DE69738136D1 - Reagenzzuführbehälter for cvd - Google Patents

Reagenzzuführbehälter for cvd

Info

Publication number
DE69738136D1
DE69738136D1 DE1997638136 DE69738136A DE69738136D1 DE 69738136 D1 DE69738136 D1 DE 69738136D1 DE 1997638136 DE1997638136 DE 1997638136 DE 69738136 A DE69738136 A DE 69738136A DE 69738136 D1 DE69738136 D1 DE 69738136D1
Authority
DE
Germany
Prior art keywords
reagenzzuführbehälter
cvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1997638136
Other languages
German (de)
Other versions
DE69738136T2 (en
Inventor
Fred Bouchard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Technology Materials Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US3386596P priority Critical
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Priority to PCT/US1997/023304 priority patent/WO1998027247A1/en
Application granted granted Critical
Publication of DE69738136D1 publication Critical patent/DE69738136D1/en
Anticipated expiration legal-status Critical
Application status is Expired - Lifetime legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B67OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67DDISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00Feed or outlet devices; Feed or outlet control devices
    • B01J4/008Feed or outlet control devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B67OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67DDISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/06Details or accessories
    • B67D7/32Arrangements of safety or warning devices; Means for preventing unauthorised delivery of liquid
    • B67D7/3245Arrangements of safety or warning devices; Means for preventing unauthorised delivery of liquid relating to the transfer method
    • B67D7/3263Arrangements of safety or warning devices; Means for preventing unauthorised delivery of liquid relating to the transfer method using a pressurised gas acting directly or indirectly on the bulk of the liquid to be transferred
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • C23C16/4482Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material by bubbling of carrier gas through liquid source material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52Controlling or regulating the coating process
DE1997638136 1996-12-17 1997-12-17 Reagenzzuführbehälter for cvd Expired - Lifetime DE69738136D1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US3386596P true 1996-12-17 1996-12-17
PCT/US1997/023304 WO1998027247A1 (en) 1996-12-17 1997-12-17 Reagent supply vessel for chemical vapor deposition

Publications (1)

Publication Number Publication Date
DE69738136D1 true DE69738136D1 (en) 2007-10-25

Family

ID=21872903

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1997638136 Expired - Lifetime DE69738136D1 (en) 1996-12-17 1997-12-17 Reagenzzuführbehälter for cvd
DE1997638136 Expired - Lifetime DE69738136T2 (en) 1996-12-17 1997-12-17 Reagenzzuführbehälter for cvd

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE1997638136 Expired - Lifetime DE69738136T2 (en) 1996-12-17 1997-12-17 Reagenzzuführbehälter for cvd

Country Status (6)

Country Link
US (1) US6077356A (en)
EP (1) EP0953064B1 (en)
JP (1) JP3474201B2 (en)
KR (1) KR100364115B1 (en)
DE (2) DE69738136D1 (en)
WO (1) WO1998027247A1 (en)

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US7012292B1 (en) * 1998-11-25 2006-03-14 Advanced Technology Materials, Inc Oxidative top electrode deposition process, and microelectronic device structure
US6257446B1 (en) * 1999-02-18 2001-07-10 Advanced Micro Devices, Inc. Liquid chemical container with integrated fluid reservoir
GB9929279D0 (en) * 1999-12-11 2000-02-02 Epichem Ltd An improved method of and apparatus for the delivery of precursors in the vapour phase to a plurality of epitaxial reactor sites
US6526824B2 (en) * 2001-06-07 2003-03-04 Air Products And Chemicals, Inc. High purity chemical container with external level sensor and liquid sump
US6431229B1 (en) 2001-08-24 2002-08-13 Air Products And Chemicals, Inc. Solventless purgeable diaphragm valved manifold for low vapor pressure chemicals
US6966348B2 (en) * 2002-05-23 2005-11-22 Air Products And Chemicals, Inc. Purgeable container for low vapor pressure chemicals
US6648034B1 (en) 2002-05-23 2003-11-18 Air Products And Chemicals, Inc. Purgeable manifold for low vapor pressure chemicals containers
US7124913B2 (en) 2003-06-24 2006-10-24 Air Products And Chemicals, Inc. High purity chemical container with diptube and level sensor terminating in lowest most point of concave floor
US7261118B2 (en) * 2003-08-19 2007-08-28 Air Products And Chemicals, Inc. Method and vessel for the delivery of precursor materials
US7249880B2 (en) * 2003-10-14 2007-07-31 Advanced Technology Materials, Inc. Flexible mixing bag for mixing solids, liquids and gases
JP4626956B2 (en) * 2004-10-18 2011-02-09 東京エレクトロン株式会社 A semiconductor manufacturing apparatus, a liquid amount monitoring device, the liquid material monitoring method of a semiconductor manufacturing apparatus, and a liquid amount monitoring method
US20060133955A1 (en) * 2004-12-17 2006-06-22 Peters David W Apparatus and method for delivering vapor phase reagent to a deposition chamber
TWI409213B (en) 2005-04-25 2013-09-21 Advanced Tech Materials Liner-based liquid storage and dispensing systems with empty detection capability
US9312557B2 (en) * 2005-05-11 2016-04-12 Schlumberger Technology Corporation Fuel cell apparatus and method for downhole power systems
CN102126696B (en) 2005-06-06 2014-10-29 高级技术材料公司 Fluid supply system, the fluid storage and dispensing system and method of supplying fluid
KR20080074896A (en) * 2005-10-26 2008-08-13 레브테크 인크. Bloreactor with mlxer and sparger
GB2432371B (en) * 2005-11-17 2011-06-15 Epichem Ltd Improved bubbler for the transportation of substances by a carrier gas
US8366311B2 (en) * 2006-04-21 2013-02-05 Atmi Bvba Systems and devices for mixing substances and methods of making same
EP2018416B1 (en) * 2006-05-13 2018-10-24 Pall Life Sciences Belgium Disposable bioreactor
KR100773567B1 (en) 2006-07-06 2007-11-07 세메스 주식회사 Deposition source material supply
US9109287B2 (en) * 2006-10-19 2015-08-18 Air Products And Chemicals, Inc. Solid source container with inlet plenum
US8708320B2 (en) * 2006-12-15 2014-04-29 Air Products And Chemicals, Inc. Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel
US7750173B2 (en) 2007-01-18 2010-07-06 Advanced Technology Materials, Inc. Tantalum amido-complexes with chelate ligands useful for CVD and ALD of TaN and Ta205 thin films
US8518484B2 (en) * 2007-01-29 2013-08-27 Praxair Technology, Inc. Bubbler apparatus and delivery method
US7883745B2 (en) * 2007-07-30 2011-02-08 Micron Technology, Inc. Chemical vaporizer for material deposition systems and associated methods
US20090107579A1 (en) * 2007-10-26 2009-04-30 Smith Robin E Loading system
US20090214777A1 (en) * 2008-02-22 2009-08-27 Demetrius Sarigiannis Multiple ampoule delivery systems
US20090258143A1 (en) * 2008-04-11 2009-10-15 Peck John D Reagent dispensing apparatus and delivery method
US20090255466A1 (en) 2008-04-11 2009-10-15 Peck John D Reagent dispensing apparatus and delivery method
TWI396652B (en) * 2008-05-23 2013-05-21 Century Display Shenxhen Co
WO2010056576A1 (en) * 2008-11-11 2010-05-20 Praxair Technology, Inc. Reagent dispensing apparatuses and delivery methods
JP5656372B2 (en) * 2009-07-21 2015-01-21 日本エア・リキード株式会社 Liquid material container, the liquid material supply device, and method of supplying the liquid material
EP2496733A1 (en) 2009-11-02 2012-09-12 Sigma-Aldrich Co. LLC Evaporator
US20120291627A1 (en) * 2010-01-06 2012-11-22 Advanced Technology Materials, Inc. Liquid dispensing systems with gas removal and sensing capabilities
US8831413B2 (en) * 2010-01-20 2014-09-09 Envicor, Llc Storage tank assembly and system for storing waste cooking oil
JP5877702B2 (en) * 2011-12-14 2016-03-08 株式会社ニューフレアテクノロジー Film forming apparatus and a film forming method
US9809711B2 (en) 2012-01-17 2017-11-07 Versum Materials Us, Llc Catalyst and formulations comprising same for alkoxysilanes hydrolysis reaction in semiconductor process
US20130243968A1 (en) 2012-03-16 2013-09-19 Air Products And Chemicals, Inc. Catalyst synthesis for organosilane sol-gel reactions
US10151618B2 (en) * 2014-01-24 2018-12-11 Versum Materials Us, Llc Ultrasonic liquid level sensing systems
KR101477784B1 (en) * 2013-05-24 2014-12-31 주식회사 티지오테크 Metal Source Supplying Unit And Deposition Film Forming Apparatus Having the same
US10170297B2 (en) 2013-08-22 2019-01-01 Versum Materials Us, Llc Compositions and methods using same for flowable oxide deposition
TW201602547A (en) * 2014-03-17 2016-01-16 Entegris Jetalon Solutions Inc Disposable liquid chemical sensor system
US9580293B2 (en) 2014-06-24 2017-02-28 Air Products And Chemicals, Inc. Diptube design for a host ampoule
US9914632B2 (en) * 2014-08-22 2018-03-13 Applied Materials, Inc. Methods and apparatus for liquid chemical delivery
KR101684776B1 (en) * 2015-03-31 2016-12-08 세기아케마주식회사 A Apparatus for storage of dangerous materials
WO2018056346A1 (en) * 2016-09-21 2018-03-29 株式会社日立国際電気 Substrate treatment device, liquid feedstock replenishing system, semiconductor device production method, and program
US20180223047A1 (en) 2017-02-08 2018-08-09 Versum Materials Us, Llc Organoamino-Functionalized Linear And Cyclic Oligosiloxanes For Deposition Of Silicon-Containing Films

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US5102010A (en) * 1988-02-16 1992-04-07 Now Technologies, Inc. Container and dispensing system for liquid chemicals
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US5335821A (en) * 1992-09-11 1994-08-09 Now Technologies, Inc. Liquid chemical container and dispensing system
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US5383574A (en) * 1993-07-19 1995-01-24 Microbar Sytems, Inc. System and method for dispensing liquid from storage containers
US5388574A (en) * 1993-07-29 1995-02-14 Ingebrethsen; Bradley J. Aerosol delivery article
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US5366120A (en) * 1994-04-19 1994-11-22 Tonis Tollasepp Paint pump
US5749500A (en) * 1996-04-23 1998-05-12 Kraus; Joey Liquid retrieving adaptor for cylindrical containers

Also Published As

Publication number Publication date
JP3474201B2 (en) 2003-12-08
KR100364115B1 (en) 2002-12-11
WO1998027247A1 (en) 1998-06-25
DE69738136T2 (en) 2008-06-12
US6077356A (en) 2000-06-20
EP0953064A1 (en) 1999-11-03
EP0953064B1 (en) 2007-09-12
JP2001503106A (en) 2001-03-06
EP0953064A4 (en) 2004-04-21
KR20000057606A (en) 2000-09-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition