DE69010892D1 - Verfahren zur herstellung von nitrosylfluorid. - Google Patents
Verfahren zur herstellung von nitrosylfluorid.Info
- Publication number
- DE69010892D1 DE69010892D1 DE69010892T DE69010892T DE69010892D1 DE 69010892 D1 DE69010892 D1 DE 69010892D1 DE 69010892 T DE69010892 T DE 69010892T DE 69010892 T DE69010892 T DE 69010892T DE 69010892 D1 DE69010892 D1 DE 69010892D1
- Authority
- DE
- Germany
- Prior art keywords
- nitrosyl fluoride
- producing nitrosyl
- producing
- fluoride
- nitrosyl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/18—Stationary reactors having moving elements inside
- B01J19/1868—Stationary reactors having moving elements inside resulting in a loop-type movement
- B01J19/1881—Stationary reactors having moving elements inside resulting in a loop-type movement externally, i.e. the mixture leaving the vessel and subsequently re-entering it
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/0015—Feeding of the particles in the reactor; Evacuation of the particles out of the reactor
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
- C01B21/084—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms containing also one or more oxygen atoms, e.g. nitrosyl halides
- C01B21/0842—Halides of nitrogen oxides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00074—Controlling the temperature by indirect heating or cooling employing heat exchange fluids
- B01J2219/00087—Controlling the temperature by indirect heating or cooling employing heat exchange fluids with heat exchange elements outside the reactor
- B01J2219/00103—Controlling the temperature by indirect heating or cooling employing heat exchange fluids with heat exchange elements outside the reactor in a heat exchanger separate from the reactor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00074—Controlling the temperature by indirect heating or cooling employing heat exchange fluids
- B01J2219/00105—Controlling the temperature by indirect heating or cooling employing heat exchange fluids part or all of the reactants being heated or cooled outside the reactor while recycling
- B01J2219/0011—Controlling the temperature by indirect heating or cooling employing heat exchange fluids part or all of the reactants being heated or cooled outside the reactor while recycling involving reactant liquids
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/316,024 US4908270A (en) | 1989-02-27 | 1989-02-27 | Continuous preparation of nitrosyl fluoride |
US07/474,905 US4996035A (en) | 1989-02-27 | 1990-02-05 | Preparation of nitrosyl fluoride |
PCT/US1990/001032 WO1990009958A1 (en) | 1989-02-27 | 1990-02-27 | Preparation of nitrosyl fluoride |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69010892D1 true DE69010892D1 (de) | 1994-08-25 |
DE69010892T2 DE69010892T2 (de) | 1995-03-09 |
Family
ID=26980191
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69010892T Expired - Fee Related DE69010892T2 (de) | 1989-02-27 | 1990-02-27 | Verfahren zur herstellung von nitrosylfluorid. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4996035A (de) |
EP (1) | EP0460075B1 (de) |
AU (1) | AU5190390A (de) |
DE (1) | DE69010892T2 (de) |
WO (1) | WO1990009958A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4415337A1 (de) * | 1994-05-02 | 1995-11-09 | Bayer Ag | Verfahren zur kontinuierlichen Herstellung von Nitrosylchlorid |
US20030143846A1 (en) * | 2000-09-25 | 2003-07-31 | Akira Sekiya | Gas compositions for cleaning the interiors of reactors as well as for etching films of silicon- containing compounds |
US20200203127A1 (en) | 2018-12-20 | 2020-06-25 | L'Air Liquide, Société Anonyme pour I'Etude et I'Exploitation des Procédés Georges Claude | Systems and methods for storage and supply of f3no-free fno gases and f3no-free fno gas mixtures for semiconductor processes |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2366518A (en) * | 1941-12-26 | 1945-01-02 | Dow Chemical Co | Manufacture and use of nitrosyl chloride |
US3043662A (en) * | 1959-08-20 | 1962-07-10 | Du Pont | Method for producing nitrogen trifluoride, dinitrogen difluoride and nitrosyl fluoride |
US3085862A (en) * | 1960-03-08 | 1963-04-16 | Du Pont | Process for the production of dinitrogen fluoride and nitrosyl fluoride |
GB1280223A (en) * | 1969-04-21 | 1972-07-05 | Ici Ltd | Preparation of nitrosyl chloride |
IT1216748B (it) * | 1988-02-12 | 1990-03-08 | Enichem Sintesi | Procedimento per la produzione di floruro di nitrosile. |
US4908270A (en) * | 1989-02-27 | 1990-03-13 | Mallinckrodt, Inc. | Continuous preparation of nitrosyl fluoride |
-
1990
- 1990-02-05 US US07/474,905 patent/US4996035A/en not_active Expired - Fee Related
- 1990-02-27 DE DE69010892T patent/DE69010892T2/de not_active Expired - Fee Related
- 1990-02-27 EP EP90904170A patent/EP0460075B1/de not_active Expired - Lifetime
- 1990-02-27 AU AU51903/90A patent/AU5190390A/en not_active Abandoned
- 1990-02-27 WO PCT/US1990/001032 patent/WO1990009958A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
DE69010892T2 (de) | 1995-03-09 |
EP0460075A1 (de) | 1991-12-11 |
AU5190390A (en) | 1990-09-26 |
EP0460075B1 (de) | 1994-07-20 |
WO1990009958A1 (en) | 1990-09-07 |
US4996035A (en) | 1991-02-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |