DE69912522D1 - Laserkammer mit keramischen Isolatoren, die mit dielektrischem Material beschichtet sind - Google Patents

Laserkammer mit keramischen Isolatoren, die mit dielektrischem Material beschichtet sind

Info

Publication number
DE69912522D1
DE69912522D1 DE69912522T DE69912522T DE69912522D1 DE 69912522 D1 DE69912522 D1 DE 69912522D1 DE 69912522 T DE69912522 T DE 69912522T DE 69912522 T DE69912522 T DE 69912522T DE 69912522 D1 DE69912522 D1 DE 69912522D1
Authority
DE
Germany
Prior art keywords
dielectric material
laser chamber
ceramic insulators
insulators coated
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69912522T
Other languages
English (en)
Other versions
DE69912522T2 (de
Inventor
Toshihiko Ishihara
Richard G Morton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cymer Inc
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer Inc filed Critical Cymer Inc
Application granted granted Critical
Publication of DE69912522D1 publication Critical patent/DE69912522D1/de
Publication of DE69912522T2 publication Critical patent/DE69912522T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/0305—Selection of materials for the tube or the coatings thereon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE69912522T 1998-06-02 1999-06-01 Laserkammer mit keramischen Isolatoren, die mit dielektrischem Material beschichtet sind Expired - Fee Related DE69912522T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US89330 1998-06-02
US09/089,330 US6014397A (en) 1998-06-02 1998-06-02 Laser chamber incorporating ceramic insulators coated with dielectric material

Publications (2)

Publication Number Publication Date
DE69912522D1 true DE69912522D1 (de) 2003-12-11
DE69912522T2 DE69912522T2 (de) 2004-05-13

Family

ID=22217071

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69912522T Expired - Fee Related DE69912522T2 (de) 1998-06-02 1999-06-01 Laserkammer mit keramischen Isolatoren, die mit dielektrischem Material beschichtet sind

Country Status (4)

Country Link
US (1) US6014397A (de)
EP (1) EP0963015B1 (de)
JP (1) JP2000040846A (de)
DE (1) DE69912522T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6847671B1 (en) 2000-03-29 2005-01-25 Lambda Physik Ag Blower for gas laser
WO2007096485A2 (en) * 2006-02-23 2007-08-30 Picodeon Ltd Oy Coating on a metal substrate and a coated metal product
WO2018232495A1 (en) * 2017-06-20 2018-12-27 General Fusion Inc. ELECTRIC INSULATION COMPATIBLE WITH THE EMPTY

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CS245210B1 (en) * 1983-05-10 1986-09-18 Radomir Kuzel Mixture for preparation of protective and insulation coatings on metals
US4959840A (en) * 1988-01-15 1990-09-25 Cymer Laser Technologies Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser
US5018161A (en) * 1988-01-15 1991-05-21 Cymer Laser Technologies Compact excimer laser
JPH04163978A (ja) * 1990-10-29 1992-06-09 Mitsubishi Electric Corp エキシマレーザ装置
US5200970A (en) * 1990-12-03 1993-04-06 Summit Technology, Inc. Methods and compositions for protecting laser excitation gases from contamination
JP2733394B2 (ja) * 1991-09-13 1998-03-30 三菱電機株式会社 エキシマレーザ装置
JP2987242B2 (ja) * 1991-09-13 1999-12-06 株式会社小松製作所 フッ素系エキシマレーザ装置
US5771258A (en) * 1997-02-11 1998-06-23 Cymer, Inc. Aerodynamic chamber design for high pulse repetition rate excimer lasers

Also Published As

Publication number Publication date
DE69912522T2 (de) 2004-05-13
JP2000040846A (ja) 2000-02-08
EP0963015A3 (de) 2001-03-14
EP0963015B1 (de) 2003-11-05
EP0963015A2 (de) 1999-12-08
US6014397A (en) 2000-01-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee