DE9113744U1 - - Google Patents

Info

Publication number
DE9113744U1
DE9113744U1 DE9113744U DE9113744U DE9113744U1 DE 9113744 U1 DE9113744 U1 DE 9113744U1 DE 9113744 U DE9113744 U DE 9113744U DE 9113744 U DE9113744 U DE 9113744U DE 9113744 U1 DE9113744 U1 DE 9113744U1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9113744U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Smt & Hybrid O-8012 Dresden De GmbH
Original Assignee
Smt & Hybrid O-8012 Dresden De GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Smt & Hybrid O-8012 Dresden De GmbH filed Critical Smt & Hybrid O-8012 Dresden De GmbH
Priority to DE9113744U priority Critical patent/DE9113744U1/de
Publication of DE9113744U1 publication Critical patent/DE9113744U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0074—3D packaging, i.e. encapsulation containing one or several MEMS devices arranged in planes non-parallel to the mounting board
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
DE9113744U 1991-11-05 1991-11-05 Expired - Lifetime DE9113744U1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9113744U DE9113744U1 (fr) 1991-11-05 1991-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE9113744U DE9113744U1 (fr) 1991-11-05 1991-11-05

Publications (1)

Publication Number Publication Date
DE9113744U1 true DE9113744U1 (fr) 1992-01-16

Family

ID=6872944

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9113744U Expired - Lifetime DE9113744U1 (fr) 1991-11-05 1991-11-05

Country Status (1)

Country Link
DE (1) DE9113744U1 (fr)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0595735A1 (fr) * 1992-10-29 1994-05-04 Sextant Avionique S.A. Capteur d'une grandeur physique orientée
EP0632275A1 (fr) * 1993-07-03 1995-01-04 VDO Adolf Schindling AG Support pour accéléromètres
EP0686830A1 (fr) * 1994-06-08 1995-12-13 Bodenseewerk Gerätetechnik GmbH Unité capteur inertiel
WO1996002848A1 (fr) * 1994-07-20 1996-02-01 Honeywell Inc. Encapsulation triaxiale
WO1996006328A1 (fr) * 1994-08-25 1996-02-29 Paul Christopher Declan Elford Dispositif de mesure tridimensionnelle et indicateur de position tridimensionnelle
US5563630A (en) * 1993-10-28 1996-10-08 Mind Path Technologies, Inc. Computer mouse
DE19750350C1 (de) * 1997-11-13 1999-08-05 Univ Dresden Tech Dreidimensionaler Chip-Beschleunigungssensor und Verfahren zu seiner Herstellung mittels UV-unterstützter Mikrogalvanik
DE10064170A1 (de) * 2000-12-22 2002-07-11 Stn Atlas Elektronik Gmbh Vorrichtung zur Messung von beschleunigung und/oder Winkelgeschwindigkeit
DE19610554B4 (de) * 1995-04-19 2006-09-21 Smiths Group Plc Beschleunigungssensorbaugruppe
WO2006122780A2 (fr) * 2005-05-18 2006-11-23 Hl-Planar Technik Gmbh Dispositif de mesure de champ, module de mesure pour dispositif de mesure de champ et procede de production d'une pluralite de modules de mesure
WO2012101174A1 (fr) * 2011-01-25 2012-08-02 Epcos Ag Ensemble de capteurs

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2697628A1 (fr) * 1992-10-29 1994-05-06 Sextant Avionique Capteur d'une grandeur physique orientée.
US5433110A (en) * 1992-10-29 1995-07-18 Sextant Avionique Detector having selectable multiple axes of sensitivity
EP0595735A1 (fr) * 1992-10-29 1994-05-04 Sextant Avionique S.A. Capteur d'une grandeur physique orientée
EP0632275A1 (fr) * 1993-07-03 1995-01-04 VDO Adolf Schindling AG Support pour accéléromètres
US5563630A (en) * 1993-10-28 1996-10-08 Mind Path Technologies, Inc. Computer mouse
EP0848231A1 (fr) * 1994-06-08 1998-06-17 BODENSEEWERK GERÄTETECHNIK GmbH Unité de capteurs inertes
EP0686830A1 (fr) * 1994-06-08 1995-12-13 Bodenseewerk Gerätetechnik GmbH Unité capteur inertiel
WO1996002848A1 (fr) * 1994-07-20 1996-02-01 Honeywell Inc. Encapsulation triaxiale
US6169254B1 (en) 1994-07-20 2001-01-02 Honeywell, Inc. Three axis sensor package on flexible substrate
WO1996006328A1 (fr) * 1994-08-25 1996-02-29 Paul Christopher Declan Elford Dispositif de mesure tridimensionnelle et indicateur de position tridimensionnelle
DE19610554B4 (de) * 1995-04-19 2006-09-21 Smiths Group Plc Beschleunigungssensorbaugruppe
DE19750350C1 (de) * 1997-11-13 1999-08-05 Univ Dresden Tech Dreidimensionaler Chip-Beschleunigungssensor und Verfahren zu seiner Herstellung mittels UV-unterstützter Mikrogalvanik
DE10064170A1 (de) * 2000-12-22 2002-07-11 Stn Atlas Elektronik Gmbh Vorrichtung zur Messung von beschleunigung und/oder Winkelgeschwindigkeit
DE10064170C2 (de) * 2000-12-22 2002-11-07 Stn Atlas Elektronik Gmbh Vorrichtung zur Messung von beschleunigung und/oder Winkelgeschwindigkeit
WO2006122780A2 (fr) * 2005-05-18 2006-11-23 Hl-Planar Technik Gmbh Dispositif de mesure de champ, module de mesure pour dispositif de mesure de champ et procede de production d'une pluralite de modules de mesure
WO2006122780A3 (fr) * 2005-05-18 2007-03-01 Hl Planar Technik Gmbh Dispositif de mesure de champ, module de mesure pour dispositif de mesure de champ et procede de production d'une pluralite de modules de mesure
WO2012101174A1 (fr) * 2011-01-25 2012-08-02 Epcos Ag Ensemble de capteurs

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