DE69811099T2 - Beugungsoptisches element und verfahren zu dessen herstellung - Google Patents

Beugungsoptisches element und verfahren zu dessen herstellung Download PDF

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Publication number
DE69811099T2
DE69811099T2 DE69811099T DE69811099T DE69811099T2 DE 69811099 T2 DE69811099 T2 DE 69811099T2 DE 69811099 T DE69811099 T DE 69811099T DE 69811099 T DE69811099 T DE 69811099T DE 69811099 T2 DE69811099 T2 DE 69811099T2
Authority
DE
Germany
Prior art keywords
optical element
diffraction
manufacture
diffractive optical
provides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69811099T
Other languages
English (en)
Other versions
DE69811099D1 (de
Inventor
Yoel Arieli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Icos Vision Systems NV
Original Assignee
NANO-OR TECHNOLOGIES (ISRAEL) Ltd LOD
NANO OR TECHNOLOGIES ISRAEL LT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NANO-OR TECHNOLOGIES (ISRAEL) Ltd LOD, NANO OR TECHNOLOGIES ISRAEL LT filed Critical NANO-OR TECHNOLOGIES (ISRAEL) Ltd LOD
Publication of DE69811099D1 publication Critical patent/DE69811099D1/de
Application granted granted Critical
Publication of DE69811099T2 publication Critical patent/DE69811099T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Lenses (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Holo Graphy (AREA)
DE69811099T 1997-10-07 1998-10-04 Beugungsoptisches element und verfahren zu dessen herstellung Expired - Lifetime DE69811099T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IL12191297A IL121912A (en) 1997-10-07 1997-10-07 A chromatic diffractive optical component
PCT/IL1998/000485 WO1999018458A1 (en) 1997-10-07 1998-10-04 A diffractive optical element and a method for producing same

Publications (2)

Publication Number Publication Date
DE69811099D1 DE69811099D1 (de) 2003-03-06
DE69811099T2 true DE69811099T2 (de) 2004-01-15

Family

ID=11070718

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69811099T Expired - Lifetime DE69811099T2 (de) 1997-10-07 1998-10-04 Beugungsoptisches element und verfahren zu dessen herstellung

Country Status (7)

Country Link
US (1) US6707608B1 (de)
EP (1) EP1019760B1 (de)
AT (1) ATE231980T1 (de)
AU (1) AU9457098A (de)
DE (1) DE69811099T2 (de)
IL (1) IL121912A (de)
WO (1) WO1999018458A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020097660A1 (en) * 2000-11-16 2002-07-25 Matsushita Electric Industrial Co., Ltd. Diffraction grating body, optical pick-up, semiconductor laser apparatus and optical information apparatus
JP2004288336A (ja) * 2003-03-25 2004-10-14 Hitachi Ltd 光ヘッド
US7203001B2 (en) * 2003-12-19 2007-04-10 Nanoopto Corporation Optical retarders and related devices and systems
US7670758B2 (en) 2004-04-15 2010-03-02 Api Nanofabrication And Research Corporation Optical films and methods of making the same
US20050275944A1 (en) 2004-06-11 2005-12-15 Wang Jian J Optical films and methods of making the same
US20060001969A1 (en) * 2004-07-02 2006-01-05 Nanoopto Corporation Gratings, related optical devices and systems, and methods of making such gratings
US7408724B2 (en) * 2004-09-27 2008-08-05 Tessera North America, Inc. Optical systems including a chromatic diffractive optical element corrector and associated methods
US7619816B2 (en) 2004-12-15 2009-11-17 Api Nanofabrication And Research Corp. Structures for polarization and beam control
US7262914B2 (en) * 2005-07-22 2007-08-28 Stuart Gary Mirell Method and apparatus for generating and detecting duality modulated electromagnetic radiation
JP4086082B2 (ja) * 2005-10-28 2008-05-14 三菱電機株式会社 回折光学素子、及び光ヘッド装置
US7969654B1 (en) * 2006-10-24 2011-06-28 Purdue Research Foundation Volume Fresnel zone plates fabricated by laser direct writing
FR2915811B1 (fr) 2007-05-04 2009-07-10 Saint Gobain Reseau diffusant la lumiere
US8049963B2 (en) * 2008-10-17 2011-11-01 Massachusetts Institute Of Technology Multiple-wavelength binary diffractive lenses
WO2011129814A1 (en) * 2010-04-13 2011-10-20 Hewlett-Packard Development Company, L.P. Controlling phase response in a sub-wavelength grating optical device
US8953239B2 (en) 2012-09-05 2015-02-10 University Of Utah Research Foundation Nanophotonic scattering structure
US10002275B2 (en) 2013-07-08 2018-06-19 Ramot At Tel-Aviv University Ltd. Optical element having two phase masks
US9885671B2 (en) 2014-06-09 2018-02-06 Kla-Tencor Corporation Miniaturized imaging apparatus for wafer edge
US9645097B2 (en) 2014-06-20 2017-05-09 Kla-Tencor Corporation In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
US10871601B2 (en) 2016-10-03 2020-12-22 Tipd, Llc Volume holographic optical elements for imaging with reduced aberrations
EP3701295A1 (de) * 2017-10-27 2020-09-02 3M Innovative Properties Company Gemusterte optische retarder und verfahren zur herstellung davon
US12066592B2 (en) * 2020-02-28 2024-08-20 Samsung Electronics Co., Ltd. Meta-optical device and electronic apparatus including the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4210391A (en) * 1977-09-14 1980-07-01 Cohen Allen L Multifocal zone plate
US4245882A (en) * 1977-11-04 1981-01-20 Environmental Research Institute Of Michigan Doubly modulated on-axis thick hologram optical element
US5300190A (en) * 1987-06-24 1994-04-05 Mitsubishi Denki Kabushiki Kaisha Process of producing diffraction grating
US5071207A (en) * 1990-09-25 1991-12-10 The United States Of America As Represented By The United States Department Of Energy Broadband diffractive lens or imaging element
US5606434A (en) 1994-06-30 1997-02-25 University Of North Carolina Achromatic optical system including diffractive optical element
US5446588A (en) * 1994-07-29 1995-08-29 The University Of Rochester Wide-angle eyepiece optical system employing refractive and diffractive optical elements
US5847877A (en) * 1994-09-12 1998-12-08 Olympus Optical Co., Ltd. Diffractive optical element
US6157488A (en) * 1995-08-29 2000-12-05 Olympus Optical Company Ltd. Diffractive optical element

Also Published As

Publication number Publication date
EP1019760A1 (de) 2000-07-19
WO1999018458A1 (en) 1999-04-15
DE69811099D1 (de) 2003-03-06
IL121912A0 (en) 1998-03-10
US6707608B1 (en) 2004-03-16
EP1019760B1 (de) 2003-01-29
ATE231980T1 (de) 2003-02-15
AU9457098A (en) 1999-04-27
IL121912A (en) 2004-05-12

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: ICOS VISION SYSTEMS N.V., HEVERLEE, BE

8364 No opposition during term of opposition