DE69702219D1 - Process for the production of silicon single crystals by the continuous Czochralski process - Google Patents

Process for the production of silicon single crystals by the continuous Czochralski process

Info

Publication number
DE69702219D1
DE69702219D1 DE69702219T DE69702219T DE69702219D1 DE 69702219 D1 DE69702219 D1 DE 69702219D1 DE 69702219 T DE69702219 T DE 69702219T DE 69702219 T DE69702219 T DE 69702219T DE 69702219 D1 DE69702219 D1 DE 69702219D1
Authority
DE
Germany
Prior art keywords
production
silicon single
single crystals
continuous czochralski
continuous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69702219T
Other languages
German (de)
Other versions
DE69702219T2 (en
Inventor
Naoki Nagai
Isamu Harada
Michiaki Oda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6531896A external-priority patent/JP3598642B2/en
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Application granted granted Critical
Publication of DE69702219D1 publication Critical patent/DE69702219D1/en
Publication of DE69702219T2 publication Critical patent/DE69702219T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

DE1997602219 1996-02-27 1997-02-24 Process for the production of silicon single crystals by the continuous Czochralski process Expired - Fee Related DE69702219T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6531896A JP3598642B2 (en) 1996-02-27 1996-02-27 Method for producing silicon single crystal by continuous charge method

Publications (2)

Publication Number Publication Date
DE69702219D1 true DE69702219D1 (en) 2000-07-13
DE69702219T2 DE69702219T2 (en) 2001-03-01

Family

ID=13283449

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1997602219 Expired - Fee Related DE69702219T2 (en) 1996-02-27 1997-02-24 Process for the production of silicon single crystals by the continuous Czochralski process

Country Status (1)

Country Link
DE (1) DE69702219T2 (en)

Also Published As

Publication number Publication date
DE69702219T2 (en) 2001-03-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee