DE69306314D1 - Angular velocity sensor and method for its production - Google Patents

Angular velocity sensor and method for its production

Info

Publication number
DE69306314D1
DE69306314D1 DE69306314T DE69306314T DE69306314D1 DE 69306314 D1 DE69306314 D1 DE 69306314D1 DE 69306314 T DE69306314 T DE 69306314T DE 69306314 T DE69306314 T DE 69306314T DE 69306314 D1 DE69306314 D1 DE 69306314D1
Authority
DE
Germany
Prior art keywords
production
angular velocity
velocity sensor
sensor
angular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69306314T
Other languages
German (de)
Other versions
DE69306314T2 (en
Inventor
Peter Edward Michael Frere
Russell William Craddock
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZF International UK Ltd
Original Assignee
Lucas Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucas Industries Ltd filed Critical Lucas Industries Ltd
Application granted granted Critical
Publication of DE69306314D1 publication Critical patent/DE69306314D1/en
Publication of DE69306314T2 publication Critical patent/DE69306314T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5628—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
DE69306314T 1992-06-06 1993-05-18 Angular velocity sensor and method for its production Expired - Fee Related DE69306314T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929212099A GB9212099D0 (en) 1992-06-06 1992-06-06 Angular rate sensor and method of production thereof

Publications (2)

Publication Number Publication Date
DE69306314D1 true DE69306314D1 (en) 1997-01-16
DE69306314T2 DE69306314T2 (en) 1997-04-10

Family

ID=10716715

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69306314T Expired - Fee Related DE69306314T2 (en) 1992-06-06 1993-05-18 Angular velocity sensor and method for its production

Country Status (6)

Country Link
US (1) US5537872A (en)
EP (1) EP0574143B1 (en)
JP (1) JPH0634649A (en)
DE (1) DE69306314T2 (en)
ES (1) ES2098663T3 (en)
GB (1) GB9212099D0 (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5488862A (en) * 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
JP3392959B2 (en) * 1994-11-01 2003-03-31 富士通株式会社 Tuning fork vibrating gyroscope and sensor system using the same
US5861705A (en) * 1994-11-01 1999-01-19 Fujitsu Limited Tuning-fork vibratory gyro and sensor system using the same
DE19528961C2 (en) 1995-08-08 1998-10-29 Daimler Benz Ag Micromechanical rotation rate sensor (DRS) and sensor arrangement
JP3811304B2 (en) 1998-11-25 2006-08-16 株式会社日立製作所 Displacement sensor and manufacturing method thereof
US6257057B1 (en) * 1998-12-16 2001-07-10 L-3 Communications Corporation Epitaxial coriolis rate sensor
US6433401B1 (en) 1999-04-06 2002-08-13 Analog Devices Imi, Inc. Microfabricated structures with trench-isolation using bonded-substrates and cavities
US6189381B1 (en) 1999-04-26 2001-02-20 Sitek, Inc. Angular rate sensor made from a structural wafer of single crystal silicon
US7089792B2 (en) * 2002-02-06 2006-08-15 Analod Devices, Inc. Micromachined apparatus utilizing box suspensions
JP4392246B2 (en) * 2002-02-06 2009-12-24 アナログ・デバイスズ・インク Micromachined gyroscope
JP3807437B2 (en) * 2002-06-10 2006-08-09 松下電器産業株式会社 Angular velocity sensor
US7091451B2 (en) 2003-06-20 2006-08-15 Northrop Grumman Corporation Heating element induction of time-varying thermal gradient in elongated beam to cause one or more elongated beam oscillations
EP1735590B1 (en) * 2004-04-14 2013-11-27 Analog Devices, Inc. Coupling apparatus for inertial sensors
US7478557B2 (en) * 2004-10-01 2009-01-20 Analog Devices, Inc. Common centroid micromachine driver
US7421897B2 (en) 2005-04-14 2008-09-09 Analog Devices, Inc. Cross-quad and vertically coupled inertial sensors
DE102005045378A1 (en) * 2005-09-22 2007-03-29 Eads Deutschland Gmbh Angular rate sensor for vehicle, has selection oscillator with tines that are arranged at distance and are connected with each other by base, where direct voltage is applied to excitation oscillator that is provided with electrodes
DE102005045379A1 (en) * 2005-09-22 2007-03-29 Eads Deutschland Gmbh Rotary rate sensor for determining angular speed of article, has excitation oscillator with two prongs connected to base by bridge, which is arranged to displace excitation unit and prongs in lateral oscillation
EP1783094A1 (en) * 2005-11-04 2007-05-09 Infineon Technologies SensoNor AS Excitation in micromechanical devices
US20080042475A1 (en) * 2006-07-21 2008-02-21 Wright Douglas G Folding table and chair
DE102007018834A1 (en) 2007-04-20 2008-10-23 Eads Deutschland Gmbh Yaw rate sensor
US20100109341A1 (en) * 2008-11-06 2010-05-06 Cedar Ridge Research Llc System and method for generating power using angular kinetic energy
CN105158582B (en) * 2015-09-29 2018-03-09 北京工业大学 One kind becomes spacing interdigitation adjacent capacitive sensors

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4381672A (en) * 1981-03-04 1983-05-03 The Bendix Corporation Vibrating beam rotation sensor
US4654663A (en) * 1981-11-16 1987-03-31 Piezoelectric Technology Investors, Ltd. Angular rate sensor system
US4538461A (en) * 1984-01-23 1985-09-03 Piezoelectric Technology Investors, Inc. Vibratory angular rate sensing system
US4598585A (en) * 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
US4744248A (en) * 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
GB2198231B (en) * 1986-11-28 1990-06-06 Stc Plc Rotational motion sensor
GB8716047D0 (en) * 1987-07-08 1987-08-12 Thorn Emi Electronics Ltd Rate sensor
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
WO1993000589A1 (en) * 1991-06-25 1993-01-07 Sundstrand Corporation Coriolis rate sensor using tunnel-effect displacement sensor

Also Published As

Publication number Publication date
US5537872A (en) 1996-07-23
JPH0634649A (en) 1994-02-10
ES2098663T3 (en) 1997-05-01
GB9212099D0 (en) 1992-07-22
DE69306314T2 (en) 1997-04-10
EP0574143B1 (en) 1996-12-04
EP0574143A1 (en) 1993-12-15

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee