DE69327336T2 - Vibrationsunempfindliche taststiftanordnung eines profilometers - Google Patents

Vibrationsunempfindliche taststiftanordnung eines profilometers

Info

Publication number
DE69327336T2
DE69327336T2 DE69327336T DE69327336T DE69327336T2 DE 69327336 T2 DE69327336 T2 DE 69327336T2 DE 69327336 T DE69327336 T DE 69327336T DE 69327336 T DE69327336 T DE 69327336T DE 69327336 T2 DE69327336 T2 DE 69327336T2
Authority
DE
Germany
Prior art keywords
profilometer
vibration
sensitive probe
probe arrangement
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69327336T
Other languages
English (en)
Other versions
DE69327336D1 (de
Inventor
William Wheeler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tencor Instruments Inc
Original Assignee
Tencor Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tencor Instruments Inc filed Critical Tencor Instruments Inc
Application granted granted Critical
Publication of DE69327336D1 publication Critical patent/DE69327336D1/de
Publication of DE69327336T2 publication Critical patent/DE69327336T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
DE69327336T 1992-10-02 1993-09-30 Vibrationsunempfindliche taststiftanordnung eines profilometers Expired - Fee Related DE69327336T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/955,507 US5309755A (en) 1992-10-02 1992-10-02 Profilometer stylus assembly insensitive to vibration
PCT/US1993/009318 WO1994008204A1 (en) 1992-10-02 1993-09-30 Profilometer stylus assembly insensitive to vibration

Publications (2)

Publication Number Publication Date
DE69327336D1 DE69327336D1 (de) 2000-01-20
DE69327336T2 true DE69327336T2 (de) 2000-08-24

Family

ID=25496910

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69327336T Expired - Fee Related DE69327336T2 (de) 1992-10-02 1993-09-30 Vibrationsunempfindliche taststiftanordnung eines profilometers

Country Status (5)

Country Link
US (1) US5309755A (de)
EP (1) EP0673498B1 (de)
JP (1) JP3559828B2 (de)
DE (1) DE69327336T2 (de)
WO (1) WO1994008204A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0759148A1 (de) * 1994-03-18 1997-02-26 Taylor Hobson Limited Metrologische stiftanordnung
US5705741A (en) * 1994-12-22 1998-01-06 Tencor Instruments Constant-force profilometer with stylus-stabilizing sensor assembly, dual-view optics, and temperature drift compensation
US5948972A (en) * 1994-12-22 1999-09-07 Kla-Tencor Corporation Dual stage instrument for scanning a specimen
US6520005B2 (en) * 1994-12-22 2003-02-18 Kla-Tencor Corporation System for sensing a sample
JP3256124B2 (ja) * 1996-02-22 2002-02-12 株式会社ミツトヨ 形状測定機
US5866806A (en) * 1996-10-11 1999-02-02 Kla-Tencor Corporation System for locating a feature of a surface
IT1299902B1 (it) 1998-03-13 2000-04-04 Marposs Spa Testa, apparecchiatura e metodo per il controllo di dimensioni lineari di pezzi meccanici.
US6161294A (en) * 1998-03-23 2000-12-19 Sloan Technologies, Incorporated Overhead scanning profiler
JP3273026B2 (ja) * 1998-09-02 2002-04-08 株式会社ミツトヨ 表面追従型測定機
US6427345B1 (en) * 1998-11-10 2002-08-06 Veeco Instruments, Inc. Method and apparatus for a line based, two-dimensional characterization of a three-dimensional surface
JP3401444B2 (ja) 1998-12-15 2003-04-28 株式会社ミツトヨ 微細形状測定装置
US6473708B1 (en) * 1999-12-20 2002-10-29 Bechtel Bwxt Idaho, Llc Device and method for self-verifying temperature measurement and control
TW550375B (en) * 2001-09-07 2003-09-01 Olympus Optical Co Apparatus for measuring a surface profile
AU2003234256A1 (en) * 2002-04-26 2003-11-10 Massachussetts Institute Of Technology Adjustable focusing composite for use in an optical profilometer system and method
DE10349946B4 (de) * 2003-10-24 2008-04-17 Werth Messtechnik Gmbh Anordnung zur Messung von Oberflächeneigenschaften
DE102005018919B4 (de) * 2005-04-22 2020-12-10 Jenoptik Industrial Metrology Germany Gmbh Meßgerät zur Abtastung einer Oberflächenkontur eines Werkstücks
US7750643B2 (en) * 2007-10-30 2010-07-06 General Electric Company Process and system for detecting surface anomalies
GB201007186D0 (en) * 2010-04-30 2010-06-09 Renishaw Plc Changeable task module counterweight
FR3001799B1 (fr) * 2013-02-07 2017-01-13 Commissariat Energie Atomique Dispositif de mesure de l'etat de surface d'une surface

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2732625A (en) * 1956-01-31 Buisson
DE260982C (de) *
US2240278A (en) * 1936-09-09 1941-04-29 Physicists Res Company Instrument for recording or measuring surface irregularities
US2460726A (en) * 1943-01-11 1949-02-01 Brush Dev Co Surface roughness measuring device
US2691887A (en) * 1951-11-16 1954-10-19 Leitz Ernst Gmbh Apparatus for determining the contour of interior surfaces of workpieces
DE977463C (de) * 1954-09-08 1966-07-14 Johannes Perthen Dr Ing Mikro-Tastsystem
US2935681A (en) * 1956-08-31 1960-05-03 Gen Electric Contour measuring method and probe
FR1392379A (fr) * 1964-05-08 1965-03-12 Micromètre pour la mesure ininterrompue de surfaces discontinues et moyens transducteurs pour cet appareil
DE1905538A1 (de) * 1969-02-05 1970-08-20 Hommelwerke Gmbh Tastfuehler fuer Oberflaechenpruefgeraet
US3546929A (en) * 1969-08-22 1970-12-15 Gustan Bergson Contact device
GB1487548A (en) * 1973-11-23 1977-10-05 Rangabe A Pick-up devices for gramophone records
US4103542A (en) * 1977-09-09 1978-08-01 Tencor Instruments Metrology instrument for measuring vertical profiles of integrated circuits
GB2015165B (en) * 1978-02-09 1983-01-12 Koa Oil Co Ltd Detecting capacitively corrosion of pipes
JPS56148007A (en) * 1980-04-18 1981-11-17 Mitsutoyo Mfg Co Ltd Profile measuring apparatus
US4377911A (en) * 1981-02-18 1983-03-29 Mitutoyo Mfg. Co., Ltd. Contour measuring instrument
US4391044A (en) * 1981-09-28 1983-07-05 Tencor Instruments Metrology instrument for measuring vertical profiles of integrated circuits and the like
US4574625A (en) * 1983-04-12 1986-03-11 Federal Products Corporation Surface finish, displacement and contour scanner
US4560924A (en) * 1983-07-22 1985-12-24 Magnetic Peripherals Inc. Flatness measuring apparatus
US4669300A (en) * 1984-03-30 1987-06-02 Sloan Technology Corporation Electromagnetic stylus force adjustment mechanism
GB8826640D0 (en) * 1988-11-15 1988-12-21 Sensotect Ltd Apparatus for determining surface roughness of material
US5193384A (en) * 1990-09-26 1993-03-16 The Charles Stark Draper Laboratory, Inc. Edge detecting system and method
GB9107825D0 (en) * 1991-04-12 1991-05-29 Renishaw Metrology Ltd Stylus counterbalancing mechanism for a measuring probe

Also Published As

Publication number Publication date
EP0673498A1 (de) 1995-09-27
WO1994008204A1 (en) 1994-04-14
EP0673498A4 (de) 1996-12-11
JP3559828B2 (ja) 2004-09-02
US5309755A (en) 1994-05-10
EP0673498B1 (de) 1999-12-15
JPH08502357A (ja) 1996-03-12
DE69327336D1 (de) 2000-01-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee