DE69613855D1 - DEVICE FOR HEAT TREATING OBJECTS - Google Patents
DEVICE FOR HEAT TREATING OBJECTSInfo
- Publication number
- DE69613855D1 DE69613855D1 DE69613855T DE69613855T DE69613855D1 DE 69613855 D1 DE69613855 D1 DE 69613855D1 DE 69613855 T DE69613855 T DE 69613855T DE 69613855 T DE69613855 T DE 69613855T DE 69613855 D1 DE69613855 D1 DE 69613855D1
- Authority
- DE
- Germany
- Prior art keywords
- heat treating
- treating objects
- objects
- heat
- treating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9503426A SE9503426D0 (en) | 1995-10-04 | 1995-10-04 | A device for heat treatment of objects and a method for producing a susceptor |
PCT/SE1996/001227 WO1997013011A1 (en) | 1995-10-04 | 1996-10-01 | A device for heat treatment of objects and a method for producing a susceptor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69613855D1 true DE69613855D1 (en) | 2001-08-16 |
DE69613855T2 DE69613855T2 (en) | 2001-10-31 |
Family
ID=20399687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69613855T Expired - Lifetime DE69613855T2 (en) | 1995-10-04 | 1996-10-01 | DEVICE FOR HEAT TREATING OBJECTS |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4744652B2 (en) |
AT (1) | ATE203068T1 (en) |
DE (1) | DE69613855T2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017165615A (en) * | 2016-03-16 | 2017-09-21 | 住友電気工業株式会社 | Apparatus for epitaxial growth of silicon carbide |
-
1996
- 1996-10-01 AT AT96933696T patent/ATE203068T1/en active
- 1996-10-01 JP JP51418997A patent/JP4744652B2/en not_active Expired - Lifetime
- 1996-10-01 DE DE69613855T patent/DE69613855T2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH11513351A (en) | 1999-11-16 |
JP4744652B2 (en) | 2011-08-10 |
ATE203068T1 (en) | 2001-07-15 |
DE69613855T2 (en) | 2001-10-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: CREE, INC., DURHAM, N.C., US Owner name: OKMETIC OY, ESPOO, FI |