DE69201146D1 - Autonomer Behälter für Vakuumsbehandlung eines Objekts und Übertragungsschleuse. - Google Patents

Autonomer Behälter für Vakuumsbehandlung eines Objekts und Übertragungsschleuse.

Info

Publication number
DE69201146D1
DE69201146D1 DE69201146T DE69201146T DE69201146D1 DE 69201146 D1 DE69201146 D1 DE 69201146D1 DE 69201146 T DE69201146 T DE 69201146T DE 69201146 T DE69201146 T DE 69201146T DE 69201146 D1 DE69201146 D1 DE 69201146D1
Authority
DE
Germany
Prior art keywords
vacuum treatment
transfer lock
autonomous container
autonomous
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69201146T
Other languages
English (en)
Other versions
DE69201146T2 (de
Inventor
Francoise Houzay
Jean-Marie Moison
Yves Nissim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orange SA
Original Assignee
France Telecom SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by France Telecom SA filed Critical France Telecom SA
Application granted granted Critical
Publication of DE69201146D1 publication Critical patent/DE69201146D1/de
Publication of DE69201146T2 publication Critical patent/DE69201146T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67356—Closed carriers specially adapted for containing chips, dies or ICs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67363—Closed carriers specially adapted for containing substrates other than wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67386—Closed carriers characterised by the construction of the closed carrier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Pipeline Systems (AREA)
DE69201146T 1991-03-14 1992-03-12 Autonomer Behälter für Vakuumsbehandlung eines Objekts und Übertragungsschleuse. Expired - Fee Related DE69201146T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9103115A FR2673918B1 (fr) 1991-03-14 1991-03-14 Conteneur autonome pour le traitement sous vide d'un objet, et son sas de transfert.

Publications (2)

Publication Number Publication Date
DE69201146D1 true DE69201146D1 (de) 1995-02-23
DE69201146T2 DE69201146T2 (de) 1995-08-03

Family

ID=9410739

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69201146T Expired - Fee Related DE69201146T2 (de) 1991-03-14 1992-03-12 Autonomer Behälter für Vakuumsbehandlung eines Objekts und Übertragungsschleuse.

Country Status (5)

Country Link
US (1) US5260547A (de)
EP (1) EP0504053B1 (de)
JP (1) JPH0599140A (de)
DE (1) DE69201146T2 (de)
FR (1) FR2673918B1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2548062B2 (ja) * 1992-11-13 1996-10-30 日本エー・エス・エム株式会社 縦型熱処理装置用ロードロックチャンバー
TW277139B (de) 1993-09-16 1996-06-01 Hitachi Seisakusyo Kk
US6105435A (en) 1997-10-24 2000-08-22 Cypress Semiconductor Corp. Circuit and apparatus for verifying a chamber seal, and method of depositing a material onto a substrate using the same
WO2001014219A1 (en) 1999-08-20 2001-03-01 Supreme Corq. Inc. Secondary synthetic closure for sealing corked bottles or containers
DE10164529C1 (de) * 2001-12-18 2003-10-09 Jenoptik Laser Optik Sys Gmbh Einrichtung zur Aufbewahrung und zum Transport von mindestens einem optischen Bauelement

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2212330A (en) * 1938-05-03 1940-08-20 Albert G Thomas Sterilizing device
US4030622A (en) * 1975-05-23 1977-06-21 Pass-Port Systems, Inc. Wafer transport system
US4137865A (en) * 1976-12-30 1979-02-06 Bell Telephone Laboratories, Incorporated Molecular beam apparatus for processing a plurality of substrates
DE93504T1 (de) * 1982-04-29 1984-04-12 Heraeus Quarzschmelze Gmbh, 6450 Hanau Vorrichtung zum einbringen von siliciumscheiben in magazine innerhalb eines ofens.
FR2549857B1 (fr) * 1983-07-26 1985-10-04 Allovon Michel Dispositif d'evaporation sous vide
US4687542A (en) * 1985-10-24 1987-08-18 Texas Instruments Incorporated Vacuum processing system
JPH0727875B2 (ja) * 1986-02-27 1995-03-29 株式会社ディスコ 縦型半導体熱処理装置への半導体基板の搬入出方法および外気混入防止装置
US4721836A (en) * 1986-05-14 1988-01-26 The United States Of America As Represented By The Secretary Of The Navy Apparatus for transient annealing of semiconductor samples in a controlled ambient
US4852516A (en) * 1986-05-19 1989-08-01 Machine Technology, Inc. Modular processing apparatus for processing semiconductor wafers
US4676884A (en) * 1986-07-23 1987-06-30 The Boc Group, Inc. Wafer processing machine with evacuated wafer transporting and storage system
US4861563A (en) * 1987-05-14 1989-08-29 Spectrum Cvd, Inc. Vacuum load lock
US4831270A (en) * 1987-05-21 1989-05-16 Ion Implant Services Ion implantation apparatus
US4768911A (en) * 1987-09-01 1988-09-06 Huntington Mechanical Laboratories, Inc. Device for moving objects within and between sealed chambers
JPH01185437A (ja) * 1988-01-20 1989-07-25 Horiba Ltd 真空チャンバの試料加熱装置
US4952299A (en) * 1988-10-31 1990-08-28 Eaton Corporation Wafer handling apparatus
US5076205A (en) * 1989-01-06 1991-12-31 General Signal Corporation Modular vapor processor system
US4976612A (en) * 1989-06-20 1990-12-11 Automated Wafer Systems Purge tube with floating end cap for loading silicon wafers into a furnace

Also Published As

Publication number Publication date
FR2673918B1 (fr) 1993-05-28
JPH0599140A (ja) 1993-04-20
FR2673918A1 (fr) 1992-09-18
EP0504053A1 (de) 1992-09-16
DE69201146T2 (de) 1995-08-03
US5260547A (en) 1993-11-09
EP0504053B1 (de) 1995-01-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee