DE69401019D1 - Anordnung zum Führen von elektrisch geladenen Teilchen - Google Patents

Anordnung zum Führen von elektrisch geladenen Teilchen

Info

Publication number
DE69401019D1
DE69401019D1 DE69401019T DE69401019T DE69401019D1 DE 69401019 D1 DE69401019 D1 DE 69401019D1 DE 69401019 T DE69401019 T DE 69401019T DE 69401019 T DE69401019 T DE 69401019T DE 69401019 D1 DE69401019 D1 DE 69401019D1
Authority
DE
Germany
Prior art keywords
arrangement
charged particles
electrically charged
guiding
guiding electrically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69401019T
Other languages
English (en)
Other versions
DE69401019T2 (de
Inventor
Olivier Delferriere
Jean Faure
Raphael Gobin
Jean Duval
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Centre National de la Recherche Scientifique CNRS
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Commissariat a lEnergie Atomique CEA filed Critical Centre National de la Recherche Scientifique CNRS
Application granted granted Critical
Publication of DE69401019D1 publication Critical patent/DE69401019D1/de
Publication of DE69401019T2 publication Critical patent/DE69401019T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/38—Mounting, supporting, spacing, or insulating electron-optical or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/027—Construction of the gun or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
  • Measurement Of Radiation (AREA)
DE1994601019 1993-03-09 1994-03-07 Anordnung zum Führen von elektrisch geladenen Teilchen Expired - Fee Related DE69401019T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9302699A FR2702593B1 (fr) 1993-03-09 1993-03-09 Structure de guidage de particules chargées en électricité.

Publications (2)

Publication Number Publication Date
DE69401019D1 true DE69401019D1 (de) 1997-01-16
DE69401019T2 DE69401019T2 (de) 1997-06-05

Family

ID=9444785

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1994601019 Expired - Fee Related DE69401019T2 (de) 1993-03-09 1994-03-07 Anordnung zum Führen von elektrisch geladenen Teilchen

Country Status (3)

Country Link
EP (1) EP0615272B1 (de)
DE (1) DE69401019T2 (de)
FR (1) FR2702593B1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2650612A1 (de) 2012-04-10 2013-10-16 Siemens Aktiengesellschaft Brenner
NL2013817C2 (en) * 2013-11-14 2015-07-21 Mapper Lithography Ip Bv Multi-electrode electron optics.
TW202331763A (zh) * 2017-04-11 2023-08-01 荷蘭商Ａｓｍｌ荷蘭公司 帶電粒子源模組及具有所述帶電粒子源模組之曝光系統

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3534792A1 (de) * 1985-09-30 1987-04-02 Leybold Heraeus Gmbh & Co Kg Elektronenstrahlerzeuger mit einer direkt und einer indirekt beheizbaren katode
JPH04322015A (ja) * 1991-04-19 1992-11-12 Hitachi Ltd 高電圧絶縁部材

Also Published As

Publication number Publication date
FR2702593A1 (fr) 1994-09-16
EP0615272B1 (de) 1996-12-04
FR2702593B1 (fr) 1995-04-28
DE69401019T2 (de) 1997-06-05
EP0615272A1 (de) 1994-09-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee