DE69629139D1 - Farbmessvorrichtung für einen Anzeigeschirm - Google Patents

Farbmessvorrichtung für einen Anzeigeschirm

Info

Publication number
DE69629139D1
DE69629139D1 DE69629139T DE69629139T DE69629139D1 DE 69629139 D1 DE69629139 D1 DE 69629139D1 DE 69629139 T DE69629139 T DE 69629139T DE 69629139 T DE69629139 T DE 69629139T DE 69629139 D1 DE69629139 D1 DE 69629139D1
Authority
DE
Germany
Prior art keywords
objective
filters
measuring device
analysed
entrance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69629139T
Other languages
English (en)
Other versions
DE69629139T2 (de
Inventor
Thierry Leroux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ELDIM HEROUVILLE SAINT CLAIR
Original Assignee
ELDIM HEROUVILLE SAINT CLAIR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ELDIM HEROUVILLE SAINT CLAIR filed Critical ELDIM HEROUVILLE SAINT CLAIR
Publication of DE69629139D1 publication Critical patent/DE69629139D1/de
Application granted granted Critical
Publication of DE69629139T2 publication Critical patent/DE69629139T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306Details
    • G02F1/1309Repairing; Testing
DE69629139T 1995-01-06 1996-01-03 Farbmessvorrichtung für einen Anzeigeschirm Expired - Fee Related DE69629139T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9500118A FR2729220B1 (fr) 1995-01-06 1995-01-06 Dispositif de mesure colorimetrique d'un ecran d'affichage
FR9500118 1995-01-06

Publications (2)

Publication Number Publication Date
DE69629139D1 true DE69629139D1 (de) 2003-08-28
DE69629139T2 DE69629139T2 (de) 2004-04-15

Family

ID=9474920

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69629139T Expired - Fee Related DE69629139T2 (de) 1995-01-06 1996-01-03 Farbmessvorrichtung für einen Anzeigeschirm

Country Status (7)

Country Link
US (1) US5703686A (de)
EP (1) EP0721136B1 (de)
JP (1) JP3694559B2 (de)
AT (1) ATE245826T1 (de)
CA (1) CA2166662C (de)
DE (1) DE69629139T2 (de)
FR (1) FR2729220B1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19602862C1 (de) * 1996-01-28 1997-07-17 Autronic Melchers Gmbh Meßeinrichtung zum Erfassen optischer Eigenschaften einer elektro-optischen Anzeige
FR2749388B1 (fr) * 1996-05-31 1998-08-07 Eldim Appareil de mesure des caracteristiques photometriques et colorimetriques d'un objet
DE19755655A1 (de) * 1997-12-15 1999-06-17 Logo Kommunikations Und Druckt Verfahren zur farbmetrischen Charakterisierung eines selbstleuchtenden Abbildungssystems
FR2800163B1 (fr) 1999-10-26 2002-01-18 Eldim Dispositif de mesure de la repartition spatiale de l'emission spectrale d'un objet
DE10122607B4 (de) * 2001-05-10 2006-11-30 Leica Microsystems Cms Gmbh Verfahren und Anordnung zur direkten Fourierabbildung von Proben
US6678046B2 (en) * 2001-08-28 2004-01-13 Therma-Wave, Inc. Detector configurations for optical metrology
FR2833743B1 (fr) * 2001-12-17 2004-02-20 Eldim Procede et dispositif a faible resolution d'acquisition pour le controle d'un ecran d'affichage
US7012633B2 (en) 2002-03-06 2006-03-14 Radiant Imaging, Inv. Color calibration method for imaging color measurement device
WO2006091913A1 (en) * 2005-02-25 2006-08-31 Nanometrics Incorporated Apparatus and method for enhanced critical dimension scatterometry
US7463369B2 (en) * 2006-03-29 2008-12-09 Kla-Tencor Technologies Corp. Systems and methods for measuring one or more characteristics of patterned features on a specimen
CN102692207B (zh) 2011-03-25 2014-07-30 财团法人工业技术研究院 量测方法与量测装置
US8456639B2 (en) 2011-07-01 2013-06-04 Kla-Tencor Corporation Measurement of critical dimension
CN106969906B (zh) * 2017-04-26 2019-05-03 武汉华星光电技术有限公司 一种显示器的色度学计算方法及色度计算方法
FR3079612B1 (fr) 2018-03-29 2021-06-04 Eldim Dispositif optique permettant de mesurer simultanement l'emission angulaire et spectrale d'un objet
US10872403B2 (en) 2018-08-10 2020-12-22 Micron Technology, Inc. System for predicting properties of structures, imager system, and related methods

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55138620A (en) * 1979-04-17 1980-10-29 Nippon Denshiyoku Kogyo Kk Photometric device
US4648714A (en) * 1985-09-11 1987-03-10 University Of Utah Molecular gas analysis by Raman scattering in intracavity laser configuration
FR2613830B1 (fr) * 1987-04-08 1990-11-02 Commissariat Energie Atomique Dispositif pour determiner le contraste d'un ecran d'affichage en fonction de la direction d'observation

Also Published As

Publication number Publication date
CA2166662C (fr) 2000-06-06
DE69629139T2 (de) 2004-04-15
JP3694559B2 (ja) 2005-09-14
EP0721136B1 (de) 2003-07-23
ATE245826T1 (de) 2003-08-15
EP0721136A1 (de) 1996-07-10
FR2729220B1 (fr) 1997-04-04
US5703686A (en) 1997-12-30
FR2729220A1 (fr) 1996-07-12
CA2166662A1 (fr) 1996-07-07
JPH10132703A (ja) 1998-05-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee