DE9303622U1 - - Google Patents
Info
- Publication number
- DE9303622U1 DE9303622U1 DE9303622U DE9303622U DE9303622U1 DE 9303622 U1 DE9303622 U1 DE 9303622U1 DE 9303622 U DE9303622 U DE 9303622U DE 9303622 U DE9303622 U DE 9303622U DE 9303622 U1 DE9303622 U1 DE 9303622U1
- Authority
- DE
- Germany
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE9303622U DE9303622U1 (ko) | 1993-03-12 | 1993-03-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE9303622U DE9303622U1 (ko) | 1993-03-12 | 1993-03-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE9303622U1 true DE9303622U1 (ko) | 1993-04-29 |
Family
ID=6890528
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE9303622U Expired - Lifetime DE9303622U1 (ko) | 1993-03-12 | 1993-03-12 |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE9303622U1 (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19912606A1 (de) * | 1999-03-22 | 2000-12-14 | Johannes Trabert | Pumpeneinrichtung unter Anwendung eines elektrisch gesteuerten chemomechanischen Antriebs |
CN113833634A (zh) * | 2021-09-01 | 2021-12-24 | 北京航空航天大学 | 电磁驱动式mems微泵及该微泵的集成加工工艺 |
-
1993
- 1993-03-12 DE DE9303622U patent/DE9303622U1/de not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19912606A1 (de) * | 1999-03-22 | 2000-12-14 | Johannes Trabert | Pumpeneinrichtung unter Anwendung eines elektrisch gesteuerten chemomechanischen Antriebs |
CN113833634A (zh) * | 2021-09-01 | 2021-12-24 | 北京航空航天大学 | 电磁驱动式mems微泵及该微泵的集成加工工艺 |