DE69602961D1 - Vorrichtung mit miniaturisiertem photoionischem kopf - Google Patents

Vorrichtung mit miniaturisiertem photoionischem kopf

Info

Publication number
DE69602961D1
DE69602961D1 DE69602961T DE69602961T DE69602961D1 DE 69602961 D1 DE69602961 D1 DE 69602961D1 DE 69602961 T DE69602961 T DE 69602961T DE 69602961 T DE69602961 T DE 69602961T DE 69602961 D1 DE69602961 D1 DE 69602961D1
Authority
DE
Germany
Prior art keywords
miniaturized
head
photoionic head
miniaturized photoionic
photoionic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69602961T
Other languages
English (en)
Other versions
DE69602961T2 (de
Inventor
Jean-Francois Eloy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69602961D1 publication Critical patent/DE69602961D1/de
Publication of DE69602961T2 publication Critical patent/DE69602961T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/048—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Lasers (AREA)
DE69602961T 1995-09-08 1996-09-06 Vorrichtung mit miniaturisiertem photoionischem kopf Expired - Fee Related DE69602961T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9510544A FR2738578B1 (fr) 1995-09-08 1995-09-08 Dispositif a microtete photoionique autocommandee par laser
PCT/FR1996/001371 WO1997009461A1 (fr) 1995-09-08 1996-09-06 Dispositif a microtete photoionique

Publications (2)

Publication Number Publication Date
DE69602961D1 true DE69602961D1 (de) 1999-07-22
DE69602961T2 DE69602961T2 (de) 2000-02-17

Family

ID=9482383

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69602961T Expired - Fee Related DE69602961T2 (de) 1995-09-08 1996-09-06 Vorrichtung mit miniaturisiertem photoionischem kopf

Country Status (5)

Country Link
US (1) US5956438A (de)
EP (1) EP0848761B1 (de)
DE (1) DE69602961T2 (de)
FR (1) FR2738578B1 (de)
WO (1) WO1997009461A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020050519A1 (en) * 2000-10-26 2002-05-02 Oliva Guido M. Laser module for reading optical codes
US20060085051A1 (en) * 2004-10-19 2006-04-20 Fritsch Michael H Electrical implants

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3622743A (en) * 1969-04-28 1971-11-23 Hrand M Muncheryan Laser eraser and microwelder
US4401477A (en) * 1982-05-17 1983-08-30 Battelle Development Corporation Laser shock processing
FR2594853A1 (fr) * 1986-02-25 1987-08-28 Commissariat Energie Atomique Procede et dispositif de traitement d'un materiau par effet thermo-ionique en vue d'en modifier ses proprietes physico-chimiques
US4752455A (en) * 1986-05-27 1988-06-21 Kms Fusion, Inc. Pulsed laser microfabrication
JPH0797675B2 (ja) * 1989-03-28 1995-10-18 シャープ株式会社 半導体レーザ励起型固体レーザ装置
FR2709763B1 (fr) * 1993-09-08 1995-10-13 Commissariat Energie Atomique Dispositif de traitement d'un matériau, à tête photo-ionique miniaturisée.

Also Published As

Publication number Publication date
EP0848761B1 (de) 1999-06-16
US5956438A (en) 1999-09-21
FR2738578B1 (fr) 1997-10-10
EP0848761A1 (de) 1998-06-24
FR2738578A1 (fr) 1997-03-14
DE69602961T2 (de) 2000-02-17
WO1997009461A1 (fr) 1997-03-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee