DE9320768U1 - Electrode in a discharge unit containing fluorine of a pulsed gas discharge laser - Google Patents

Electrode in a discharge unit containing fluorine of a pulsed gas discharge laser

Info

Publication number
DE9320768U1
DE9320768U1 DE9320768U DE9320768U DE9320768U1 DE 9320768 U1 DE9320768 U1 DE 9320768U1 DE 9320768 U DE9320768 U DE 9320768U DE 9320768 U DE9320768 U DE 9320768U DE 9320768 U1 DE9320768 U1 DE 9320768U1
Authority
DE
Germany
Prior art keywords
electrode
unit containing
containing fluorine
pulsed gas
gas discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9320768U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lambda Physik AG
Original Assignee
Lambda Physik AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lambda Physik AG filed Critical Lambda Physik AG
Priority to DE9320768U priority Critical patent/DE9320768U1/en
Priority claimed from DE4335079A external-priority patent/DE4335079C1/en
Publication of DE9320768U1 publication Critical patent/DE9320768U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0388—Compositions, materials or coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
DE9320768U 1993-10-14 1993-10-14 Electrode in a discharge unit containing fluorine of a pulsed gas discharge laser Expired - Lifetime DE9320768U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9320768U DE9320768U1 (en) 1993-10-14 1993-10-14 Electrode in a discharge unit containing fluorine of a pulsed gas discharge laser

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4335079A DE4335079C1 (en) 1993-10-14 1993-10-14 Electrodes in a fluorine-containing discharge unit of a pulsed gas discharge laser
DE9320768U DE9320768U1 (en) 1993-10-14 1993-10-14 Electrode in a discharge unit containing fluorine of a pulsed gas discharge laser
US08/827,973 US5729565A (en) 1993-10-14 1996-11-07 Discharge unit and electrode for a pulsed discharge laser

Publications (1)

Publication Number Publication Date
DE9320768U1 true DE9320768U1 (en) 1995-04-06

Family

ID=27205664

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9320768U Expired - Lifetime DE9320768U1 (en) 1993-10-14 1993-10-14 Electrode in a discharge unit containing fluorine of a pulsed gas discharge laser

Country Status (1)

Country Link
DE (1) DE9320768U1 (en)

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