DE69613855D1 - DEVICE FOR HEAT TREATING OBJECTS - Google Patents

DEVICE FOR HEAT TREATING OBJECTS

Info

Publication number
DE69613855D1
DE69613855D1 DE69613855T DE69613855T DE69613855D1 DE 69613855 D1 DE69613855 D1 DE 69613855D1 DE 69613855 T DE69613855 T DE 69613855T DE 69613855 T DE69613855 T DE 69613855T DE 69613855 D1 DE69613855 D1 DE 69613855D1
Authority
DE
Germany
Prior art keywords
heat treating
treating objects
objects
heat
treating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69613855T
Other languages
German (de)
Other versions
DE69613855T2 (en
Inventor
Olle Kordina
Willy Hermansson
Marko Tuominen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Okmetic Oy
Wolfspeed Inc
Original Assignee
ABB Research Ltd Switzerland
Okmetic Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from SE9503426A external-priority patent/SE9503426D0/en
Application filed by ABB Research Ltd Switzerland, Okmetic Oy filed Critical ABB Research Ltd Switzerland
Application granted granted Critical
Publication of DE69613855D1 publication Critical patent/DE69613855D1/en
Publication of DE69613855T2 publication Critical patent/DE69613855T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE69613855T 1995-10-04 1996-10-01 DEVICE FOR HEAT TREATING OBJECTS Expired - Lifetime DE69613855T2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9503426A SE9503426D0 (en) 1995-10-04 1995-10-04 A device for heat treatment of objects and a method for producing a susceptor
PCT/SE1996/001227 WO1997013011A1 (en) 1995-10-04 1996-10-01 A device for heat treatment of objects and a method for producing a susceptor

Publications (2)

Publication Number Publication Date
DE69613855D1 true DE69613855D1 (en) 2001-08-16
DE69613855T2 DE69613855T2 (en) 2001-10-31

Family

ID=20399687

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69613855T Expired - Lifetime DE69613855T2 (en) 1995-10-04 1996-10-01 DEVICE FOR HEAT TREATING OBJECTS

Country Status (3)

Country Link
JP (1) JP4744652B2 (en)
AT (1) ATE203068T1 (en)
DE (1) DE69613855T2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017165615A (en) * 2016-03-16 2017-09-21 住友電気工業株式会社 Apparatus for epitaxial growth of silicon carbide

Also Published As

Publication number Publication date
JPH11513351A (en) 1999-11-16
JP4744652B2 (en) 2011-08-10
ATE203068T1 (en) 2001-07-15
DE69613855T2 (en) 2001-10-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: CREE, INC., DURHAM, N.C., US

Owner name: OKMETIC OY, ESPOO, FI