DE69703486T2 - Magnetenanordnung - Google Patents

Magnetenanordnung

Info

Publication number
DE69703486T2
DE69703486T2 DE69703486T DE69703486T DE69703486T2 DE 69703486 T2 DE69703486 T2 DE 69703486T2 DE 69703486 T DE69703486 T DE 69703486T DE 69703486 T DE69703486 T DE 69703486T DE 69703486 T2 DE69703486 T2 DE 69703486T2
Authority
DE
Germany
Prior art keywords
magnet arrangement
magnet
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69703486T
Other languages
English (en)
Other versions
DE69703486D1 (de
Inventor
Barry Diver
Howard Davis
Ian Pearson
Richard Reeves
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nordiko Technical Services Ltd
Original Assignee
Nordiko Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nordiko Ltd filed Critical Nordiko Ltd
Publication of DE69703486D1 publication Critical patent/DE69703486D1/de
Application granted granted Critical
Publication of DE69703486T2 publication Critical patent/DE69703486T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • H01J37/3429—Plural materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/20—Electromagnets; Actuators including electromagnets without armatures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
DE69703486T 1996-05-07 1997-05-07 Magnetenanordnung Expired - Lifetime DE69703486T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9609470.1A GB9609470D0 (en) 1996-05-07 1996-05-07 Magnet array
PCT/GB1997/001233 WO1997042649A1 (en) 1996-05-07 1997-05-07 Magnet array

Publications (2)

Publication Number Publication Date
DE69703486D1 DE69703486D1 (de) 2000-12-14
DE69703486T2 true DE69703486T2 (de) 2001-03-15

Family

ID=10793282

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69703486T Expired - Lifetime DE69703486T2 (de) 1996-05-07 1997-05-07 Magnetenanordnung

Country Status (6)

Country Link
US (1) US6190517B1 (de)
EP (1) EP0897591B1 (de)
JP (1) JP2000509901A (de)
DE (1) DE69703486T2 (de)
GB (1) GB9609470D0 (de)
WO (1) WO1997042649A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6545580B2 (en) * 1998-09-09 2003-04-08 Veeco Instruments, Inc. Electromagnetic field generator and method of operation
US6831463B1 (en) * 2003-06-20 2004-12-14 Brigham And Women's Hospital Ferrorefraction MRI system having two orthogonal remote field polarization axes
US10446307B2 (en) * 2017-05-23 2019-10-15 AOSense, Inc. Magnetic field generators based on high magnetic permeability materials

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4155825A (en) * 1977-05-02 1979-05-22 Fournier Paul R Integrated sputtering apparatus and method
JPS62232911A (ja) * 1986-04-03 1987-10-13 Hitachi Ltd 磁性膜形成装置
US5512150A (en) 1995-03-09 1996-04-30 Hmt Technology Corporation Target assembly having inner and outer targets
US5589039A (en) * 1995-07-28 1996-12-31 Sony Corporation In-plane parallel bias magnetic field generator for sputter coating magnetic materials onto substrates

Also Published As

Publication number Publication date
DE69703486D1 (de) 2000-12-14
EP0897591A1 (de) 1999-02-24
GB9609470D0 (en) 1996-07-10
EP0897591B1 (de) 2000-11-08
JP2000509901A (ja) 2000-08-02
US6190517B1 (en) 2001-02-20
WO1997042649A1 (en) 1997-11-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: NORDIKO TECHNICAL SERVICES LTD., HAVANT, HAMPS, GB

R082 Change of representative

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