DE69908620D1 - MULTIDIMENSIONAL PROCESS AND SYSTEM FOR STATISTICAL PROCESS CONTROL - Google Patents

MULTIDIMENSIONAL PROCESS AND SYSTEM FOR STATISTICAL PROCESS CONTROL

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Publication number
DE69908620D1
DE69908620D1 DE69908620T DE69908620T DE69908620D1 DE 69908620 D1 DE69908620 D1 DE 69908620D1 DE 69908620 T DE69908620 T DE 69908620T DE 69908620 T DE69908620 T DE 69908620T DE 69908620 D1 DE69908620 D1 DE 69908620D1
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DE
Germany
Prior art keywords
control
observation
multidimensional
values
observation points
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69908620T
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German (de)
Other versions
DE69908620T2 (en
Inventor
De Micheaux Daniel Lafaye
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Individual
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Individual
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Publication of DE69908620T2 publication Critical patent/DE69908620T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling

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  • Engineering & Computer Science (AREA)
  • Business, Economics & Management (AREA)
  • Human Resources & Organizations (AREA)
  • Economics (AREA)
  • Strategic Management (AREA)
  • Entrepreneurship & Innovation (AREA)
  • Operations Research (AREA)
  • Physics & Mathematics (AREA)
  • Educational Administration (AREA)
  • Marketing (AREA)
  • Development Economics (AREA)
  • Quality & Reliability (AREA)
  • Tourism & Hospitality (AREA)
  • Game Theory and Decision Science (AREA)
  • General Business, Economics & Management (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Feedback Control In General (AREA)
  • Complex Calculations (AREA)
  • General Factory Administration (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)

Abstract

The present invention relates to a method and to any system using such a method for performing statistical process control on the basis of taking indicators or measurements on the inputs, the outputs, and the control and operating parameters of said process, and which can be represented by observation points in frames of reference associating their values to their sampling indices. In the invention, the observed values are transformed so that the resulting values are compatible with the multidimensional Gaussian distribution model; said transformed observation points are situated in a multidimensional space, each dimension being associated with a measured magnitude; the out-of-control observation points situated in this way and concentrated in a particular direction are identified; and said direction is associated with a common cause for drift in said process, and each observation-and-anomaly pair is associated with indicators in order to propose zero, one, or more causes of anomaly that might relate to the observation made.
DE69908620T 1998-09-22 1999-09-22 MULTIDIMENSIONAL PROCESS AND SYSTEM FOR STATISTICAL PROCESS CONTROL Expired - Lifetime DE69908620T2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR9812113 1998-09-22
FR9812113A FR2783620B1 (en) 1998-09-22 1998-09-22 MULTIDIMENSIONAL PROCESS AND SYSTEM FOR STATISTICAL PROCESS CONTROL
PCT/FR1999/002254 WO2000017790A1 (en) 1998-09-22 1999-09-22 Method and multidimensional system for statistical process control

Publications (2)

Publication Number Publication Date
DE69908620D1 true DE69908620D1 (en) 2003-07-10
DE69908620T2 DE69908620T2 (en) 2004-04-29

Family

ID=9530930

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69908620T Expired - Lifetime DE69908620T2 (en) 1998-09-22 1999-09-22 MULTIDIMENSIONAL PROCESS AND SYSTEM FOR STATISTICAL PROCESS CONTROL

Country Status (12)

Country Link
US (1) US6804563B1 (en)
EP (1) EP1116150B1 (en)
JP (1) JP4394286B2 (en)
CN (1) CN100489870C (en)
AT (1) ATE242513T1 (en)
AU (1) AU5866999A (en)
CA (1) CA2391716A1 (en)
DE (1) DE69908620T2 (en)
ES (1) ES2201771T3 (en)
FR (1) FR2783620B1 (en)
HK (1) HK1039668A1 (en)
WO (1) WO2000017790A1 (en)

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DE10151250A1 (en) * 2001-10-17 2003-05-08 Bayer Ag Process for determining a complex correlation pattern from process and plant data
US7043403B1 (en) * 2002-09-04 2006-05-09 Advanced Micro Devices, Inc. Fault detection and classification based on calculating distances between data points
FI20030622A (en) * 2003-04-24 2004-10-25 Tietoenator Oyj Analysis of network service operations
WO2004105101A2 (en) * 2003-05-16 2004-12-02 Tokyo Electron Limited A process system health index and method of using the same
EP1673744B1 (en) * 2003-09-05 2010-01-27 Sensitech Inc. Automatic conditioning of data accumulated by sensors monitoring supply chain processes
US7369913B2 (en) * 2004-04-02 2008-05-06 Siemens Medical Solutions Usa, Inc. Recipe editor and controller
DE102004052302B4 (en) * 2004-09-30 2013-05-23 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Method for outputting measured values and display device
JP4399400B2 (en) * 2005-07-11 2010-01-13 株式会社日立ハイテクノロジーズ Inspection data analysis system and inspection data analysis program
KR100679721B1 (en) * 2005-11-01 2007-02-06 (주)아이세미콘 The statistic analysis of fault detection and classification in semiconductor manufacturing
PL2097794T5 (en) * 2006-11-03 2018-01-31 Air Prod & Chem System and method for process monitoring
US7494893B1 (en) 2007-01-17 2009-02-24 Pdf Solutions, Inc. Identifying yield-relevant process parameters in integrated circuit device fabrication processes
US20080312875A1 (en) * 2007-06-12 2008-12-18 Yu Guanyuan M Monitoring and control of integrated circuit device fabrication processes
CN101251754B (en) * 2008-03-13 2010-06-02 西安交通大学 Processing and controlling method of multi-working procedure processing course error stream
US8090676B2 (en) * 2008-09-11 2012-01-03 Honeywell International Inc. Systems and methods for real time classification and performance monitoring of batch processes
JP5048625B2 (en) * 2008-10-09 2012-10-17 株式会社日立製作所 Anomaly detection method and system
FR2939928B1 (en) * 2008-12-15 2012-08-03 Snecma STANDARDIZATION OF DATA USED FOR MONITORING AN AIRCRAFT ENGINE
US8392009B2 (en) * 2009-03-31 2013-03-05 Taiwan Semiconductor Manufacturing Company, Ltd. Advanced process control with novel sampling policy
US8525830B2 (en) * 2010-09-17 2013-09-03 The Boeing Company Point cloud generation system
EP2447889A1 (en) * 2010-10-29 2012-05-02 Siemens Aktiengesellschaft Method for modeling a defect management in a manufacturing process and for handling the defect during the production process based on said modeled defect management
ES2424808B1 (en) * 2011-01-25 2014-08-05 Mondragón Goi Eskola Politeknikoa José María Arizmendiarrieta, S. Coop. Method to detect and identify errors in manufacturing processes
BR112014002164A2 (en) 2011-08-04 2017-02-21 Huntsman Advanced Mat (Switzerland) Gmbh reactive dye mixtures and their use
CN103488135B (en) * 2013-08-14 2015-11-04 沈阳中科博微自动化技术有限公司 A kind of statistical process control method for semiconductor production machining process monitoring
US9070622B2 (en) * 2013-09-13 2015-06-30 Taiwan Semiconductor Manufacturing Company, Ltd. Systems and methods for similarity-based semiconductor process control
CN103935120A (en) * 2014-03-25 2014-07-23 中山火炬职业技术学院 Method for setting quality control parameter standards for printing enterprises
BR102014015604A2 (en) 2014-06-24 2015-03-31 Gisele Castro Fontanella Pileggi Universal rheological and mechanical testing machine
US10089589B2 (en) * 2015-01-30 2018-10-02 Sap Se Intelligent threshold editor
EP3151072B1 (en) * 2015-09-29 2020-07-29 Siemens Aktiengesellschaft Method and system for error detection and monitoring in an electronically controlled or regulated machine part
DE102016225081A1 (en) * 2016-12-15 2018-06-21 Robert Bosch Gmbh Apparatus and method for determining the pinpoint capability of possible errors of one or more components
EP3611579A1 (en) * 2018-08-13 2020-02-19 Siemens Aktiengesellschaft Real time automation device with a real-time data bus

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JPH0660826B2 (en) * 1989-02-07 1994-08-10 動力炉・核燃料開発事業団 Plant abnormality diagnosis method
US5150289A (en) * 1990-07-30 1992-09-22 The Foxboro Company Method and apparatus for process control
US5442562A (en) * 1993-12-10 1995-08-15 Eastman Kodak Company Method of controlling a manufacturing process using multivariate analysis
US6539267B1 (en) * 1996-03-28 2003-03-25 Rosemount Inc. Device in a process system for determining statistical parameter
US6442445B1 (en) * 1999-03-19 2002-08-27 International Business Machines Corporation, User configurable multivariate time series reduction tool control method
US6424876B1 (en) * 1999-07-22 2002-07-23 Advanced Micro Devices, Inc. Statistical process control system with normalized control charting

Also Published As

Publication number Publication date
ATE242513T1 (en) 2003-06-15
HK1039668A1 (en) 2002-05-03
AU5866999A (en) 2000-04-10
CA2391716A1 (en) 2000-03-30
WO2000017790A1 (en) 2000-03-30
CN1319212A (en) 2001-10-24
CN100489870C (en) 2009-05-20
US6804563B1 (en) 2004-10-12
JP4394286B2 (en) 2010-01-06
FR2783620B1 (en) 2002-03-29
JP2002525757A (en) 2002-08-13
FR2783620A1 (en) 2000-03-24
EP1116150A1 (en) 2001-07-18
ES2201771T3 (en) 2004-03-16
EP1116150B1 (en) 2003-06-04
DE69908620T2 (en) 2004-04-29

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