DE9301727U1 - Vorrichtung zum Halten und Transportieren plattenförmiger Substrate - Google Patents
Vorrichtung zum Halten und Transportieren plattenförmiger SubstrateInfo
- Publication number
- DE9301727U1 DE9301727U1 DE9301727U DE9301727U DE9301727U1 DE 9301727 U1 DE9301727 U1 DE 9301727U1 DE 9301727 U DE9301727 U DE 9301727U DE 9301727 U DE9301727 U DE 9301727U DE 9301727 U1 DE9301727 U1 DE 9301727U1
- Authority
- DE
- Germany
- Prior art keywords
- supports
- frame
- substrates
- clamping springs
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 37
- 239000002184 metal Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 238000001771 vacuum deposition Methods 0.000 claims description 2
- 238000009489 vacuum treatment Methods 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims 1
- 239000010935 stainless steel Substances 0.000 claims 1
- 239000000969 carrier Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910000639 Spring steel Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4587—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE9301727U DE9301727U1 (de) | 1993-02-09 | 1993-02-09 | Vorrichtung zum Halten und Transportieren plattenförmiger Substrate |
JP3714293U JP2607524Y2 (ja) | 1993-02-09 | 1993-07-07 | プレート状のサブストレートを保持しかつ搬送するための装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE9301727U DE9301727U1 (de) | 1993-02-09 | 1993-02-09 | Vorrichtung zum Halten und Transportieren plattenförmiger Substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
DE9301727U1 true DE9301727U1 (de) | 1993-03-25 |
Family
ID=6889114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE9301727U Expired - Lifetime DE9301727U1 (de) | 1993-02-09 | 1993-02-09 | Vorrichtung zum Halten und Transportieren plattenförmiger Substrate |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2607524Y2 (US20050103857A1-20050519-P00003.png) |
DE (1) | DE9301727U1 (US20050103857A1-20050519-P00003.png) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010060664A1 (de) * | 2010-11-18 | 2012-05-24 | Roth & Rau Ag | Verfahren und Vorrichtung zum Reinigen und Konditionieren eines Substratträgers einer Substratbeschichtungsanlage |
DE102011006833A1 (de) * | 2011-04-06 | 2012-10-11 | Roth & Rau Ag | Substratträger |
WO2014200927A1 (en) | 2013-06-10 | 2014-12-18 | View, Inc. | Glass pallet for sputtering systems |
WO2017001010A1 (en) * | 2015-07-01 | 2017-01-05 | Applied Materials, Inc. | Self-locking holder for substrates |
CN107879110A (zh) * | 2016-09-30 | 2018-04-06 | 上海宝弥金属制品有限公司 | 玻璃支撑条、玻璃周转架及玻璃处理方法 |
WO2022069171A1 (de) * | 2020-09-30 | 2022-04-07 | Oerlikon Surface Solutions Ag, Pfäffikon | Federhalterung und werkstückträger |
US11688589B2 (en) | 2013-06-10 | 2023-06-27 | View, Inc. | Carrier with vertical grid for supporting substrates in coater |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU417542A1 (US20050103857A1-20050519-P00003.png) * | 1972-01-06 | 1974-02-28 | ||
EP0143698B1 (fr) * | 1983-11-25 | 1987-05-20 | René Dubois | Support adaptable à des pièces de formes et dimensions variées |
DE3919611A1 (de) * | 1989-06-15 | 1990-12-20 | Wacker Chemitronic | Haltevorrichtung zur aufnahme von scheibenfoermigen gegenstaenden, insbesondere halbleiterscheiben, und verfahren zu deren behandlung |
DE9116285U1 (de) * | 1991-11-05 | 1992-05-27 | Leybold AG, 6450 Hanau | Vorrichtung zur Halterung und zum Transport von Substraten in Vakuumanlagen |
-
1993
- 1993-02-09 DE DE9301727U patent/DE9301727U1/de not_active Expired - Lifetime
- 1993-07-07 JP JP3714293U patent/JP2607524Y2/ja not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU417542A1 (US20050103857A1-20050519-P00003.png) * | 1972-01-06 | 1974-02-28 | ||
EP0143698B1 (fr) * | 1983-11-25 | 1987-05-20 | René Dubois | Support adaptable à des pièces de formes et dimensions variées |
DE3919611A1 (de) * | 1989-06-15 | 1990-12-20 | Wacker Chemitronic | Haltevorrichtung zur aufnahme von scheibenfoermigen gegenstaenden, insbesondere halbleiterscheiben, und verfahren zu deren behandlung |
DE9116285U1 (de) * | 1991-11-05 | 1992-05-27 | Leybold AG, 6450 Hanau | Vorrichtung zur Halterung und zum Transport von Substraten in Vakuumanlagen |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010060664A1 (de) * | 2010-11-18 | 2012-05-24 | Roth & Rau Ag | Verfahren und Vorrichtung zum Reinigen und Konditionieren eines Substratträgers einer Substratbeschichtungsanlage |
DE102011006833A1 (de) * | 2011-04-06 | 2012-10-11 | Roth & Rau Ag | Substratträger |
WO2014200927A1 (en) | 2013-06-10 | 2014-12-18 | View, Inc. | Glass pallet for sputtering systems |
EP3008224A4 (en) * | 2013-06-10 | 2017-03-01 | View, Inc. | Glass pallet for sputtering systems |
US11133158B2 (en) | 2013-06-10 | 2021-09-28 | View, Inc. | Glass pallet for sputtering systems |
US11424109B2 (en) | 2013-06-10 | 2022-08-23 | View, Inc. | Carrier with vertical grid for supporting substrates in coater |
US11688589B2 (en) | 2013-06-10 | 2023-06-27 | View, Inc. | Carrier with vertical grid for supporting substrates in coater |
US12068142B2 (en) | 2013-06-10 | 2024-08-20 | View, Inc. | Carrier with vertical grid for supporting substrates in coater |
WO2017001010A1 (en) * | 2015-07-01 | 2017-01-05 | Applied Materials, Inc. | Self-locking holder for substrates |
CN107879110A (zh) * | 2016-09-30 | 2018-04-06 | 上海宝弥金属制品有限公司 | 玻璃支撑条、玻璃周转架及玻璃处理方法 |
CN107879110B (zh) * | 2016-09-30 | 2024-03-26 | 上海宝弥金属制品有限公司 | 玻璃支撑条、玻璃周转架及玻璃处理方法 |
WO2022069171A1 (de) * | 2020-09-30 | 2022-04-07 | Oerlikon Surface Solutions Ag, Pfäffikon | Federhalterung und werkstückträger |
Also Published As
Publication number | Publication date |
---|---|
JP2607524Y2 (ja) | 2001-11-12 |
JPH0661962U (ja) | 1994-09-02 |
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