ er tilspidset i forhold til deres ender 6, 6’ og fortrinsvis også i forhold til felterne 3 og 4. Det er endvidere afgørende, at felterne 3 og 4 eller strømbanerne 5, 5’ isoleres fra hinanden.It is essential for later application that the current paths 5, 5 'are tapered relative to their ends 6, 6' and preferably also relative to the fields 3 and 4. It is further essential that the fields 3 and 4 or the current paths 5, 5 'are isolated from each other.

Til forbindelsen af den på bagsiden placerede strømbane 5 med feltet 4 kan de kendte teknikker anvendes, såsom eksempelvis gennemgående kontakteringer. Foretrukket skal man dog være opmærksom på, at en gennemgående kontaktering ikke placeres direkte under kontaktstedet for en SMD-komponent, men derimod ved siden af dette. Med henblik på temperatursensorens senere kvalitet og pålidelighed vil det være afgørende, at en lang strømbane er tilspidset i forhold til en kort ende 6. Til forlængelse af strømbanen kan denne struktureres slange- eller mæanderformet. Med denne foranstaltning kan strimlens længde forkortes.For the connection of the rear current path 5 with the field 4, the known techniques can be used, such as, for example, through contacts. Preferably, however, it should be noted that a continuous contact is not placed directly below the point of contact of an SMD component, but rather next to it. In view of the later quality and reliability of the temperature sensor, it will be essential that a long current path is tapered relative to a short end 6. To extend the current path, this can be hose-shaped or man-shaped. By this measure, the length of the strip can be shortened.

I det følgende vil opfindelsen blive forklaret nærmere ved hjælp af eksempler med henvisning til tegningen.In the following, the invention will be explained in more detail by way of example with reference to the drawing.

Fig. 1 viser i perspektivisk gengivelse en plaststrimmel 2 med en strømbane 5, 5’ på for- og bagsiden, hvor hver strømbane er tilspidset i forhold til sin ende 6, 6’. Den øvre strømbane er delt i to delbaner, hvor der dannes bro over delingen af delbanerne ved hjælp af en SMD-komponent 1. SMD-komponenten fastgøres på felterne 3 og 4 ved SMD-teknik. Felt 4 er forbundet med strømbanen på bagsiden. Dette opnås eksempelvis med en gennemgående kontaktering 8. Fortrinsvis fastgøres SMD-komponenten ved siden af den gennemgående kontaktering 8. Kontakteringen af SMD-komponenten sker fortrinsvis på glatte, plane flader, såsom felterne 3 og 4. Forstyrrelser igennem en gennemgående kontaktering skal ikke forstyrre fastgørelsen af SMD’en og skal derfor være anbragt i en afstand fra SMD-fastgørelsen. Strimlen 2 stanses ud af et bånd eller en epoxidplade, som på hele for- og bagsiden er belagt med kobber. Derved kan mønstrene udformes i en stanse- eller ætsningsproces på den på begge sider belagte plade. Stansningen ifølge DEFIG. 1 is a perspective view of a plastic strip 2 having a flow path 5, 5 'at the front and back, each flow path being tapered relative to its end 6, 6'. The upper flow path is divided into two sub-lanes, where the division of the sub-lanes is bridged by means of an SMD component 1. The SMD component is fixed to fields 3 and 4 by SMD technique. Field 4 is connected to the power path at the back. This is achieved, for example, with a through contact 8. Preferably, the SMD component is attached next to the through contact 8. The SMD component is preferably contacted on smooth, flat surfaces, such as fields 3 and 4. Disturbances through a through contact should not interfere with the attachment. of the SMD and must therefore be spaced from the SMD attachment. The strip 2 is punched out of a band or epoxide plate which is coated with copper on the entire front and back. This allows the patterns to be formed in a punching or etching process on the plate coated on both sides. The punching according to DE

10 2004 006 457 er foretrukket. Ætsningsprocessen er egnet til fremstilling af særligt stive strimler.10 2004 006 457 is preferred. The etching process is suitable for making particularly rigid strips.

Claims

A method of producing a temperature sensor having the following steps a) structuring a platinum thin film on a ceramic plate in at least one flow path b) structuring a metal coating on the front and back of a plastic strip (2) in flow paths (5, 5) ') for connecting at one end of the strip (2) to a cable and at the other end to an electronic component (1) having at least one structured platinum thin film on a ceramic plate; and c) wherein the metal coating on the front and back at the cable side end is structured into current paths (5.5 ') which are tapered relative to their end (6', 6) at the end of the plastic strip (2) on the cable side, characterized in that it is at least one current path of the ceramic plate is tapered relative to its ends and the method further comprises the following steps d) wherein a metal coating or current path in the region at the end of the component for contacting the component is divided into two isolated fields (3, 4) ) or sub-lanes, and the power path (5) at the rear is connected to the remaining short field (4) or the remaining short sub-lane using through contact (8); e) wherein the component (1) is placed over the divided fields (3, 4) or sub-lanes after the structure of the metal coatings on the plastic strip (2) in a way whereby the contact point of the component is not placed directly over the through contact (8); f) wherein each contact of the component is connected to its own field (3, 4) or its sub-path; and g) at which, at the opposite end of the component of the plastic strip (2), a connecting cable is connected at each end of the current path on the front and back.

Process according to claim 1, characterized in that the metal coating on the plastic strip (2) is of copper or contains copper.

Process according to claim 1 or 2, characterized in that the plastic material in the strip (2) is selected from the group of epoxides, triazines, polyemides and fluoropolymers.

Method according to one of claims 1 to 3, characterized in that punching or peeling is performed for structuring the metal coating.

Method according to claim 4, characterized in that the division of the metal coating into two fields (3, 4) is carried out by punching or peeling.

Method according to one of the preceding claims, characterized in that a current path (5, 5 ') is tapered relative to its end by punching or peeling.

Method according to one of the preceding claims, characterized in that the metal coating and the plastic strip (2) are stamped T-shaped at at least one end.

Method according to one of the preceding claims, characterized in that the metal coating is mechanically removed at at least one edge of the plastic strip (2).

Method according to one of the preceding claims, characterized in that at least one field (3, 4) in the area of the divide is allowed to be wider than the current path (5, 5 ') which is tapered relative to the end.

Method according to one of the preceding claims, characterized in that at least one flow path (5, 5 ') is structured into a hose or miter-shaped central part.

Method according to one of the preceding claims, characterized in that at least one current path (5, 5 ') is tapered relative to two ends (6, 6').