DE69003308D1 - Null-Strömungssensor. - Google Patents
Null-Strömungssensor.Info
- Publication number
- DE69003308D1 DE69003308D1 DE90305864T DE69003308T DE69003308D1 DE 69003308 D1 DE69003308 D1 DE 69003308D1 DE 90305864 T DE90305864 T DE 90305864T DE 69003308 T DE69003308 T DE 69003308T DE 69003308 D1 DE69003308 D1 DE 69003308D1
- Authority
- DE
- Germany
- Prior art keywords
- flow sensor
- zero flow
- differential force
- substrate
- force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 abstract 2
- 239000012530 fluid Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
- G01F1/28—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow by drag-force, e.g. vane type or impact flowmeter
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB898912755A GB8912755D0 (en) | 1989-06-02 | 1989-06-02 | A"null"flow sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69003308D1 true DE69003308D1 (de) | 1993-10-21 |
DE69003308T2 DE69003308T2 (de) | 1994-04-07 |
Family
ID=10657801
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE90305864T Expired - Fee Related DE69003308T2 (de) | 1989-06-02 | 1990-05-30 | Null-Strömungssensor. |
Country Status (9)
Country | Link |
---|---|
US (1) | US5189918A (de) |
EP (1) | EP0400981B1 (de) |
JP (1) | JP2882664B2 (de) |
AT (1) | ATE94638T1 (de) |
AU (1) | AU631212B2 (de) |
CA (1) | CA2018124A1 (de) |
DE (1) | DE69003308T2 (de) |
ES (1) | ES2044439T3 (de) |
GB (1) | GB8912755D0 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2580150B1 (fr) * | 1985-03-22 | 1987-06-12 | Pidoux Michel | Procede pour produire des polysaccharides permettant notamment de preparer une boisson sucree fermentee ou kefir sucre |
JP3580827B2 (ja) * | 1996-01-22 | 2004-10-27 | カイロス・インク | 微細加工製作シリコン羽根型マイクロ流量計 |
SE9801766D0 (sv) * | 1998-05-19 | 1998-05-19 | Siemens Elema Ab | Fluid flow meter |
US6631648B2 (en) * | 2001-08-28 | 2003-10-14 | Wisconsin Alumni Research Foundation | Microfluidic flow sensing method and apparatus |
US6941823B1 (en) * | 2001-11-07 | 2005-09-13 | Veeco Instruments Inc. | Apparatus and method to compensate for stress in a microcantilever |
DE10339906B4 (de) * | 2003-08-29 | 2009-12-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Messapparatur für Strömungen |
DE10339907B4 (de) * | 2003-08-29 | 2006-09-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Optische Messapparatur und Messverfahren für Strömungen |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH642461A5 (fr) * | 1981-07-02 | 1984-04-13 | Centre Electron Horloger | Accelerometre. |
US4550616A (en) * | 1983-09-21 | 1985-11-05 | Honeywell Inc. | Pneumatic flow station |
US4598585A (en) * | 1984-03-19 | 1986-07-08 | The Charles Stark Draper Laboratory, Inc. | Planar inertial sensor |
EP0239703B1 (de) * | 1986-01-07 | 1991-06-05 | THORN EMI plc | Druckempfindlicher Durchflusssensor |
JPS63252257A (ja) * | 1986-11-20 | 1988-10-19 | Aisin Seiki Co Ltd | 加速度検出装置 |
GB8628611D0 (en) * | 1986-11-29 | 1987-03-18 | Accelerometer | Temperature sensing arrangement |
GB8720355D0 (en) * | 1987-08-28 | 1987-10-07 | Emi Plc Thorn | Measuring fluid density |
GB8720357D0 (en) * | 1987-08-28 | 1987-10-07 | Thorn Emi Flow Measurement Ltd | Fluid metering system |
-
1989
- 1989-06-02 GB GB898912755A patent/GB8912755D0/en active Pending
-
1990
- 1990-05-30 DE DE90305864T patent/DE69003308T2/de not_active Expired - Fee Related
- 1990-05-30 EP EP90305864A patent/EP0400981B1/de not_active Expired - Lifetime
- 1990-05-30 ES ES90305864T patent/ES2044439T3/es not_active Expired - Lifetime
- 1990-05-30 AT AT90305864T patent/ATE94638T1/de not_active IP Right Cessation
- 1990-06-01 JP JP2141714A patent/JP2882664B2/ja not_active Expired - Lifetime
- 1990-06-01 CA CA002018124A patent/CA2018124A1/en not_active Abandoned
- 1990-06-01 US US07/530,590 patent/US5189918A/en not_active Expired - Fee Related
- 1990-06-04 AU AU56244/90A patent/AU631212B2/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
EP0400981A3 (de) | 1991-05-29 |
JPH0324464A (ja) | 1991-02-01 |
JP2882664B2 (ja) | 1999-04-12 |
DE69003308T2 (de) | 1994-04-07 |
EP0400981A2 (de) | 1990-12-05 |
EP0400981B1 (de) | 1993-09-15 |
ES2044439T3 (es) | 1994-01-01 |
ATE94638T1 (de) | 1993-10-15 |
AU5624490A (en) | 1990-12-06 |
US5189918A (en) | 1993-03-02 |
GB8912755D0 (en) | 1989-07-19 |
CA2018124A1 (en) | 1990-12-02 |
AU631212B2 (en) | 1992-11-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: CENTRAL RESEARCH LABORATORIES LTD., HAYES, MIDDLES |
|
8339 | Ceased/non-payment of the annual fee |