DE69739773D1 - Kontaktstruktur - Google Patents

Kontaktstruktur

Info

Publication number
DE69739773D1
DE69739773D1 DE69739773T DE69739773T DE69739773D1 DE 69739773 D1 DE69739773 D1 DE 69739773D1 DE 69739773 T DE69739773 T DE 69739773T DE 69739773 T DE69739773 T DE 69739773T DE 69739773 D1 DE69739773 D1 DE 69739773D1
Authority
DE
Germany
Prior art keywords
contact structure
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69739773T
Other languages
English (en)
Inventor
Igor Y Khandros
David V Pedersen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FormFactor Inc
Original Assignee
FormFactor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US1996/008107 external-priority patent/WO1996037332A1/en
Priority claimed from US08/784,862 external-priority patent/US6064213A/en
Priority claimed from US08/852,152 external-priority patent/US6184053B1/en
Application filed by FormFactor Inc filed Critical FormFactor Inc
Application granted granted Critical
Publication of DE69739773D1 publication Critical patent/DE69739773D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE69739773T 1996-05-17 1997-05-15 Kontaktstruktur Expired - Lifetime DE69739773D1 (de)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
US518996P 1996-05-17 1996-05-17
PCT/US1996/008107 WO1996037332A1 (en) 1995-05-26 1996-05-24 Fabricating interconnects and tips using sacrificial substrates
US2086996P 1996-06-27 1996-06-27
US2440596P 1996-08-22 1996-08-22
US2455596P 1996-08-26 1996-08-26
US3069796P 1996-11-13 1996-11-13
US3266696P 1996-12-13 1996-12-13
US3405396P 1996-12-31 1996-12-31
US08/784,862 US6064213A (en) 1993-11-16 1997-01-15 Wafer-level burn-in and test
US08/852,152 US6184053B1 (en) 1993-11-16 1997-05-06 Method of making microelectronic spring contact elements

Publications (1)

Publication Number Publication Date
DE69739773D1 true DE69739773D1 (de) 2010-04-01

Family

ID=41720119

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69739773T Expired - Lifetime DE69739773D1 (de) 1996-05-17 1997-05-15 Kontaktstruktur

Country Status (1)

Country Link
DE (1) DE69739773D1 (de)

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition