DK125347B - Fremgangsmåde til fremstilling af højohmsdiffusionsmikromodstande. - Google Patents

Fremgangsmåde til fremstilling af højohmsdiffusionsmikromodstande.

Info

Publication number
DK125347B
DK125347B DK10971AA DK10971A DK125347B DK 125347 B DK125347 B DK 125347B DK 10971A A DK10971A A DK 10971AA DK 10971 A DK10971 A DK 10971A DK 125347 B DK125347 B DK 125347B
Authority
DK
Denmark
Prior art keywords
resistors
production
ohmic diffusion
diffusion micro
micro
Prior art date
Application number
DK10971AA
Other languages
English (en)
Inventor
J Kassabov
Original Assignee
Zentralen Inst Sa Elementi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zentralen Inst Sa Elementi filed Critical Zentralen Inst Sa Elementi
Publication of DK125347B publication Critical patent/DK125347B/da

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/40—Resistors
    • H10D1/43—Resistors having PN junctions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/30—Apparatus or processes specially adapted for manufacturing resistors adapted for baking
    • H10P32/1404—
    • H10P32/171—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S252/00—Compositions
    • Y10S252/95—Doping agent source material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S252/00—Compositions
    • Y10S252/95—Doping agent source material
    • Y10S252/951—Doping agent source material for vapor transport
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/914—Doping
    • Y10S438/92—Controlling diffusion profile by oxidation

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
DK10971AA 1970-01-14 1971-01-12 Fremgangsmåde til fremstilling af højohmsdiffusionsmikromodstande. DK125347B (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BG1374670 1970-01-14

Publications (1)

Publication Number Publication Date
DK125347B true DK125347B (da) 1973-02-05

Family

ID=3897413

Family Applications (1)

Application Number Title Priority Date Filing Date
DK10971AA DK125347B (da) 1970-01-14 1971-01-12 Fremgangsmåde til fremstilling af højohmsdiffusionsmikromodstande.

Country Status (5)

Country Link
US (1) US3726726A (da)
DE (1) DE2101128A1 (da)
DK (1) DK125347B (da)
ES (1) ES387013A1 (da)
FR (1) FR2075502A5 (da)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49114355A (da) * 1973-02-28 1974-10-31

Also Published As

Publication number Publication date
FR2075502A5 (da) 1971-10-08
US3726726A (en) 1973-04-10
DE2101128A1 (de) 1971-07-22
ES387013A1 (es) 1973-04-16

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