DE9210382U1 - - Google Patents
Info
- Publication number
- DE9210382U1 DE9210382U1 DE9210382U DE9210382U DE9210382U1 DE 9210382 U1 DE9210382 U1 DE 9210382U1 DE 9210382 U DE9210382 U DE 9210382U DE 9210382 U DE9210382 U DE 9210382U DE 9210382 U1 DE9210382 U1 DE 9210382U1
- Authority
- DE
- Germany
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/02—Circuits or systems for supplying or feeding radio-frequency energy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
- H02M7/53871—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration with automatic control of output voltage or current
- H02M7/53873—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration with automatic control of output voltage or current with digital control
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Power Engineering (AREA)
- Spectroscopy & Molecular Physics (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE9210382U DE9210382U1 (de) | 1992-08-04 | 1992-08-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE9210382U DE9210382U1 (de) | 1992-08-04 | 1992-08-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE9210382U1 true DE9210382U1 (de) | 1992-09-24 |
Family
ID=6882291
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE9210382U Expired - Lifetime DE9210382U1 (de) | 1992-08-04 | 1992-08-04 |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE9210382U1 (de) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10018879A1 (de) * | 2000-04-17 | 2001-10-25 | Melec Gmbh | Stromversorgungsgerät zur bipolaren Stromversorgung |
EP2618640A2 (de) | 2012-01-23 | 2013-07-24 | Forschungsverbund Berlin e.V. | Verfahren und Vorrichtung zum Erzeugen von Plasmapulsen |
DE102012223657B3 (de) * | 2012-12-18 | 2014-03-27 | TRUMPF Hüttinger GmbH + Co. KG | Leistungsversorgungssystem und Verfahren zur Erzeugung einer Leistung |
WO2014094737A2 (de) * | 2012-12-18 | 2014-06-26 | TRUMPF Hüttinger GmbH + Co. KG | Verfahren zur erzeugung einer hochfrequenzleistung und leistungsversorgungssystem mit einem leistungswandler zur versorgung einer last mit leistung |
WO2014094738A3 (de) * | 2012-12-18 | 2014-08-14 | TRUMPF Hüttinger GmbH + Co. KG | Arclöschverfahren und leistungsversorgungssystem mit einem leistungswandler |
WO2015091454A1 (de) * | 2013-12-18 | 2015-06-25 | TRUMPF Hüttinger GmbH + Co. KG | Leistungsversorgungssystem und verfahren zur erzeugung einer leistung |
US10026593B2 (en) | 2013-12-18 | 2018-07-17 | Trumpf Huettinger Gmbh + Co. Kg | Power supply systems and methods for generating power with multiple amplifier paths |
-
1992
- 1992-08-04 DE DE9210382U patent/DE9210382U1/de not_active Expired - Lifetime
Cited By (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10018879B4 (de) * | 2000-04-17 | 2013-02-28 | Melec Gmbh | Stromversorgungsgerät zur bipolaren Stromversorgung |
DE10018879A1 (de) * | 2000-04-17 | 2001-10-25 | Melec Gmbh | Stromversorgungsgerät zur bipolaren Stromversorgung |
DE102012200878B4 (de) * | 2012-01-23 | 2014-11-20 | Forschungsverbund Berlin E.V. | Verfahren und Vorrichtung zum Erzeugen von Plasmapulsen |
EP2618640A2 (de) | 2012-01-23 | 2013-07-24 | Forschungsverbund Berlin e.V. | Verfahren und Vorrichtung zum Erzeugen von Plasmapulsen |
DE102012200878A1 (de) * | 2012-01-23 | 2013-07-25 | Forschungsverbund Berlin E.V. | Verfahren und Vorrichtung zum Erzeugen von Plasmapulsen |
US9210792B2 (en) | 2012-01-23 | 2015-12-08 | Forschungsverbund Berlin E.V. | Method and apparatus for generating plasma pulses |
KR20150095760A (ko) * | 2012-12-18 | 2015-08-21 | 트럼프 헛팅거 게엠베하 + 코 카게 | 고주파수 전력을 생산하기 위한 방법 및 부하에 전력을 공급하기 위한 전력 컨버터를 갖는 전력 공급 시스템 |
US9276456B2 (en) | 2012-12-18 | 2016-03-01 | Trumpf Huettinger Gmbh + Co. Kg | Generating high-frequency power for a load |
WO2014094737A3 (de) * | 2012-12-18 | 2015-01-29 | TRUMPF Hüttinger GmbH + Co. KG | Verfahren zur erzeugung einer hochfrequenzleistung und leistungsversorgungssystem mit einem leistungswandler zur versorgung einer last mit leistung |
KR102065809B1 (ko) | 2012-12-18 | 2020-01-13 | 트럼프 헛팅거 게엠베하 + 코 카게 | 아크 제거 방법 및 전력 변환기를 갖는 전력 공급 시스템 |
WO2014094737A2 (de) * | 2012-12-18 | 2014-06-26 | TRUMPF Hüttinger GmbH + Co. KG | Verfahren zur erzeugung einer hochfrequenzleistung und leistungsversorgungssystem mit einem leistungswandler zur versorgung einer last mit leistung |
KR20150096427A (ko) * | 2012-12-18 | 2015-08-24 | 트럼프 헛팅거 게엠베하 + 코 카게 | 아크 제거 방법 및 전력 변환기를 갖는 전력 공급 시스템 |
DE102012223657B3 (de) * | 2012-12-18 | 2014-03-27 | TRUMPF Hüttinger GmbH + Co. KG | Leistungsversorgungssystem und Verfahren zur Erzeugung einer Leistung |
WO2014094738A3 (de) * | 2012-12-18 | 2014-08-14 | TRUMPF Hüttinger GmbH + Co. KG | Arclöschverfahren und leistungsversorgungssystem mit einem leistungswandler |
US10002749B2 (en) | 2012-12-18 | 2018-06-19 | Trumpf Huettinger Gmbh + Co. Kg | Extinguishing arcs in a plasma chamber |
KR102027628B1 (ko) | 2012-12-18 | 2019-10-01 | 트럼프 헛팅거 게엠베하 + 코 카게 | 고주파수 전력을 생산하기 위한 방법 및 부하에 전력을 공급하기 위한 전력 컨버터를 갖는 전력 공급 시스템 |
US10312064B2 (en) | 2012-12-18 | 2019-06-04 | Trumpf Huettinger Gmbh + Co. Kg | Extinguishing arcs in a plasma chamber |
DE202013012714U1 (de) | 2012-12-18 | 2018-10-15 | TRUMPF Hüttinger GmbH + Co. KG | Leistungsversorgungssystem mit einem Leistungswandler |
US10042407B2 (en) | 2013-12-18 | 2018-08-07 | Trumpf Huettinger Gmbh + Co. Kg | Power supply systems and methods for generating power |
US10354839B2 (en) | 2013-12-18 | 2019-07-16 | Trumpf Huettinger Gmbh + Co. Kg | Power supply systems and methods for generating power with multiple amplifier paths |
US10026593B2 (en) | 2013-12-18 | 2018-07-17 | Trumpf Huettinger Gmbh + Co. Kg | Power supply systems and methods for generating power with multiple amplifier paths |
WO2015091454A1 (de) * | 2013-12-18 | 2015-06-25 | TRUMPF Hüttinger GmbH + Co. KG | Leistungsversorgungssystem und verfahren zur erzeugung einer leistung |