DE69536124D1 - RASTER DEVICE FOR THE STUDY OF SURFACE ANOMALIES - Google Patents
RASTER DEVICE FOR THE STUDY OF SURFACE ANOMALIESInfo
- Publication number
- DE69536124D1 DE69536124D1 DE69536124T DE69536124T DE69536124D1 DE 69536124 D1 DE69536124 D1 DE 69536124D1 DE 69536124 T DE69536124 T DE 69536124T DE 69536124 T DE69536124 T DE 69536124T DE 69536124 D1 DE69536124 D1 DE 69536124D1
- Authority
- DE
- Germany
- Prior art keywords
- study
- surface anomalies
- raster device
- raster
- anomalies
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US35166494A | 1994-12-08 | 1994-12-08 | |
US08/361,131 US5530550A (en) | 1994-12-21 | 1994-12-21 | Optical wafer positioning system |
US08/499,995 US5883710A (en) | 1994-12-08 | 1995-07-10 | Scanning system for inspecting anomalies on surfaces |
US08/536,862 US5864394A (en) | 1994-06-20 | 1995-09-29 | Surface inspection system |
PCT/US1995/016172 WO1996018093A1 (en) | 1994-12-08 | 1995-12-08 | Scanning system for inspecting anomalies on surfaces |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69536124D1 true DE69536124D1 (en) | 2011-01-13 |
Family
ID=43123178
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69536120T Expired - Lifetime DE69536120D1 (en) | 1994-12-08 | 1995-12-08 | DEVICE FOR STUDYING SURFACES |
DE69536124T Expired - Lifetime DE69536124D1 (en) | 1994-12-08 | 1995-12-08 | RASTER DEVICE FOR THE STUDY OF SURFACE ANOMALIES |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69536120T Expired - Lifetime DE69536120D1 (en) | 1994-12-08 | 1995-12-08 | DEVICE FOR STUDYING SURFACES |
Country Status (1)
Country | Link |
---|---|
DE (2) | DE69536120D1 (en) |
-
1995
- 1995-12-08 DE DE69536120T patent/DE69536120D1/en not_active Expired - Lifetime
- 1995-12-08 DE DE69536124T patent/DE69536124D1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69536120D1 (en) | 2010-12-23 |
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