DE9321267U1 - Device for handling substrates in clean rooms and lock device provided with such a device - Google Patents

Device for handling substrates in clean rooms and lock device provided with such a device

Info

Publication number
DE9321267U1
DE9321267U1 DE9321267U DE9321267U DE9321267U1 DE 9321267 U1 DE9321267 U1 DE 9321267U1 DE 9321267 U DE9321267 U DE 9321267U DE 9321267 U DE9321267 U DE 9321267U DE 9321267 U1 DE9321267 U1 DE 9321267U1
Authority
DE
Germany
Prior art keywords
clean rooms
handling substrates
lock
device provided
lock device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9321267U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GENTISCHER JOSEF DIPL ING FH
Original Assignee
GENTISCHER JOSEF DIPL ING FH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GENTISCHER JOSEF DIPL ING FH filed Critical GENTISCHER JOSEF DIPL ING FH
Priority to DE9321267U priority Critical patent/DE9321267U1/en
Priority claimed from DE4332657A external-priority patent/DE4332657C2/en
Publication of DE9321267U1 publication Critical patent/DE9321267U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L1/00—Enclosures; Chambers
    • B01L1/04—Dust-free rooms or enclosures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
DE9321267U 1993-09-27 1993-09-27 Device for handling substrates in clean rooms and lock device provided with such a device Expired - Lifetime DE9321267U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9321267U DE9321267U1 (en) 1993-09-27 1993-09-27 Device for handling substrates in clean rooms and lock device provided with such a device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4332657A DE4332657C2 (en) 1993-09-27 1993-09-27 Device for handling substrates in clean rooms and lock device provided with such a device
DE9321267U DE9321267U1 (en) 1993-09-27 1993-09-27 Device for handling substrates in clean rooms and lock device provided with such a device

Publications (1)

Publication Number Publication Date
DE9321267U1 true DE9321267U1 (en) 1996-11-28

Family

ID=25929887

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9321267U Expired - Lifetime DE9321267U1 (en) 1993-09-27 1993-09-27 Device for handling substrates in clean rooms and lock device provided with such a device

Country Status (1)

Country Link
DE (1) DE9321267U1 (en)

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