DE9313384U1 - Device for holding a sputtering cathode - Google Patents

Device for holding a sputtering cathode

Info

Publication number
DE9313384U1
DE9313384U1 DE9313384U DE9313384U DE9313384U1 DE 9313384 U1 DE9313384 U1 DE 9313384U1 DE 9313384 U DE9313384 U DE 9313384U DE 9313384 U DE9313384 U DE 9313384U DE 9313384 U1 DE9313384 U1 DE 9313384U1
Authority
DE
Germany
Prior art keywords
holding
sputtering cathode
sputtering
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9313384U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE9313384U priority Critical patent/DE9313384U1/en
Publication of DE9313384U1 publication Critical patent/DE9313384U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
DE9313384U 1993-09-06 1993-09-06 Device for holding a sputtering cathode Expired - Lifetime DE9313384U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9313384U DE9313384U1 (en) 1993-09-06 1993-09-06 Device for holding a sputtering cathode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE9313384U DE9313384U1 (en) 1993-09-06 1993-09-06 Device for holding a sputtering cathode

Publications (1)

Publication Number Publication Date
DE9313384U1 true DE9313384U1 (en) 1993-10-28

Family

ID=6897710

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9313384U Expired - Lifetime DE9313384U1 (en) 1993-09-06 1993-09-06 Device for holding a sputtering cathode

Country Status (1)

Country Link
DE (1) DE9313384U1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0753882A1 (en) * 1995-07-08 1997-01-15 Balzers und Leybold Deutschland Holding Aktiengesellschaft Cathode assembly for a target sputtering device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NICHTS ERMITTELT *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0753882A1 (en) * 1995-07-08 1997-01-15 Balzers und Leybold Deutschland Holding Aktiengesellschaft Cathode assembly for a target sputtering device

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