DE69026926T2 - Method and device for the interference-free measurement of micro-defects in materials - Google Patents

Method and device for the interference-free measurement of micro-defects in materials

Info

Publication number
DE69026926T2
DE69026926T2 DE69026926T DE69026926T DE69026926T2 DE 69026926 T2 DE69026926 T2 DE 69026926T2 DE 69026926 T DE69026926 T DE 69026926T DE 69026926 T DE69026926 T DE 69026926T DE 69026926 T2 DE69026926 T2 DE 69026926T2
Authority
DE
Germany
Prior art keywords
defects
micro
interference
materials
free measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69026926T
Other languages
German (de)
Other versions
DE69026926D1 (en
Inventor
Robert M Silva
Jr Robert B Sledge
Jr Fred D Orazio
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VTI Inc
Original Assignee
VTI Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VTI Inc filed Critical VTI Inc
Priority claimed from EP90300958A external-priority patent/EP0439881B1/en
Application granted granted Critical
Publication of DE69026926D1 publication Critical patent/DE69026926D1/en
Publication of DE69026926T2 publication Critical patent/DE69026926T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G01N21/9505—Wafer internal defects, e.g. microcracks
DE69026926T 1990-01-30 1990-01-30 Method and device for the interference-free measurement of micro-defects in materials Expired - Fee Related DE69026926T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP90300958A EP0439881B1 (en) 1988-07-13 1990-01-30 Method and apparatus for nondestructively measuring micro defects in materials

Publications (2)

Publication Number Publication Date
DE69026926D1 DE69026926D1 (en) 1996-06-13
DE69026926T2 true DE69026926T2 (en) 1996-09-12

Family

ID=8205280

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69026926T Expired - Fee Related DE69026926T2 (en) 1990-01-30 1990-01-30 Method and device for the interference-free measurement of micro-defects in materials

Country Status (1)

Country Link
DE (1) DE69026926T2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012102756A1 (en) * 2012-03-30 2013-10-02 Hseb Dresden Gmbh Method for detecting buried layers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012102756A1 (en) * 2012-03-30 2013-10-02 Hseb Dresden Gmbh Method for detecting buried layers
US9500582B2 (en) 2012-03-30 2016-11-22 Hseb Dresden Gmbh Method for detecting buried layers

Also Published As

Publication number Publication date
DE69026926D1 (en) 1996-06-13

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Legal Events

Date Code Title Description
8328 Change in the person/name/address of the agent

Free format text: DERZEIT KEIN VERTRETER BESTELLT

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee