DK1016127T3 - A fluorometric method for enhancing the efficiency of rinsing and water insulation processes in the production of semiconductor chips - Google Patents

A fluorometric method for enhancing the efficiency of rinsing and water insulation processes in the production of semiconductor chips

Info

Publication number
DK1016127T3
DK1016127T3 DK98946942T DK98946942T DK1016127T3 DK 1016127 T3 DK1016127 T3 DK 1016127T3 DK 98946942 T DK98946942 T DK 98946942T DK 98946942 T DK98946942 T DK 98946942T DK 1016127 T3 DK1016127 T3 DK 1016127T3
Authority
DK
Denmark
Prior art keywords
rinsing
enhancing
efficiency
production
semiconductor chips
Prior art date
Application number
DK98946942T
Other languages
Danish (da)
Inventor
John E Hoots
Brian V Jenkins
Original Assignee
Nalco Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/931,556 external-priority patent/US5922606A/en
Application filed by Nalco Chemical Co filed Critical Nalco Chemical Co
Application granted granted Critical
Publication of DK1016127T3 publication Critical patent/DK1016127T3/en

Links

DK98946942T 1997-09-16 1998-09-10 A fluorometric method for enhancing the efficiency of rinsing and water insulation processes in the production of semiconductor chips DK1016127T3 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/931,556 US5922606A (en) 1997-09-16 1997-09-16 Fluorometric method for increasing the efficiency of the rinsing and water recovery process in the manufacture of semiconductor chips
PCT/US1998/018925 WO1999014798A1 (en) 1997-09-16 1998-09-10 A fluorometric method for increasing the efficiency of the rinsing and water recovery process in the manufacture of semiconductor chips
EP98946942A EP1016127B1 (en) 1997-09-16 1998-09-10 A fluorometric method for increasing the efficiency of the rinsing and water recovery process in the manufacture of semiconductor chips

Publications (1)

Publication Number Publication Date
DK1016127T3 true DK1016127T3 (en) 2005-06-27

Family

ID=34702425

Family Applications (1)

Application Number Title Priority Date Filing Date
DK98946942T DK1016127T3 (en) 1997-09-16 1998-09-10 A fluorometric method for enhancing the efficiency of rinsing and water insulation processes in the production of semiconductor chips

Country Status (1)

Country Link
DK (1) DK1016127T3 (en)

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