DE8810276U1 - Electrically heated jacket for two-way control valves in gas supply systems, especially in semiconductor technology - Google Patents
Electrically heated jacket for two-way control valves in gas supply systems, especially in semiconductor technologyInfo
- Publication number
- DE8810276U1 DE8810276U1 DE8810276U DE8810276U DE8810276U1 DE 8810276 U1 DE8810276 U1 DE 8810276U1 DE 8810276 U DE8810276 U DE 8810276U DE 8810276 U DE8810276 U DE 8810276U DE 8810276 U1 DE8810276 U1 DE 8810276U1
- Authority
- DE
- Germany
- Prior art keywords
- shells
- way control
- electrically heatable
- gas supply
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title description 3
- 238000010438 heat treatment Methods 0.000 claims description 19
- 229910001362 Ta alloys Inorganic materials 0.000 claims description 2
- 238000005266 casting Methods 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims description 2
- 239000010445 mica Substances 0.000 claims description 2
- 229910052618 mica group Inorganic materials 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 26
- 238000000034 method Methods 0.000 description 5
- 238000003860 storage Methods 0.000 description 4
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- WRECIMRULFAWHA-UHFFFAOYSA-N trimethyl borate Chemical compound COB(OC)OC WRECIMRULFAWHA-UHFFFAOYSA-N 0.000 description 2
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/10—Arrangements for preventing freezing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/03—Heat exchange with the fluid
- F17C2227/0302—Heat exchange with the fluid by heating
- F17C2227/0304—Heat exchange with the fluid by heating using an electric heater
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Details Of Valves (AREA)
Description
* — «it»!!« IfII III!* — «it»!!« IfII III!
Elektrisch heizbar· Ummantelung für Zweiwegesteuerventile in Gas-Versorgungssystemen, insbesondere in der HalblelterteehnikElectrically heatable · Sheath for two-way control valves in gas supply systems, especially in semiconductor technology
Die Neuerung betrifft eine elektrisch heizbare Ummantelung für ein Zweiwegesteuerventil in einem Gasversorgungssystem zur Erwärmung eines durchströmenden schwerflüchtigen Gases.The innovation concerns an electrically heatable casing for a two-way control valve in a gas supply system for heating a low-volatility gas flowing through it.
Um die Temperatur und den Druck schwerflüchtiger Gase in Gasversorgungssystemen konstant zu halten und Kondensationsprozesse an kälteren Stellen (Kältebrücken) von Gasversorgungssystemen auszuschließen, werden Gasversorgungssysteme beheizt, Es ist z. B. allgemein bekannt, zur Beheizung von Gasrohren Heizbänder zu verwenden. In order to keep the temperature and pressure of low-volatility gases in gas supply systems constant and to exclude condensation processes in colder areas (cold bridges) of gas supply systems, gas supply systems are heated. For example, it is well known to use heating tapes to heat gas pipes.
In der Halbleitertechnik werden bei Trückenätzprozessen in Plasmaätzanlagen und Verfahren zur Abscheidung von Stoffen aus der Gasphase (Chemical Vapor Deposition) z.B. die schwelflüchtigenIn semiconductor technology, evaporative etching processes in plasma etching systems and processes for the deposition of substances from the gas phase (chemical vapor deposition) are used, for example, to
Gase BCl3, SiCl4, SiH2, SiH2Cl2, WF6 und TMB (Trimethylborat) eingesetzt. Eine Kondensation dieser Gase in Versorgungssystemen führt zu schlechter Reproduzierbarkeit von Beschichtungs- oder fttzprozessen. Außerdem kann das Kondensat zu einer erhöhten Partikelbildung im Gasversorgungssystem führen, so daß Reinigungs-Gases BCl 3 , SiCl 4 , SiH 2 , SiH 2 Cl 2 , WF 6 and TMB (trimethyl borate) are used. Condensation of these gases in supply systems leads to poor reproducibility of coating or etching processes. In addition, the condensate can lead to increased particle formation in the gas supply system, so that cleaning
und Wartungsarbeiten am Gasversorgungssystem öfter durchgeführt werden müssen. Beim Öffnen der Gasversorgungssysteme.von Plasmaätzanlagen oder CVD-Anlagen besteht dabei die Gefahr, daß gesundheitsgefährdende oder explosive Stoffe austreten.and maintenance work on the gas supply system must be carried out more frequently. When opening the gas supply systems of plasma etching systems or CVD systems, there is a risk that hazardous or explosive substances could escape.
Eine weitere Maßnahme zur Vermeidung von KondensationsprozessRn in Gasversorgungssystemen ist, die Gasvorratsbehälter zu kühlen, damit der Gasdruck in den Gasvorratsbtihältern der Gasversorgungssysteme am geringsten ist. Eine Kühlung der Gasvorratsbehälter hat den Nachteil, daß dadurch die Stromungsgeschwindigkeit des Gases verringert wird.Another measure to prevent condensation processes in gas supply systems is to cool the gas storage tanks so that the gas pressure in the gas storage tanks of the gas supply systems is as low as possible. Cooling the gas storage tanks has the disadvantage that it reduces the flow rate of the gas.
886 15 0 5 OE886 15 0 5 OE
wegesteuerventil in 'eirtfeW Ga's'veVsordung's'system anzugeben, mit der ein das Zweiwegesteuerventil durchströmendes Gas regelbar und gleichmäßig beheizt werden kann.directional control valve in a two-way gas supply system with which a gas flowing through the two-way control valve can be heated in a controllable and uniform manner.
Zur Lösung dieser Aufgabe wird eine elektrisch heizbare Ummantelung der eingangs genannten Art vorgeschlagen, die gekennzeichnet ist durchTo solve this problem, an electrically heatable casing of the type mentioned above is proposed, which is characterized by
a) zwei hohlzylinderförmige Teile aus wärmeisolierendem Material, die jeweils aus zwei Halbschalen zusammengesetzt sind und in die die beiden Ventilsteuereinheiten des Zweiwegesteuerventils eingelegt werden kennen unda) two hollow cylindrical parts made of heat-insulating material, each of which is composed of two half-shells and into which the two valve control units of the two-way control valve are inserted and
b) jeweils an den Innenwänden der Halbschalen angeordnete flache elektrische Heizelemente, deren elektrische Anschlüsse durch Aussparungen der Halbschalen herausgeführt sind.b) flat electrical heating elements arranged on the inner walls of the half-shells, the electrical connections of which are led out through recesses in the half-shells.
Weitere Ausgestaltungen und Weiterbildungen der Neuerung gehen aus den Unteransprüchen sowie aus der nachfolgend anhand eines Ausführungsbeispiels mit zwei Figuren gegebenen Beschreibung hervor. Further embodiments and developments of the innovation emerge from the subclaims and from the description given below using an embodiment with two figures.
FlG 1 zeigt in schematischer Darstellung eine erfindungsgemäße elektrisch heizbare Ummantelung, die zur Beheizung eines Zweiwege-Steuerventils für schwerflüchtige Gase eingesetzt werden kann.FlG 1 shows a schematic representation of an electrically heatable casing according to the invention, which can be used to heat a two-way control valve for low-volatility gases.
Das Zweiwegesteuerventil weist zwei Ventilsteuereinheiten 3 auf, die in hanteiförmiger Anordnung miteinander verbunden sind. Die Ventilsteuereinheiten 3 haben eine zylinderähnliche äußere Form. Für die elektrisch heizbare Ummantelung sind daher in Anpassung an die äußeren Formen des Zweiwegesteuerventils 2 hohlzylinderförmige Teile 1 vorgesehen, die jeweils aus zwei Halbschalen 11, z.B. mittels Steckverbindungen, zusammengesetzt sind* Die Zeichnung zeigt die geöffnete Ummantelung, wobei jeweils nur eine HaIbschale 11 dargestellt ist. Jede Halbschale 11 weist ein an der Innenwand befestigtes elektrisches Heizelement 2 auf, das ebenfalls der äußeren Form der zu beheizenden Ventilsteuereinheit 3The two-way control valve has two valve control units 3, which are connected to one another in a dumbbell-shaped arrangement. The valve control units 3 have a cylinder-like external shape. For the electrically heatable casing, hollow-cylindrical parts 1 are therefore provided in adaptation to the external shapes of the two-way control valve 2, each of which is composed of two half-shells 11, e.g. by means of plug connections. The drawing shows the opened casing, with only one half-shell 11 being shown. Each half-shell 11 has an electrical heating element 2 attached to the inner wall, which also corresponds to the external shape of the valve control unit 3 to be heated.
889150506 ' 889150506 '
angepasst ist. Die erdkttfischWAnsettluVse 4 der elektrischen Heizelemente 2 sind durch Aussparungen 5 I^ den Halbschalen 11 aus dem Schaleninneren herausgeführt und an ein strombegrenztes, spannungsgeregeltes Gleichspannungsnetzgerät, dessen Spannungseinspeisung über ein 10-fach-Wendelpotentiometer erfolgt (nicht in der Zeichnung dargestellt), angeschlossen. Für die Gaszuleitungen &thgr; und Verfichraubungen 9 des Zweiwegesteuerventils sind weitere Aussparungen 10 in der Ummantelung vorgesehen.The earth connection lines 4 of the electrical heating elements 2 are led out of the shell interior through recesses 5 in the half shells 11 and are connected to a current-limited, voltage-regulated direct current power supply, the voltage of which is fed in via a 10-way spiral potentiometer (not shown in the drawing). Further recesses 10 are provided in the casing for the gas supply lines θ and screw connections 9 of the two-way control valve.
Die Anordnung mehrerer Heizelemente 2 in den Halbschalen 11 ermöglicht eine separate Beheizung jeder Ventilsteuereinheit 3. Die hohi2ylinderfnrmigen Teile 1 können mechanisch miteinander verbunden sein (nicht in der Figur dargestellt), z. B. indem jeweils die beiden benachbarten Halbschalen 11 der beiden hohlzylinderförmigen Teile 1 miteinander verbunden sind.The arrangement of several heating elements 2 in the half-shells 11 enables a separate heating of each valve control unit 3. The hollow-cylinder-shaped parts 1 can be mechanically connected to one another (not shown in the figure), e.g. by connecting the two adjacent half-shells 11 of the two hollow-cylinder-shaped parts 1 to one another.
Die Halbschalen 11 sind aus einem wärmeisolierenden Zweikomonenten-Gießharz
hergestellt, das schwer entflammbar und bis 130 * C hitzebeständig ist.
20The half shells 11 are made of a heat-insulating two-component casting resin which is flame-retardant and heat-resistant up to 130 °C.
20
Als elektrische Heizelemente 2 sind flache Heizbänder mit in elektrisch isolierendem Klarglimmer eingebetteten Heizwendeln aus einer tantallegierung vorgesehen.Flat heating bands with heating coils made of a tantalum alloy embedded in electrically insulating clear mica are provided as electrical heating elements 2.
Die Betriebstemperatur des Zweiwegesteuerventils beträgt 30-40* C. Die Höhe des Temperaturwertes richtet sich nach der Entfernung von dem Gasvorratsbehälter, wobei die Temperatur mit zunehmender Entfernung größer sein soll. Die Heizelemente 2 haben eine maximale Leistungsaufnahme von 6 Watt bei Betrieb in Reihenschaltung. Die Betriebsspannung kann von 2 bis 12 Volt variiert werden. Ihr ohmscher Widerstand ist dabei ca. 24 0hm.The operating temperature of the two-way control valve is 30-40* C. The level of the temperature value depends on the distance from the gas storage tank, whereby the temperature should be higher with increasing distance. The heating elements 2 have a maximum power consumption of 6 watts when operated in series. The operating voltage can be varied from 2 to 12 volts. Their ohmic resistance is approx. 24 0hm.
FIG 2 zeigt zwei, z.B. durch Verschraubung oder Steckverbindungen zusammengesetzte, Halbschalen 11. Durch eine der Aussparungen sind gleichzeitig mit dem elektrischen Anschluß 4 eines Heizelements die elektrischen Anschlüsse 7 eines PT 100-Widerstandsthermometers 6, das zwischen der Oberfläche der ummantelten Ventil-FIG 2 shows two half-shells 11, e.g. joined together by screwing or plugging. Through one of the recesses, at the same time as the electrical connection 4 of a heating element, the electrical connections 7 of a PT 100 resistance thermometer 6 are located between the surface of the sheathed valve
886 15 0 5 OE886 15 0 5 OE
Steuereinheit 3 und einem Heizelement 2 angebracht ist, herausgeführt« Mit Hilfe des Widerstandsthermometers kann die Betriebstemperatur über den elektrischen Anschluß 7 abgefragt und am Display des Netzgerätes (nicht in der Figur dargestellt) angezeigt werden.Control unit 3 and a heating element 2 are connected. Using the resistance thermometer, the operating temperature can be checked via the electrical connection 7 and shown on the display of the power supply unit (not shown in the figure).
2 FlG 6 Schutzansprüche2 FlG 6 Protection claims
Claims (5)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE8810276U DE8810276U1 (en) | 1988-08-12 | 1988-08-12 | Electrically heated jacket for two-way control valves in gas supply systems, especially in semiconductor technology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE8810276U DE8810276U1 (en) | 1988-08-12 | 1988-08-12 | Electrically heated jacket for two-way control valves in gas supply systems, especially in semiconductor technology |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE8810276U1 true DE8810276U1 (en) | 1988-10-06 |
Family
ID=6826873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE8810276U Expired DE8810276U1 (en) | 1988-08-12 | 1988-08-12 | Electrically heated jacket for two-way control valves in gas supply systems, especially in semiconductor technology |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE8810276U1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7717143B2 (en) | 2006-09-07 | 2010-05-18 | Gm Global Technology Operations, Inc. | Heated outlet valve for a hydrogen storage tank |
-
1988
- 1988-08-12 DE DE8810276U patent/DE8810276U1/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7717143B2 (en) | 2006-09-07 | 2010-05-18 | Gm Global Technology Operations, Inc. | Heated outlet valve for a hydrogen storage tank |
| DE102007041882B4 (en) * | 2006-09-07 | 2010-09-02 | GM Global Technology Operations, Inc., Detroit | Pressurized gas tank assembly and pressurized hydrogen storage tank for a fuel cell system |
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