DE69812305D1 - Getter system for treatment atmosphere cleaning in physical vapor deposition processes - Google Patents

Getter system for treatment atmosphere cleaning in physical vapor deposition processes

Info

Publication number
DE69812305D1
DE69812305D1 DE69812305T DE69812305T DE69812305D1 DE 69812305 D1 DE69812305 D1 DE 69812305D1 DE 69812305 T DE69812305 T DE 69812305T DE 69812305 T DE69812305 T DE 69812305T DE 69812305 D1 DE69812305 D1 DE 69812305D1
Authority
DE
Germany
Prior art keywords
vapor deposition
physical vapor
deposition processes
treatment atmosphere
getter system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69812305T
Other languages
German (de)
Other versions
DE69812305T2 (en
Inventor
Andrea Conte
Francesco Mazza
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Original Assignee
SAES Getters SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from IT97MI002862A external-priority patent/IT1297013B1/en
Application filed by SAES Getters SpA filed Critical SAES Getters SpA
Publication of DE69812305D1 publication Critical patent/DE69812305D1/en
Application granted granted Critical
Publication of DE69812305T2 publication Critical patent/DE69812305T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/183—Composition or manufacture of getters
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3488—Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus
DE69812305T 1997-12-23 1998-12-09 Getter system for treatment atmosphere cleaning in physical vapor deposition processes Expired - Lifetime DE69812305T2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT97MI002862A IT1297013B1 (en) 1997-12-23 1997-12-23 GETTER SYSTEM FOR THE PURIFICATION OF THE WORKING ATMOSPHERE IN PHYSICAL STEAM DEPOSITION PROCESSES
ITMI972862 1997-12-23

Publications (2)

Publication Number Publication Date
DE69812305D1 true DE69812305D1 (en) 2003-04-24
DE69812305T2 DE69812305T2 (en) 2004-02-12

Family

ID=11378444

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69812305T Expired - Lifetime DE69812305T2 (en) 1997-12-23 1998-12-09 Getter system for treatment atmosphere cleaning in physical vapor deposition processes

Country Status (4)

Country Link
KR (1) KR100523955B1 (en)
CA (1) CA2254515A1 (en)
DE (1) DE69812305T2 (en)
RU (1) RU2211882C2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090131453A (en) * 2008-06-18 2009-12-29 주식회사 엔씰텍 Sputtering device and multi chamber using the same
EP2360289A1 (en) * 2010-02-23 2011-08-24 Saint-Gobain Glass France Device and method for deposing a layer composed of at least two components on a substrate
RU2651174C1 (en) * 2016-11-24 2018-04-18 федеральное государственное автономное образовательное учреждение высшего образования "Московский физико-технический институт (государственный университет)" Zeolite-based composite getter material and method of its production

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1019731B (en) * 1974-07-19 1977-11-30 Getters Spa GETTER DEVICE EQUIPPED WITH A PERFECTED DEFLECTOR
IT1240631B (en) * 1990-04-20 1993-12-17 Getters Spa Compound and getter device for atmosphere purification and control by reducing the hydrogen and the related preparation process
KR950023425A (en) * 1994-01-25 1995-08-18 기승철 Golf ball
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method

Also Published As

Publication number Publication date
CA2254515A1 (en) 1999-06-23
RU2211882C2 (en) 2003-09-10
KR100523955B1 (en) 2006-01-12
KR19990063303A (en) 1999-07-26
DE69812305T2 (en) 2004-02-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition