DE69902967D1 - Präzisionsreplikation mittels chemischer Dampfphasenabscheidung - Google Patents

Präzisionsreplikation mittels chemischer Dampfphasenabscheidung

Info

Publication number
DE69902967D1
DE69902967D1 DE69902967T DE69902967T DE69902967D1 DE 69902967 D1 DE69902967 D1 DE 69902967D1 DE 69902967 T DE69902967 T DE 69902967T DE 69902967 T DE69902967 T DE 69902967T DE 69902967 D1 DE69902967 D1 DE 69902967D1
Authority
DE
Germany
Prior art keywords
vapor deposition
chemical vapor
precision replication
replication
precision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69902967T
Other languages
English (en)
Other versions
DE69902967T2 (de
Inventor
Jitendra Singh Goela
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CVD Inc
Original Assignee
CVD Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CVD Inc filed Critical CVD Inc
Application granted granted Critical
Publication of DE69902967D1 publication Critical patent/DE69902967D1/de
Publication of DE69902967T2 publication Critical patent/DE69902967T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
DE69902967T 1998-05-05 1999-04-29 Präzisionsreplikation mittels chemischer Dampfphasenabscheidung Expired - Lifetime DE69902967T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/072,957 US6042758A (en) 1998-05-05 1998-05-05 Precision replication by chemical vapor deposition

Publications (2)

Publication Number Publication Date
DE69902967D1 true DE69902967D1 (de) 2002-10-24
DE69902967T2 DE69902967T2 (de) 2003-05-28

Family

ID=22110809

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69902967T Expired - Lifetime DE69902967T2 (de) 1998-05-05 1999-04-29 Präzisionsreplikation mittels chemischer Dampfphasenabscheidung

Country Status (5)

Country Link
US (1) US6042758A (de)
EP (1) EP0955392B1 (de)
JP (1) JP4615644B2 (de)
DE (1) DE69902967T2 (de)
IL (1) IL129750A (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6641767B2 (en) * 2000-03-10 2003-11-04 3M Innovative Properties Company Methods for replication, replicated articles, and replication tools
US6616870B1 (en) 2000-08-07 2003-09-09 Shipley Company, L.L.C. Method of producing high aspect ratio domes by vapor deposition
US8114505B2 (en) * 2003-12-05 2012-02-14 Morgan Advanced Ceramics, Inc. Free-standing silicon carbide articles formed by chemical vapor deposition and methods for their manufacture
US20050123713A1 (en) * 2003-12-05 2005-06-09 Forrest David T. Articles formed by chemical vapor deposition and methods for their manufacture
US20060250672A1 (en) * 2005-05-06 2006-11-09 Ealey Mark A Agile mandrel apparatus and method
IL220677A (en) 2011-06-30 2017-02-28 Rohm & Haas Elect Mat Transparent conductive items

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54113610A (en) * 1978-02-25 1979-09-05 Nippon Carbon Co Ltd Production of heat decomposed metal carbide formed body
US4332751A (en) * 1980-03-13 1982-06-01 The United States Of America As Represented By The United States Department Of Energy Method for fabricating thin films of pyrolytic carbon
US4978577A (en) * 1989-04-12 1990-12-18 Cvd Incorporated Method for preparing laminates of ZnSe and ZnS
US4963393A (en) * 1989-09-07 1990-10-16 Cvd Incorporated Method to prevent backside growth on substrates in a vapor deposition system
US5071596A (en) * 1989-10-23 1991-12-10 Cvd Incorporated Fabrication of lightweight ceramic mirrors by means of a chemical vapor deposition process
US4997678A (en) * 1989-10-23 1991-03-05 Cvd Incorporated Chemical vapor deposition process to replicate the finish and figure of preshaped structures
US4990374A (en) * 1989-11-28 1991-02-05 Cvd Incorporated Selective area chemical vapor deposition
US5264071A (en) * 1990-06-13 1993-11-23 General Electric Company Free standing diamond sheet and method and apparatus for making same
GB2250029A (en) * 1990-11-23 1992-05-27 Marconi Gec Ltd Perovskite lead scandium tantalate film
US5183689A (en) * 1991-07-15 1993-02-02 Cvd, Inc. Process for an improved laminated of znse and zns
US5175929A (en) * 1992-03-04 1993-01-05 General Electric Company Method for producing articles by chemical vapor deposition
US5314652A (en) * 1992-11-10 1994-05-24 Norton Company Method for making free-standing diamond film
US5453233A (en) * 1993-04-05 1995-09-26 Cvd, Inc. Method of producing domes of ZNS and ZNSE via a chemical vapor deposition technique
CA2120175A1 (en) * 1993-04-29 1994-10-30 Louis K. Bigelow Method for making a diamond coated structure
AU699028B2 (en) * 1995-10-05 1998-11-19 Raytheon Company Durable visible/laser/medium wave infrared composite window

Also Published As

Publication number Publication date
EP0955392A1 (de) 1999-11-10
JPH11335840A (ja) 1999-12-07
DE69902967T2 (de) 2003-05-28
EP0955392B1 (de) 2002-09-18
US6042758A (en) 2000-03-28
IL129750A (en) 2003-06-24
IL129750A0 (en) 2000-02-29
JP4615644B2 (ja) 2011-01-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: MUELLER-BORE & PARTNER, PATENTANWAELTE, EUROPEAN PAT