DE60334980D1 - PLASMA-REINFORCED CHEMICAL VAPORING POLYMERIC REFLECTIVE COATING COATINGS - Google Patents

PLASMA-REINFORCED CHEMICAL VAPORING POLYMERIC REFLECTIVE COATING COATINGS

Info

Publication number
DE60334980D1
DE60334980D1 DE60334980T DE60334980T DE60334980D1 DE 60334980 D1 DE60334980 D1 DE 60334980D1 DE 60334980 T DE60334980 T DE 60334980T DE 60334980 T DE60334980 T DE 60334980T DE 60334980 D1 DE60334980 D1 DE 60334980D1
Authority
DE
Germany
Prior art keywords
vaporing
plasma
reflective coating
reinforced chemical
coating coatings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60334980T
Other languages
German (de)
Inventor
Ram W Sabnis
Wu-Sheng Shih
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brewer Science Inc
Original Assignee
Brewer Science Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/411,046 external-priority patent/US7132219B2/en
Application filed by Brewer Science Inc filed Critical Brewer Science Inc
Application granted granted Critical
Publication of DE60334980D1 publication Critical patent/DE60334980D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE60334980T 2002-04-11 2003-04-11 PLASMA-REINFORCED CHEMICAL VAPORING POLYMERIC REFLECTIVE COATING COATINGS Expired - Lifetime DE60334980D1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US37169302P 2002-04-11 2002-04-11
US10/411,046 US7132219B2 (en) 2001-02-02 2003-04-09 Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition
PCT/US2003/011275 WO2003087233A2 (en) 2002-04-11 2003-04-11 Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition

Publications (1)

Publication Number Publication Date
DE60334980D1 true DE60334980D1 (en) 2010-12-30

Family

ID=43218143

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60334980T Expired - Lifetime DE60334980D1 (en) 2002-04-11 2003-04-11 PLASMA-REINFORCED CHEMICAL VAPORING POLYMERIC REFLECTIVE COATING COATINGS

Country Status (2)

Country Link
AT (1) ATE488784T1 (en)
DE (1) DE60334980D1 (en)

Also Published As

Publication number Publication date
ATE488784T1 (en) 2010-12-15

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