DE69318251T2 - Weichmagnetischer mehrschichtiger Dünnfilm zum Gebrauch in einem Dünnfilmmagnetkopf und Herstellungsverfahren dafür - Google Patents

Weichmagnetischer mehrschichtiger Dünnfilm zum Gebrauch in einem Dünnfilmmagnetkopf und Herstellungsverfahren dafür

Info

Publication number
DE69318251T2
DE69318251T2 DE69318251T DE69318251T DE69318251T2 DE 69318251 T2 DE69318251 T2 DE 69318251T2 DE 69318251 T DE69318251 T DE 69318251T DE 69318251 T DE69318251 T DE 69318251T DE 69318251 T2 DE69318251 T2 DE 69318251T2
Authority
DE
Germany
Prior art keywords
thin film
manufacturing
method therefor
magnetic head
soft magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69318251T
Other languages
English (en)
Other versions
DE69318251D1 (de
Inventor
Nobuyuki Komura
Yuuji Omata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69318251D1 publication Critical patent/DE69318251D1/de
Publication of DE69318251T2 publication Critical patent/DE69318251T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3113—Details for improving the magnetic domain structure or avoiding the formation or displacement of undesirable magnetic domains
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/24—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates from liquids
    • H01F41/26—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates from liquids using electric currents, e.g. electroplating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/90—Magnetic feature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/11—Magnetic recording head
    • Y10T428/1107—Magnetoresistive
    • Y10T428/1121—Multilayer
    • Y10T428/1129—Super lattice [e.g., giant magneto resistance [GMR] or colossal magneto resistance [CMR], etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
    • Y10T428/12826—Group VIB metal-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
    • Y10T428/12826—Group VIB metal-base component
    • Y10T428/12847—Cr-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
    • Y10T428/12826—Group VIB metal-base component
    • Y10T428/12847—Cr-base component
    • Y10T428/12854—Next to Co-, Fe-, or Ni-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12931—Co-, Fe-, or Ni-base components, alternative to each other

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nanotechnology (AREA)
  • Magnetic Heads (AREA)
  • Thin Magnetic Films (AREA)
DE69318251T 1992-11-02 1993-11-02 Weichmagnetischer mehrschichtiger Dünnfilm zum Gebrauch in einem Dünnfilmmagnetkopf und Herstellungsverfahren dafür Expired - Fee Related DE69318251T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4294108A JPH06151171A (ja) 1992-11-02 1992-11-02 軟磁性薄膜体とその製造方法およびそれを用いた磁気ヘッド

Publications (2)

Publication Number Publication Date
DE69318251D1 DE69318251D1 (de) 1998-06-04
DE69318251T2 true DE69318251T2 (de) 1998-11-05

Family

ID=17803396

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69318251T Expired - Fee Related DE69318251T2 (de) 1992-11-02 1993-11-02 Weichmagnetischer mehrschichtiger Dünnfilm zum Gebrauch in einem Dünnfilmmagnetkopf und Herstellungsverfahren dafür

Country Status (4)

Country Link
US (2) US5575897A (de)
EP (1) EP0596448B1 (de)
JP (1) JPH06151171A (de)
DE (1) DE69318251T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19915226A1 (de) * 1999-04-03 2000-10-26 Forschungszentrum Juelich Gmbh Magnetflußsensor mit schleifenförmigem Magnetfeldleiter sowie dessen Herstellung

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2774337B1 (fr) 1998-01-30 2000-06-16 Valeo Vision Element de fixation intermediaire pour le montage d'un reflecteur sur une partie d'appui d'un projecteur
FR2781277B1 (fr) 1998-07-17 2000-09-29 Valeo Vision Element de fixation intermediaire pour le montage d'un element sur une partie d'appui d'un projecteur de vehicule automobile
FR2787554B1 (fr) 1998-12-16 2001-03-09 Valeo Vision Element de fixation intermediaire d'un reflecteur sur une partie d'appui d'un projecteur de vehicule automobile, et projecteur comprenant un tel element
GB2356870A (en) * 1999-12-01 2001-06-06 Secr Defence Dissolution of metal structures
US6667118B1 (en) 2000-09-05 2003-12-23 Seagate Technology Llc Texture-induced magnetic anisotropy of soft underlayers for perpendicular recording media
US6776891B2 (en) * 2001-05-18 2004-08-17 Headway Technologies, Inc. Method of manufacturing an ultra high saturation moment soft magnetic thin film
US6956233B2 (en) * 2002-08-26 2005-10-18 Sin-Etsu Chemical Co., Ltd. Plated substrate for hard disk medium
US7135103B2 (en) * 2003-10-20 2006-11-14 Waseda University Preparation of soft magnetic thin film
JP4436175B2 (ja) * 2004-04-05 2010-03-24 信越化学工業株式会社 金属メッキ層付き単結晶Ｓｉ基板
US20070047140A1 (en) * 2005-08-29 2007-03-01 Tabakovic Ibro M Electroplated multiple layer soft magnetic materials with high magnetic moment

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4587176A (en) * 1985-01-14 1986-05-06 E. I. Du Pont De Nemours And Company Layered coherent structures for magnetic recording
US4663685A (en) * 1985-08-15 1987-05-05 International Business Machines Magnetoresistive read transducer having patterned longitudinal bias
JPH06105669B2 (ja) * 1987-05-22 1994-12-21 株式会社安川電機 磁性膜の製造方法
DE3882832T2 (de) * 1987-06-30 1994-02-10 Sony Corp Weicheisenmagnet-Dünnfilme.
US4929514A (en) * 1988-03-22 1990-05-29 Hewlett-Packard Company Thin film media for high density longitudinal magnetic recording
US5236791A (en) * 1988-08-31 1993-08-17 Hitachi, Ltd. Magnetic recording medium and magnetic storage
US5001586A (en) * 1989-08-01 1991-03-19 International Business Machines Corporation Very low noise magnetoresistive sensor for high density media applications
US5576099A (en) * 1990-02-09 1996-11-19 International Business Machines Corporation Inductive head lamination with layer of magnetic quenching material
JPH05109572A (ja) * 1991-10-15 1993-04-30 Matsushita Electric Ind Co Ltd 軟磁性薄膜およびその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19915226A1 (de) * 1999-04-03 2000-10-26 Forschungszentrum Juelich Gmbh Magnetflußsensor mit schleifenförmigem Magnetfeldleiter sowie dessen Herstellung
DE19915226C2 (de) * 1999-04-03 2003-06-12 Forschungszentrum Juelich Gmbh Magnetflußsensor mit schleifenförmigen Magnetfeldleiter sowie dessen Herstellung und Verwendung

Also Published As

Publication number Publication date
EP0596448A3 (en) 1995-12-13
US5612146A (en) 1997-03-18
EP0596448B1 (de) 1998-04-29
JPH06151171A (ja) 1994-05-31
DE69318251D1 (de) 1998-06-04
US5575897A (en) 1996-11-19
EP0596448A2 (de) 1994-05-11

Similar Documents

Publication Publication Date Title
DE69117323T2 (de) Dünnfilm-Magnetkopf mit schmaler Spurbreite und dessen Herstellungsverfahren
SG47667A1 (en) Thin film magnetic head and method for manufacturing such a head
DE69321930D1 (de) Geschichtete magnetische Struktur zum Gebrauch in einem Magnetkopf
SG46462A1 (en) Thin film magnetic head having a protective coating and method for making same
DE69213558T2 (de) Magnetkopf und Herstellungsverfahren eines solchen Kopfes
DE69419642T2 (de) Herstellungsverfahren eines Dünnfilmmagnetkopfes und danach hergestellter Magnetkopf
DE69405957T2 (de) Verfahren und Vorrichtung zum Aufspulen eines schmalen Bandes
DE69409218D1 (de) Verfahren und Vorrichtung zum Wickeln eines Bandes
DE69318251T2 (de) Weichmagnetischer mehrschichtiger Dünnfilm zum Gebrauch in einem Dünnfilmmagnetkopf und Herstellungsverfahren dafür
DE69420766T2 (de) Herstellungsverfahren eines Dünnfilmmagnetkopfes und danach hergestellter Magnetkopf
DE69428227D1 (de) Weichmagnetischer Mehrschichtfilm für einen Magnetkopf
GB2287353B (en) Method for manufacturing thin film magnetic head
EP0385023A3 (en) A thin film magnetic read/write head and method of forming the same
SG38835A1 (en) Magnetic head magnetic read/write apparatus and method for manufacturing magnetic head
GB2299773B (en) Jig for headpiece aggregate machining and method for manufacturing a thin film magnetic head
DE69228274D1 (de) Dünnfilmmagnetkopf und Herstellungsverfahren
GB2304967B (en) Method for manufacturing a thin film magnetic head
DE68914100T2 (de) Weichmagnetischer Mehrschichtfilm und mit einem derartigen weichmagnetischen Mehrschichtfilm versehener Magnetkopf.
DE69421232T2 (de) Gerät mit Magnetkopf und Herstellungsverfahren
DE69419390T2 (de) Magnetkopf mit einer Kopfseite und einer Dünnfilmstruktur und Magnetkopfherstellungsverfahren
GB2251405B (en) Apparatus for use in disc manufacture and a method thereof
DE69315271T2 (de) Magnetkopf mit einer Mehrschichtstruktur und Verfahren zum Herstellen des Magnetkopfes
DE69514585T2 (de) Aufzeichnungs- oder Wiedergabevorrichtung mit Magnetköpfen und Herstellungsverfahren
KR970002881A (ko) 멀티채널형 박막 자기헤드 및 그 제조방법
DE69115573T2 (de) Verfahren und Gerät zum Aufwickeln eines Magnetbandes

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee