DE69901020T2 - Schwingspiegel mit elektrostatischem Antrieb - Google Patents

Schwingspiegel mit elektrostatischem Antrieb

Info

Publication number
DE69901020T2
DE69901020T2 DE1999601020 DE69901020T DE69901020T2 DE 69901020 T2 DE69901020 T2 DE 69901020T2 DE 1999601020 DE1999601020 DE 1999601020 DE 69901020 T DE69901020 T DE 69901020T DE 69901020 T2 DE69901020 T2 DE 69901020T2
Authority
DE
Germany
Prior art keywords
vibration mirror
electrostatic drive
electrostatic
mirror
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1999601020
Other languages
English (en)
Other versions
DE69901020D1 (de
Inventor
Marco Pizzi
Valerian Koniachkine
Vito Lambertini
Daniele Pullini
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centro Ricerche Fiat SCpA
Original Assignee
Centro Ricerche Fiat SCpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centro Ricerche Fiat SCpA filed Critical Centro Ricerche Fiat SCpA
Publication of DE69901020D1 publication Critical patent/DE69901020D1/de
Application granted granted Critical
Publication of DE69901020T2 publication Critical patent/DE69901020T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Gyroscopes (AREA)
DE1999601020 1999-02-02 1999-11-25 Schwingspiegel mit elektrostatischem Antrieb Expired - Lifetime DE69901020T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO990069 IT1307128B1 (it) 1999-02-02 1999-02-02 Dispositivo di specchio oscillante a controllo elettrostatico.

Publications (2)

Publication Number Publication Date
DE69901020D1 DE69901020D1 (de) 2002-04-18
DE69901020T2 true DE69901020T2 (de) 2002-07-18

Family

ID=11417405

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1999601020 Expired - Lifetime DE69901020T2 (de) 1999-02-02 1999-11-25 Schwingspiegel mit elektrostatischem Antrieb

Country Status (3)

Country Link
EP (1) EP1026536B1 (de)
DE (1) DE69901020T2 (de)
IT (1) IT1307128B1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20020669A1 (it) 2002-07-26 2004-01-26 Fiat Ricerche Spettrofotometro con otturatore a film elettrostatico

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3553364A (en) * 1968-03-15 1971-01-05 Texas Instruments Inc Electromechanical light valve
FR2386898A2 (fr) * 1977-04-05 1978-11-03 Anvar Perfectionnements aux dispositifs de commande du genre des relais
NL8403536A (nl) * 1984-11-21 1986-06-16 Philips Nv Passieve weergeefinrichting.
US5223971A (en) * 1991-12-31 1993-06-29 Texas Instruments Incorporated Light beam steering with deformable membrane device
GB9309327D0 (en) * 1993-05-06 1993-06-23 Smith Charles G Bi-stable memory element
US5774252A (en) * 1994-01-07 1998-06-30 Texas Instruments Incorporated Membrane device with recessed electrodes and method of making

Also Published As

Publication number Publication date
DE69901020D1 (de) 2002-04-18
ITTO990069A1 (it) 2000-08-02
IT1307128B1 (it) 2001-10-29
EP1026536B1 (de) 2002-03-13
EP1026536A1 (de) 2000-08-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition