DE69536124D1 - RASTER DEVICE FOR THE STUDY OF SURFACE ANOMALIES - Google Patents

RASTER DEVICE FOR THE STUDY OF SURFACE ANOMALIES

Info

Publication number
DE69536124D1
DE69536124D1 DE69536124T DE69536124T DE69536124D1 DE 69536124 D1 DE69536124 D1 DE 69536124D1 DE 69536124 T DE69536124 T DE 69536124T DE 69536124 T DE69536124 T DE 69536124T DE 69536124 D1 DE69536124 D1 DE 69536124D1
Authority
DE
Germany
Prior art keywords
study
surface anomalies
raster device
raster
anomalies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69536124T
Other languages
German (de)
Inventor
Mehrdad Nikoonahad
Stanley E Stokowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/361,131 external-priority patent/US5530550A/en
Priority claimed from US08/499,995 external-priority patent/US5883710A/en
Priority claimed from US08/536,862 external-priority patent/US5864394A/en
Application filed by KLA Tencor Corp filed Critical KLA Tencor Corp
Application granted granted Critical
Publication of DE69536124D1 publication Critical patent/DE69536124D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE69536124T 1994-12-08 1995-12-08 RASTER DEVICE FOR THE STUDY OF SURFACE ANOMALIES Expired - Lifetime DE69536124D1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US35166494A 1994-12-08 1994-12-08
US08/361,131 US5530550A (en) 1994-12-21 1994-12-21 Optical wafer positioning system
US08/499,995 US5883710A (en) 1994-12-08 1995-07-10 Scanning system for inspecting anomalies on surfaces
US08/536,862 US5864394A (en) 1994-06-20 1995-09-29 Surface inspection system
PCT/US1995/016172 WO1996018093A1 (en) 1994-12-08 1995-12-08 Scanning system for inspecting anomalies on surfaces

Publications (1)

Publication Number Publication Date
DE69536124D1 true DE69536124D1 (en) 2011-01-13

Family

ID=43123178

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69536120T Expired - Lifetime DE69536120D1 (en) 1994-12-08 1995-12-08 DEVICE FOR STUDYING SURFACES
DE69536124T Expired - Lifetime DE69536124D1 (en) 1994-12-08 1995-12-08 RASTER DEVICE FOR THE STUDY OF SURFACE ANOMALIES

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69536120T Expired - Lifetime DE69536120D1 (en) 1994-12-08 1995-12-08 DEVICE FOR STUDYING SURFACES

Country Status (1)

Country Link
DE (2) DE69536120D1 (en)

Also Published As

Publication number Publication date
DE69536120D1 (en) 2010-12-23

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