DE69921398D1 - Device for controlling the flow of a liquid - Google Patents

Device for controlling the flow of a liquid

Info

Publication number
DE69921398D1
DE69921398D1 DE69921398T DE69921398T DE69921398D1 DE 69921398 D1 DE69921398 D1 DE 69921398D1 DE 69921398 T DE69921398 T DE 69921398T DE 69921398 T DE69921398 T DE 69921398T DE 69921398 D1 DE69921398 D1 DE 69921398D1
Authority
DE
Germany
Prior art keywords
controlling
liquid
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69921398T
Other languages
German (de)
Other versions
DE69921398T2 (en
Inventor
Yamaji Michio
Nariai Toshiro
Morokoshi Hiroshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of DE69921398D1 publication Critical patent/DE69921398D1/en
Application granted granted Critical
Publication of DE69921398T2 publication Critical patent/DE69921398T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B1/00—Installations or systems with accumulators; Supply reservoir or sump assemblies
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y10T137/5283—Units interchangeable between alternate locations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure
DE1999621398 1998-07-10 1999-07-07 Device for controlling the flow of a liquid Expired - Lifetime DE69921398T2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19567298 1998-07-10
JP19567298A JP3921565B2 (en) 1998-07-10 1998-07-10 Fluid control device

Publications (2)

Publication Number Publication Date
DE69921398D1 true DE69921398D1 (en) 2004-12-02
DE69921398T2 DE69921398T2 (en) 2005-10-27

Family

ID=16345085

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1999621398 Expired - Lifetime DE69921398T2 (en) 1998-07-10 1999-07-07 Device for controlling the flow of a liquid

Country Status (9)

Country Link
US (1) US6116283A (en)
EP (1) EP0971277B1 (en)
JP (1) JP3921565B2 (en)
KR (1) KR100570492B1 (en)
CA (1) CA2277337C (en)
DE (1) DE69921398T2 (en)
IL (1) IL130870A (en)
SG (1) SG74149A1 (en)
TW (1) TW432265B (en)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4244254B2 (en) * 1999-04-30 2009-03-25 株式会社キッツエスシーティー Integrated gas control device
DE60106312T2 (en) * 2000-03-10 2005-11-17 Tokyo Electron Ltd. Fluid management device
JP4487135B2 (en) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 Fluid control device
US7334605B2 (en) * 2002-08-27 2008-02-26 Celerity, Inc. Modular substrate gas panel having manifold connections in a common plane
JP2004183771A (en) * 2002-12-03 2004-07-02 Fujikin Inc Fluid control device
JP2004340199A (en) * 2003-05-14 2004-12-02 Fujikin Inc Fluid control device with heater
US7178556B2 (en) * 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system
JP4677805B2 (en) * 2005-03-22 2011-04-27 株式会社フジキン Fluid control device
US7320339B2 (en) * 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
JP5096696B2 (en) * 2006-03-02 2012-12-12 サーパス工業株式会社 Fluid equipment unit structure
JP2007327542A (en) * 2006-06-07 2007-12-20 Surpass Kogyo Kk Fluid apparatus unit structure
US20080029170A1 (en) * 2006-08-02 2008-02-07 O'reilly Edward Three-in-one valve and control system
CN101680561B (en) * 2007-05-31 2011-12-21 东京毅力科创株式会社 Fluid control apparatus
JP5127304B2 (en) * 2007-05-31 2013-01-23 株式会社フジキン Fluid control device
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
JP5340760B2 (en) * 2009-02-12 2013-11-13 倉敷紡績株式会社 Fluid control method and fluid control apparatus
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
CN102804335B (en) * 2009-06-10 2015-10-21 威斯塔德尔特有限责任公司 Limit velocity and/or high temperature fluid send matrix
WO2012151292A2 (en) 2011-05-02 2012-11-08 Advantage Group International Inc. Manifold system for gas and fluid delivery
US9810377B2 (en) * 2012-03-07 2017-11-07 Illinois Tool Works Inc. System and method for improving the accuracy of a rate of decay (ROD) measurement in a mass flow controller
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP1539278S (en) * 2015-03-31 2015-11-30
US10983537B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
TW202117217A (en) 2019-09-19 2021-05-01 美商應用材料股份有限公司 Clean isolation valve for reduced dead volume

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3546275B2 (en) * 1995-06-30 2004-07-21 忠弘 大見 Fluid control device
KR100232112B1 (en) * 1996-01-05 1999-12-01 아마노 시게루 Gas supply unit
JP3355279B2 (en) * 1996-07-10 2002-12-09 シーケーディ株式会社 Gas supply unit
JP4022696B2 (en) * 1996-11-20 2007-12-19 忠弘 大見 Circuit breaker
JP3997337B2 (en) * 1996-11-20 2007-10-24 忠弘 大見 Fluid control device
JPH10220698A (en) * 1996-12-03 1998-08-21 Nippon Aera Kk Fluid control device

Also Published As

Publication number Publication date
EP0971277A2 (en) 2000-01-12
CA2277337A1 (en) 2000-01-10
KR100570492B1 (en) 2006-04-13
IL130870A0 (en) 2001-01-28
IL130870A (en) 2002-11-10
JP2000029535A (en) 2000-01-28
SG74149A1 (en) 2000-07-18
KR20000011592A (en) 2000-02-25
CA2277337C (en) 2005-06-07
EP0971277B1 (en) 2004-10-27
JP3921565B2 (en) 2007-05-30
TW432265B (en) 2001-05-01
EP0971277A3 (en) 2001-01-17
US6116283A (en) 2000-09-12
DE69921398T2 (en) 2005-10-27

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Legal Events

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