DE69024207D1 - STRUCTURE OF A PIEZOELECTRIC RESONATOR FROM AN ULTRA-THIN LAYER - Google Patents
STRUCTURE OF A PIEZOELECTRIC RESONATOR FROM AN ULTRA-THIN LAYERInfo
- Publication number
- DE69024207D1 DE69024207D1 DE69024207T DE69024207T DE69024207D1 DE 69024207 D1 DE69024207 D1 DE 69024207D1 DE 69024207 T DE69024207 T DE 69024207T DE 69024207 T DE69024207 T DE 69024207T DE 69024207 D1 DE69024207 D1 DE 69024207D1
- Authority
- DE
- Germany
- Prior art keywords
- ultra
- thin layer
- piezoelectric resonator
- resonator
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
- H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/174—Membranes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP02029935A JP3102869B2 (en) | 1990-02-09 | 1990-02-09 | Structure of ultra-thin piezoelectric resonator |
PCT/JP1990/001273 WO1991012662A1 (en) | 1990-02-09 | 1990-10-02 | Structure of ultra-thin sheet piezoresonator |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69024207D1 true DE69024207D1 (en) | 1996-01-25 |
DE69024207T2 DE69024207T2 (en) | 1996-05-02 |
Family
ID=12289845
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69024207T Expired - Fee Related DE69024207T2 (en) | 1990-02-09 | 1990-10-02 | STRUCTURE OF A PIEZOELECTRIC RESONATOR FROM AN ULTRA-THIN LAYER |
Country Status (6)
Country | Link |
---|---|
US (1) | US5218328A (en) |
EP (2) | EP0468051B1 (en) |
JP (1) | JP3102869B2 (en) |
KR (1) | KR940011487B1 (en) |
DE (1) | DE69024207T2 (en) |
WO (1) | WO1991012662A1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5617065A (en) * | 1995-06-29 | 1997-04-01 | Motorola, Inc. | Filter using enhanced quality factor resonator and method |
CN1459128A (en) * | 2000-07-17 | 2003-11-26 | 长浦善昭 | Piezoelectric device and acousto-electric transducer and method for manufacturing the same |
JP2004080711A (en) * | 2002-08-22 | 2004-03-11 | Nippon Dempa Kogyo Co Ltd | Supporting structure of quartz resonator |
US7098574B2 (en) * | 2002-11-08 | 2006-08-29 | Toyo Communication Equipment Co., Ltd. | Piezoelectric resonator and method for manufacturing the same |
RU2234186C1 (en) * | 2003-04-24 | 2004-08-10 | Мацак Андрей Николаевич | High-frequency piezoid |
US7568377B2 (en) * | 2005-07-28 | 2009-08-04 | University Of South Florida | High frequency thickness shear mode acoustic wave sensor for gas and organic vapor detection |
JP2008078717A (en) * | 2006-09-19 | 2008-04-03 | Nec Tokin Corp | Noise filter and switching power source |
US8618722B2 (en) * | 2009-09-18 | 2013-12-31 | Daishinku Corporation | Piezoelectric resonator plate and manufacturing method for piezoelectric resonator plate |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3453458A (en) * | 1965-04-19 | 1969-07-01 | Clevite Corp | Resonator supporting structure |
US3694677A (en) * | 1971-03-03 | 1972-09-26 | Us Army | Vhf-uhf piezoelectric resonators |
JPS5312292A (en) * | 1976-07-21 | 1978-02-03 | Seiko Instr & Electronics Ltd | Thickness slide crystal vibrator |
JPS54107293A (en) * | 1978-02-10 | 1979-08-22 | Nec Corp | Crystal oscillator |
FR2527865A1 (en) * | 1982-06-01 | 1983-12-02 | Cepe | HIGH FREQUENCY PIEZOELECTRIC RESONATOR AND MANUFACTURING METHOD THEREOF |
JPS60232710A (en) * | 1984-05-01 | 1985-11-19 | Murata Mfg Co Ltd | Piezoelectric vibrator |
JPS613513A (en) * | 1984-06-18 | 1986-01-09 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrator |
JP2643180B2 (en) * | 1987-09-21 | 1997-08-20 | 日本電気株式会社 | Monolithic integrated circuit |
-
1990
- 1990-02-09 JP JP02029935A patent/JP3102869B2/en not_active Expired - Fee Related
- 1990-10-02 KR KR1019900702673A patent/KR940011487B1/en not_active IP Right Cessation
- 1990-10-02 WO PCT/JP1990/001273 patent/WO1991012662A1/en active IP Right Grant
- 1990-10-02 DE DE69024207T patent/DE69024207T2/en not_active Expired - Fee Related
- 1990-10-02 EP EP90914424A patent/EP0468051B1/en not_active Expired - Lifetime
- 1990-10-02 EP EP94118006A patent/EP0644652A2/en not_active Withdrawn
- 1990-10-02 US US07/768,909 patent/US5218328A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0644652A2 (en) | 1995-03-22 |
US5218328A (en) | 1993-06-08 |
KR940011487B1 (en) | 1994-12-19 |
DE69024207T2 (en) | 1996-05-02 |
WO1991012662A1 (en) | 1991-08-22 |
JPH03235408A (en) | 1991-10-21 |
KR920702072A (en) | 1992-08-12 |
JP3102869B2 (en) | 2000-10-23 |
EP0468051A1 (en) | 1992-01-29 |
EP0468051A4 (en) | 1992-05-13 |
EP0644652A3 (en) | 1995-04-05 |
EP0468051B1 (en) | 1995-12-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |