DE69225007D1 - Process for rendering exhaust gas harmless from a chemical vapor deposition process - Google Patents

Process for rendering exhaust gas harmless from a chemical vapor deposition process

Info

Publication number
DE69225007D1
DE69225007D1 DE69225007T DE69225007T DE69225007D1 DE 69225007 D1 DE69225007 D1 DE 69225007D1 DE 69225007 T DE69225007 T DE 69225007T DE 69225007 T DE69225007 T DE 69225007T DE 69225007 D1 DE69225007 D1 DE 69225007D1
Authority
DE
Germany
Prior art keywords
exhaust gas
vapor deposition
chemical vapor
gas harmless
deposition process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69225007T
Other languages
German (de)
Other versions
DE69225007T2 (en
Inventor
Akira Fukunaga
Yasuji Okayasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE69225007D1 publication Critical patent/DE69225007D1/en
Publication of DE69225007T2 publication Critical patent/DE69225007T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8671—Removing components of defined structure not provided for in B01D53/8603 - B01D53/8668
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
DE69225007T 1991-01-18 1992-01-09 Process for rendering exhaust gas harmless from a chemical vapor deposition process Expired - Fee Related DE69225007T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3016745A JP2505985B2 (en) 1991-01-18 1991-01-18 Removal method of CVD exhaust gas

Publications (2)

Publication Number Publication Date
DE69225007D1 true DE69225007D1 (en) 1998-05-14
DE69225007T2 DE69225007T2 (en) 1998-08-06

Family

ID=11924809

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69225007T Expired - Fee Related DE69225007T2 (en) 1991-01-18 1992-01-09 Process for rendering exhaust gas harmless from a chemical vapor deposition process

Country Status (4)

Country Link
EP (1) EP0495392B1 (en)
JP (1) JP2505985B2 (en)
KR (1) KR100266830B1 (en)
DE (1) DE69225007T2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2651779B2 (en) * 1993-03-19 1997-09-10 ニチアス株式会社 How to remove trace acetaldehyde from air
JP3340510B2 (en) * 1993-05-19 2002-11-05 日本パイオニクス株式会社 Hazardous gas purification method
GB9913970D0 (en) * 1999-06-16 1999-08-18 Boc Group Plc Semiconductor processing exhaust abatement
TW510820B (en) * 1999-11-30 2002-11-21 Japan Pionics Method of cleaning of harmful gas and cleaning apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4448757A (en) * 1982-04-26 1984-05-15 Deltech Engineering, Inc. Process for removing contaminants from compressed air
CA1279861C (en) * 1986-05-12 1991-02-05 Karl T. Chuang Catalyst assembly
FR2629362B1 (en) * 1988-03-30 1991-02-01 Air Liquide PROCESS OF DESTRUCTION OF HYDRIDES CONTAINED IN A WASTE GAS AND CATALYST FOR ITS IMPLEMENTATION
JP2613926B2 (en) * 1988-08-26 1997-05-28 株式会社日本触媒 Exhaust gas purification device

Also Published As

Publication number Publication date
KR100266830B1 (en) 2001-11-22
KR920014506A (en) 1992-08-25
EP0495392A1 (en) 1992-07-22
DE69225007T2 (en) 1998-08-06
EP0495392B1 (en) 1998-04-08
JP2505985B2 (en) 1996-06-12
JPH04341323A (en) 1992-11-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee