DE69106036D1 - Erhöhte Leistung von Alumina zur Entfernung von niedrig konzentriertem Fluor aus Gasströmen. - Google Patents

Erhöhte Leistung von Alumina zur Entfernung von niedrig konzentriertem Fluor aus Gasströmen.

Info

Publication number
DE69106036D1
DE69106036D1 DE69106036T DE69106036T DE69106036D1 DE 69106036 D1 DE69106036 D1 DE 69106036D1 DE 69106036 T DE69106036 T DE 69106036T DE 69106036 T DE69106036 T DE 69106036T DE 69106036 D1 DE69106036 D1 DE 69106036D1
Authority
DE
Germany
Prior art keywords
alumina
gas streams
increased performance
remove low
concentration fluorine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69106036T
Other languages
English (en)
Other versions
DE69106036T2 (de
Inventor
Paul Sarantis Leondaridis
Drasek William Anthony Von
Gregory Michael Jursich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Application granted granted Critical
Publication of DE69106036D1 publication Critical patent/DE69106036D1/de
Publication of DE69106036T2 publication Critical patent/DE69106036T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
  • Catalysts (AREA)
DE69106036T 1990-04-23 1991-03-20 Erhöhte Leistung von Alumina zur Entfernung von niedrig konzentriertem Fluor aus Gasströmen. Expired - Fee Related DE69106036T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/512,410 US5063035A (en) 1990-04-23 1990-04-23 Enhanced performance of alumina for the removal of low-level fluorine from gas streams

Publications (2)

Publication Number Publication Date
DE69106036D1 true DE69106036D1 (de) 1995-02-02
DE69106036T2 DE69106036T2 (de) 1995-05-04

Family

ID=24038968

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69106036T Expired - Fee Related DE69106036T2 (de) 1990-04-23 1991-03-20 Erhöhte Leistung von Alumina zur Entfernung von niedrig konzentriertem Fluor aus Gasströmen.

Country Status (5)

Country Link
US (1) US5063035A (de)
EP (1) EP0455521B1 (de)
JP (1) JP3086275B2 (de)
CA (1) CA2040883A1 (de)
DE (1) DE69106036T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IS3896A (is) * 1991-08-07 1993-02-08 Comalco Aluminium Limited Hreinsun á loftkenndum flúoríðum úr útblæstri iðjuvera
US20010009652A1 (en) * 1998-05-28 2001-07-26 Jose I. Arno Apparatus and method for point-of-use abatement of fluorocompounds
US6273935B1 (en) * 1999-06-01 2001-08-14 Taiwan Semiconductor Manufacturing Company, Ltd. Apparatus and method for trapping a toxic gas
US9155988B2 (en) * 2013-03-14 2015-10-13 Universal Laser Systems, Inc. Multi-stage air filtration systems and associated apparatuses and methods
US11754541B2 (en) 2017-09-25 2023-09-12 Cymer, Llc Fluorine detection in a gas discharge light source
CN115845793B (zh) * 2023-01-05 2024-03-29 烟台大学 一种高表面积高孔容积有序介孔固氟剂制备方法及应用

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3852406A (en) * 1967-06-20 1974-12-03 Messer Griesheim Gmbh Method of removing oxygen from gases
US3760565A (en) * 1971-07-19 1973-09-25 Aluminum Co Of America Anti-pollution method
JPS527370A (en) * 1975-07-01 1977-01-20 Asahi Glass Co Ltd Process for decomposing organic compounds containing halogens
US4036940A (en) * 1975-12-29 1977-07-19 Monsanto Company Recovery of iodine
US4292287A (en) * 1980-04-24 1981-09-29 The United States Of America As Represented By The United States Department Of Energy Method for directly recovering fluorine from gas streams
GB2118923B (en) * 1980-05-30 1984-04-11 Tilghman Wheelabrator Ltd Apparatus for use in adsorbing gaseous fluorine on particles of alumina

Also Published As

Publication number Publication date
US5063035A (en) 1991-11-05
EP0455521B1 (de) 1994-12-21
DE69106036T2 (de) 1995-05-04
CA2040883A1 (en) 1991-10-24
JP3086275B2 (ja) 2000-09-11
EP0455521A1 (de) 1991-11-06
JPH04227817A (ja) 1992-08-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee