Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzglas GmbH and Co KG
Original Assignee
Heraeus Quarzglas GmbH and Co KG
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Quarzglas GmbH and Co KG, Shin Etsu Quartz Products Co LtdfiledCriticalHeraeus Quarzglas GmbH and Co KG
Priority claimed from EP96114052Aexternal-prioritypatent/EP0763504B1/en
Publication of DE69602695D1publicationCriticalpatent/DE69602695D1/en
Application grantedgrantedCritical
Publication of DE69602695T2publicationCriticalpatent/DE69602695T2/en