DE69728976T2 - Electronic device and method for making a membrane therefor - Google Patents

Electronic device and method for making a membrane therefor Download PDF

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Publication number
DE69728976T2
DE69728976T2 DE69728976T DE69728976T DE69728976T2 DE 69728976 T2 DE69728976 T2 DE 69728976T2 DE 69728976 T DE69728976 T DE 69728976T DE 69728976 T DE69728976 T DE 69728976T DE 69728976 T2 DE69728976 T2 DE 69728976T2
Authority
DE
Germany
Prior art keywords
making
electronic device
membrane therefor
therefor
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69728976T
Other languages
German (de)
Other versions
DE69728976D1 (en
Inventor
Jean-Paul Guillemet
Myriam Combes
Stephen Astie
Emmanuel Scheid
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NXP USA Inc
Original Assignee
Motorola Semiconducteurs SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Semiconducteurs SA filed Critical Motorola Semiconducteurs SA
Priority claimed from EP97401796A external-priority patent/EP0893827B1/en
Publication of DE69728976D1 publication Critical patent/DE69728976D1/en
Application granted granted Critical
Publication of DE69728976T2 publication Critical patent/DE69728976T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/18High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L2224/19Manufacturing methods of high density interconnect preforms
DE69728976T 1997-07-25 1997-07-25 Electronic device and method for making a membrane therefor Expired - Fee Related DE69728976T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP97401796A EP0893827B1 (en) 1997-07-25 1997-07-25 Electronic device and method for forming a membrane for an electronic device

Publications (2)

Publication Number Publication Date
DE69728976D1 DE69728976D1 (en) 2004-06-09
DE69728976T2 true DE69728976T2 (en) 2004-10-21

Family

ID=32309555

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69728976T Expired - Fee Related DE69728976T2 (en) 1997-07-25 1997-07-25 Electronic device and method for making a membrane therefor

Country Status (2)

Country Link
KR (1) KR100578259B1 (en)
DE (1) DE69728976T2 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07128140A (en) * 1993-10-29 1995-05-19 Matsushita Electric Works Ltd Infrared detector
JP2582343B2 (en) * 1993-12-04 1997-02-19 エルジー電子株式会社 Low power consumption thin film gas sensor and method of manufacturing the same

Also Published As

Publication number Publication date
DE69728976D1 (en) 2004-06-09
KR19990014128A (en) 1999-02-25
KR100578259B1 (en) 2006-08-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FREESCALE SEMICONDUCTOR, INC., AUSTIN, TEX., US

8339 Ceased/non-payment of the annual fee