DE69817962D1 - Differential-hitzedraht-näherungsmesser - Google Patents

Differential-hitzedraht-näherungsmesser

Info

Publication number
DE69817962D1
DE69817962D1 DE69817962T DE69817962T DE69817962D1 DE 69817962 D1 DE69817962 D1 DE 69817962D1 DE 69817962 T DE69817962 T DE 69817962T DE 69817962 T DE69817962 T DE 69817962T DE 69817962 D1 DE69817962 D1 DE 69817962D1
Authority
DE
Germany
Prior art keywords
knife
heat wire
differential heat
wire proximity
proximity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69817962T
Other languages
English (en)
Other versions
DE69817962T2 (de
Inventor
N Thomas
Mirro, Jr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of DE69817962D1 publication Critical patent/DE69817962D1/de
Application granted granted Critical
Publication of DE69817962T2 publication Critical patent/DE69817962T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/12—Measuring arrangements characterised by the use of fluids for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/02—Measuring arrangements characterised by the use of fluids for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Volume Flow (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
DE69817962T 1997-04-25 1998-04-10 Differential-hitzedraht-näherungsmesser Expired - Fee Related DE69817962T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US84558797A 1997-04-25 1997-04-25
US845587 1997-04-25
PCT/US1998/006872 WO1998049523A1 (en) 1997-04-25 1998-04-10 Differential hot wire air gauge

Publications (2)

Publication Number Publication Date
DE69817962D1 true DE69817962D1 (de) 2003-10-16
DE69817962T2 DE69817962T2 (de) 2004-05-19

Family

ID=25295573

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69817962T Expired - Fee Related DE69817962T2 (de) 1997-04-25 1998-04-10 Differential-hitzedraht-näherungsmesser

Country Status (6)

Country Link
EP (1) EP0907876B1 (de)
JP (1) JP2000514926A (de)
KR (1) KR20000022197A (de)
CA (1) CA2259006A1 (de)
DE (1) DE69817962T2 (de)
WO (1) WO1998049523A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010005372A1 (de) * 2010-01-22 2011-07-28 IQ 2 Patentverwaltung UG (haftungsbeschränkt), 72654 Verfahren zur Messung der relativen Position zweier Bauteile
ITBO20130024A1 (it) * 2013-01-21 2014-07-22 Medica S P A Flussimetro differenziale per la misura del calo ponderale in trattamenti di emodialisi

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2649040B2 (de) * 1976-10-28 1979-12-20 Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler, 6000 Frankfurt Konstant-Temperatur-Anemometer
US4142401A (en) * 1977-10-03 1979-03-06 Wilson Gardner P Gage
DE3029905A1 (de) * 1980-08-07 1982-03-11 Stumpp + Kurz Gmbh + Co, 7000 Stuttgart Lecksuchgeraet

Also Published As

Publication number Publication date
EP0907876A1 (de) 1999-04-14
WO1998049523A1 (en) 1998-11-05
EP0907876B1 (de) 2003-09-10
JP2000514926A (ja) 2000-11-07
CA2259006A1 (en) 1998-11-05
KR20000022197A (ko) 2000-04-25
DE69817962T2 (de) 2004-05-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee