DE69638171D1 - Procedure for sample examination by changing the polarization - Google Patents

Procedure for sample examination by changing the polarization

Info

Publication number
DE69638171D1
DE69638171D1 DE69638171T DE69638171T DE69638171D1 DE 69638171 D1 DE69638171 D1 DE 69638171D1 DE 69638171 T DE69638171 T DE 69638171T DE 69638171 T DE69638171 T DE 69638171T DE 69638171 D1 DE69638171 D1 DE 69638171D1
Authority
DE
Germany
Prior art keywords
polarization
procedure
changing
sample examination
examination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69638171T
Other languages
German (de)
Inventor
Steven E Green
John A Woollam
Craig M Herzinger
Stephen P Ducharme
Blaine D Johs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JA Woollam Co Inc
Original Assignee
JA Woollam Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/422,346 external-priority patent/US5757494A/en
Application filed by JA Woollam Co Inc filed Critical JA Woollam Co Inc
Application granted granted Critical
Publication of DE69638171D1 publication Critical patent/DE69638171D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE69638171T 1995-04-14 1996-03-12 Procedure for sample examination by changing the polarization Expired - Lifetime DE69638171D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/422,346 US5757494A (en) 1994-10-21 1995-04-14 System and method for improving data acquisition capability in spectroscopic ellipsometers
US51573895A 1995-08-16 1995-08-16

Publications (1)

Publication Number Publication Date
DE69638171D1 true DE69638171D1 (en) 2010-06-10

Family

ID=42140318

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69638171T Expired - Lifetime DE69638171D1 (en) 1995-04-14 1996-03-12 Procedure for sample examination by changing the polarization

Country Status (2)

Country Link
AT (1) ATE466272T1 (en)
DE (1) DE69638171D1 (en)

Also Published As

Publication number Publication date
ATE466272T1 (en) 2010-05-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition